JPS5954800U - 真空システム - Google Patents

真空システム

Info

Publication number
JPS5954800U
JPS5954800U JP15124082U JP15124082U JPS5954800U JP S5954800 U JPS5954800 U JP S5954800U JP 15124082 U JP15124082 U JP 15124082U JP 15124082 U JP15124082 U JP 15124082U JP S5954800 U JPS5954800 U JP S5954800U
Authority
JP
Japan
Prior art keywords
evacuated
chamber
pressure
vacuum pump
rough
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15124082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6224063Y2 (enrdf_load_stackoverflow
Inventor
吉村　長光
晃 白川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP15124082U priority Critical patent/JPS5954800U/ja
Publication of JPS5954800U publication Critical patent/JPS5954800U/ja
Application granted granted Critical
Publication of JPS6224063Y2 publication Critical patent/JPS6224063Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP15124082U 1982-10-04 1982-10-04 真空システム Granted JPS5954800U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15124082U JPS5954800U (ja) 1982-10-04 1982-10-04 真空システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15124082U JPS5954800U (ja) 1982-10-04 1982-10-04 真空システム

Publications (2)

Publication Number Publication Date
JPS5954800U true JPS5954800U (ja) 1984-04-10
JPS6224063Y2 JPS6224063Y2 (enrdf_load_stackoverflow) 1987-06-19

Family

ID=30335203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15124082U Granted JPS5954800U (ja) 1982-10-04 1982-10-04 真空システム

Country Status (1)

Country Link
JP (1) JPS5954800U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6224063Y2 (enrdf_load_stackoverflow) 1987-06-19

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