JPS5947702A - 感湿素子の製造方法 - Google Patents

Info

Publication number

JPS5947702A

JPS5947702A JP57157578A JP15757882A JPS5947702A JP S5947702 A JPS5947702 A JP S5947702A JP 57157578 A JP57157578 A JP 57157578A JP 15757882 A JP15757882 A JP 15757882A JP S5947702 A JPS5947702 A JP S5947702A

Authority

JP

Japan

Prior art keywords

moisture

sensitive

electrodes

thick

sensitive layer

Prior art date

1982-09-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 238000000034 method Methods 0.000 title description 2
• MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 22
• 239000000243 solution Substances 0.000 claims description 8
• 239000000758 substrate Substances 0.000 claims description 8
• 239000007864 aqueous solution Substances 0.000 claims description 7
• 238000002156 mixing Methods 0.000 claims description 5
• 239000000203 mixture Substances 0.000 claims description 5
• 239000011230 binding agent Substances 0.000 claims description 4
• 238000004519 manufacturing process Methods 0.000 claims description 3
• WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 claims description 2
• 239000001856 Ethyl cellulose Substances 0.000 claims description 2
• ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 claims description 2
• 239000004372 Polyvinyl alcohol Substances 0.000 claims description 2
• OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 claims description 2
• WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 claims description 2
• 229940088601 alpha-terpineol Drugs 0.000 claims description 2
• SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 claims description 2
• 238000003618 dip coating Methods 0.000 claims description 2
• 229920001249 ethyl cellulose Polymers 0.000 claims description 2
• 235000019325 ethyl cellulose Nutrition 0.000 claims description 2
• 239000000463 material Substances 0.000 claims description 2
• 229920000609 methyl cellulose Polymers 0.000 claims description 2
• 239000001923 methylcellulose Substances 0.000 claims description 2
• 229920002451 polyvinyl alcohol Polymers 0.000 claims description 2
• 229940116411 terpineol Drugs 0.000 claims description 2
• 239000011248 coating agent Substances 0.000 claims 1
• 238000000576 coating method Methods 0.000 claims 1
• 235000010981 methylcellulose Nutrition 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 7
• 238000005259 measurement Methods 0.000 description 6
• 239000000919 ceramic Substances 0.000 description 5
• 239000000843 powder Substances 0.000 description 4
• 235000006693 Cassia laevigata Nutrition 0.000 description 2
• LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
• KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
• 241000522641 Senna Species 0.000 description 2
• 238000001035 drying Methods 0.000 description 2
• PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
• 229910052737 gold Inorganic materials 0.000 description 2
• 239000010931 gold Substances 0.000 description 2
• 239000007788 liquid Substances 0.000 description 2
• 229920000620 organic polymer Polymers 0.000 description 2
• 239000005022 packaging material Substances 0.000 description 2
• 229940124513 senna glycoside Drugs 0.000 description 2
• DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
• 239000004677 Nylon Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 238000007605 air drying Methods 0.000 description 1
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• 238000000137 annealing Methods 0.000 description 1
• 239000011324 bead Substances 0.000 description 1
• 229910052799 carbon Inorganic materials 0.000 description 1
• 230000008602 contraction Effects 0.000 description 1
• 238000001816 cooling Methods 0.000 description 1
• 230000007423 decrease Effects 0.000 description 1
• 239000008367 deionised water Substances 0.000 description 1
• 229910021641 deionized water Inorganic materials 0.000 description 1
• 229910003460 diamond Inorganic materials 0.000 description 1
• 239000010432 diamond Substances 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 239000003792 electrolyte Substances 0.000 description 1
• 239000002001 electrolyte material Substances 0.000 description 1
• 238000002474 experimental method Methods 0.000 description 1
• 239000000835 fiber Substances 0.000 description 1
• 239000000706 filtrate Substances 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• 238000005470 impregnation Methods 0.000 description 1
• 239000012528 membrane Substances 0.000 description 1
• 239000011259 mixed solution Substances 0.000 description 1
• 229920001778 nylon Polymers 0.000 description 1
• 229910052763 palladium Inorganic materials 0.000 description 1
• 239000002245 particle Substances 0.000 description 1
• 229920003023 plastic Polymers 0.000 description 1
• 239000004033 plastic Substances 0.000 description 1
• 239000002861 polymer material Substances 0.000 description 1
• 229920002689 polyvinyl acetate Polymers 0.000 description 1
• 239000011118 polyvinyl acetate Substances 0.000 description 1
• 229910021426 porous silicon Inorganic materials 0.000 description 1
• 238000012545 processing Methods 0.000 description 1
• 229910052708 sodium Inorganic materials 0.000 description 1
• 239000011734 sodium Substances 0.000 description 1
• 238000003756 stirring Methods 0.000 description 1
• 239000006228 supernatant Substances 0.000 description 1
• 238000012360 testing method Methods 0.000 description 1
• RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
• 229910000406 trisodium phosphate Inorganic materials 0.000 description 1
• 235000019801 trisodium phosphate Nutrition 0.000 description 1
• 235000013311 vegetables Nutrition 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Cited By (2)