JPS5943874A - Vessel for storing material to be evaporated and its using method - Google Patents

Abstract

PURPOSE:To manufacture a film deposited by evaporation having good film quality with a simple and durable vessel, by heating and evaporating >=2 kinds of raw materials to be evaporated simultaneously in the vessel having no partition wall, conducting the same through an opening smaller than the evaporation area and depositing the vapors on a substrate. CONSTITUTION:Internal vessels 13, 14 contg. selenium alloys 3, 4 having different concns. or different component elements are disposed in a vessel body 10 which is not provided with a partition wall for segmenting substantially the internal space of a evaporation source 11. Heater lamps 5, 6 are respectively disposed and are turned on simultaneously to heat and eveporate the alloys, the vapors whereof are conducted through an upper opening 7 smaller than the evaporation area to the outside and are deposited on a substrate to be deposited therein with a film by evaporation (not shown). A plate 15 for preventing bumping and a lamp 16 for accelerating the vapor and preventing condensation are further provided in the vessel 10 to improve the film quality and to prevent the corrosion of the body 10. The evaporated vapors are thus uniformly mixed, and the film deposited by evaporation having the good film quality of a desired concn. profile is thus obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention is used to heat and evaporate an evaporation material made of selenium and tellurium, for example, so that the evaporation material follows an opening smaller than the evaporation area and is led out. The present invention relates to an evaporative material container constructed as described above and a method of using the same.

This type of evaporation material container (hereinafter referred to as a evaporation boat).

) is known as a so-called open boat having an upper part that is approximately the same size as the evaporation surface λh of the evaporation material. However, in such an open boat, it is difficult to control the deposition rate, and there are many practical problems such as bumping.

On the other hand, there is a boat called the Knudsensel type that eliminates the drawbacks of open boats.

By constricting the evaporation area narrower than the upper space 1"1, the evaporation rate can be effectively controlled, and the evaporated matter ejected by bumping can reach the soil part 1i1D. It is very excellent in that it does not adhere to the substrate and fly outward (that is, to the side of the substrate to be evaporated).

As such a Knudsen cell type evaporation source, a single boat type having a relatively simple structure and improved operability and evaporation stability has been proposed, for example, in Japanese Patent Laid-Open No. 176361/1983. As shown in FIG. 1, this known evaporation source divides the inner space of one boat 1 into two by a partition wall 2, and selenium-tellurium alloy 3.4 with different component concentrations is placed in each of these divided spaces. Then, each selenium-tellurium alloy can be heated and evaporated by a heater 5.6, and then led out from the lower part between the upper parts. In this case, the temperature of each alloy is individually controlled, and while each vapor is mixed, a drum-shaped substrate 8 is heated.
The m1 degree profile of tellurium is controlled by vapor deposition.

However, it has been found that this known device and method has the following drawbacks. That is, since each evaporation material is evaporated in a space isolated from each other, it is difficult to uniformly mix these multiple types of vapors, and a uniform or continuous vapor is formed on the substrate. Deposited film with intensity profile (Se 'I"e Aik light body 11j'!)
cannot be formed. Furthermore, if steam from the other side enters the evaporation material side, which is controlled at a relatively low temperature, this steam may adhere to the inner wall of the boat, or the steam exiting to the outside may adhere to the outer wall of the boat on the low temperature side. A phenomenon occurs.

This curing substance is disadvantageous because it changes the vapor composition due to re-evaporation or the like. Further, the provision of partition walls as described above causes another fatal defect.
In other words, when an alloy with a high tellurium concentration is used as the evaporation material, the partition walls are likely to be corroded by the highly corrosive tellurium vapor, which reduces its durability as an evaporation source and causes corrosive substances to form in the evaporated film. The problem of contamination arises. If measures were taken to lower the temperature of the partition wall in order to prevent this, this would be inappropriate, since vapor condensation (further 1.1 sublimation) would occur on the I'f+4 wall soil.

The present invention uses the above-mentioned evaporation source! By correcting the defects while making the best use of the
The purpose of the present invention is to provide an evaporation material container that can produce a evaporated film with a good film quality and has improved durability.

That is, in the evaporative material container described at the beginning of the present invention &'':L:L, two or more evaporative materials are arranged within a single container main body, and the inner space of the container main body is substantially occupied between each evaporative material. It is characterized by the fact that there is no partition wall that separates the

According to this container, the features of the Knudsen cell type evaporation source described above (i.e., evaporation controllability, prevention of bumping, etc.) can be exhibited, and each type of evaporation charge can be evaporated into a common evaporation source. It is possible to homogenize the mixing of steam to achieve uniform or continuous concentration control. In addition, since each A charge can be heated at the same time, the above-mentioned problem of adhesion of vapor substances does not occur. In addition to this,
Another advantage of not having a μm1 wall inside the container is that
Corrosion that would occur if a partition wall is provided and impurities entering the deposited film can also be avoided.

In the container according to the present invention, heaters for heating each evaporation material are provided in front of each other, and it is important to configure the container so that these heaters are turned on at the same time in order to obtain the above-mentioned effects. However, in order to more effectively prevent bumping, it is preferable that a bumping prevention plate be provided on the evaporation charge.

The container according to the invention is preferably used as follows. That is, in this method of use, two or more types of evaporative materials are placed in a single container without walls, rather than substantially dividing the internal space of the container body, and these evaporative materials are is simultaneously heated and evaporated, and is led out through an opening smaller than the evaporation area to be evaporated onto the substrate to be evaporated.

By using this method, it is possible to reliably obtain a remarkable effect with good reproducibility, and it is extremely unnecessary in the production of vapor-deposited films.

In this method, it is burdensome to evaporate each evaporation material at a different evaporation rate in order to obtain the desired concentration profile. Selenium alloys can be used as evaporation charges, but the concentrations of the same type of component elements other than selenium may differ among the selenium alloys.
The amounts of component elements other than selenium may be different between the selenium base metals.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be explained in detail by way of examples and with reference to the drawings.

The evaporation source 11 shown in FIG. 2 is constructed in a Knudsen cell type, but with this, there is no partition wall provided inside the container body 10 that substantially divides the internal space. , in the common inner space 12 the first Se of concentration)°15
-'L''e vaporized ion material 3 and second 5e-Te vaporized material 4 are housed in each inner container 13, 14, respectively.

A heater lamp 5.6 is placed between each evaporation material, and a bumping prevention plate 15 and a heater lamp 16 for preventing vaporization and condensation are arranged above. To explain -011 of the evaporation A'1 operation using an evaporation source, the first evaporation material 3 has a Te concentration of 4 times, 11
(5e-Te in charge, Tea degree 2 as the second evaporation charge 4
5 Weight i %'Se-'re was equipped with Q separately 0
Then, turn on heaters 5 and 6 at the same time, and
When each evaporation material was simultaneously evaporated and deposited at C for 60 minutes, evaporation material 3 with a low temperature I evaporated completely, and evaporation material 4 with a high evaporation rate had an evaporation rate of about 30. It is better to set the vacuum level of the vapor deposition tank to In'' Torr or higher.The result of analyzing the thus obtained vapor deposited film, that is, the 5e-Te photoreceptor, with an The Te concentration profile is as shown in the figure, the inner layer is 5% by weight of Te and functions as an electron transport layer, and the surface layer is 5% by weight of Te.
1'elB% by weight, and functions as a charge generation layer with particularly good sensitivity in the long wavelength range due to the high tellurium content. Regarding this photoreceptor, electrophotographic copying machine U
When the actual photographic characteristics were examined using Bix V2 (manufactured by Konishiroku Photo Industry Co., Ltd.), high-density images with no fog were produced.

As mentioned above, according to the evaporation method according to the present invention, the structure of the evaporation source itself is simplified, and
Desired) humidity control can be carried out easily. This is because no wall is provided in the container, and the difference in evaporation rate of each evaporation agent and old material is used to evaporate them simultaneously, allowing a uniform mixture of vapor to be discharged to the needle base 1tt1. I got it,
), the profile (see Figure 3) is very desirable, and it can exhibit excellent electrostatic properties such as gjY: body potential retention, lower residual potential, and lower black paper 411f. .

In addition, the tellurium concentration in each of the above-mentioned evaporative materials 3 and 4 can be selected by 4.
The concentration may be selected within the range of 15-25:fjr, i+i%. Still, instead of tellurium, other 1jυ,
3. Partitional elements, e.g. arsenic, antimony, etc. : Used, all of these materials i'; Materials are the same: r! tra may be used, or ('J, its i'ili Q34 may be different.

Figure 4 shows another example of an evaporation source, but here the 11A monthly charge 3.4 is also heated from the bottom by the heater 25.2G, which improves the consistency of heating and evaporation. . In addition, bumping prevention &111, lji'1 lower 7j
It is placed under 'j.

Although the present invention has been illustrated above, modifications can be made based on the technical idea of the present invention.

For example, the shape of the evaporation source, the 44 structure, the arrangement of the evaporation material, etc.
1.Sl-J, &;l: N-jli can be changed.
In addition, the evaporation material used is not limited to Se-'l'e.
Se-S, FeNiXAgBr-I, etc. may also be used.

1124 on page 1 is a schematic diagram of the main part +1 of the vacuum evaporation according to the conventional example.

Figures 2 to 4 show embodiments of the present invention, Figure 2 shows the IFIIi diagram of the evaporation source. The third side is a diagram showing the delle cooling profile of the deposited film, Figure 4 is a cross-sectional view of another evaporation source. It is.

In addition, in the symbols shown in the drawings, 3...--...----.・ ...Evaporation charge of tube tellurium 5.6.16.25.2G...
・Heater 7・ ... −・・Top opening 8・
...... - Vapor deposition target substrate 11...
・ ・・・・・・Evaporation line 15・・・・・・・・・・・・
・ ・ ・This is a bumping prevention plate.

Agent Patent Attorney Yori Nisaka 1 fig. 4 fig. 2 fig. Kazuo Tono1, Indication of the case 1982 Patent Application No. 1542402, Name of the invention Evaporation material container and its method of use3, Relationship with the person making the amendment Patent applicant address Nishi-Shinjuku, Shinjuku-ku, Tokyo 1-26-2 Name
(127) Konishiroku Photo Industry Co., Ltd. 4, Agent address: 6, 2nd floor, Suzuki Building, 3-9-17 Shibasaki-cho, Tachikawa-shi, Tokyo, Supplementary iE? The number of inventions increases from this 7, Detailed description of the invention column 8 of the specification subject to amendment, Contents of amendment (1), ``(Furthermore, sublimation) .

(2) rSe-Te photoreceptor on page 8, second line from the bottom.”
First, correct it to "S e - T' e photosensitive layer."

- Above - 423

Claims (1)

[Scope of Claims] 1. An evaporation material container used for heating and evaporating an evaporation material and configured such that the evaporation material is led out through an opening smaller than the evaporation area of the evaporation material, 2.
2 or more evaporative materials are each placed within a single container body;
An evaporative material container characterized in that there is no partition wall between each evaporable material that substantially divides the internal space of the container body. 2. The evaporative interest storage container according to claim 1, wherein heaters are arranged to heat each evaporative material, and the heaters are energized at the same time. 3. A bumping prevention plate is provided on the evaporation material! 1′
i. The evaporative interest storage device according to claim 1 or 2. 4. Two or more types of evaporation materials are placed in a single container that is not provided with partition walls that substantially divide the internal space of the container body, and these evaporation materials are simultaneously heated and evaporated. 1. A method of using an evaporation material container, characterized in that the evaporation material container is led out through an opening smaller than its area and deposited on a substrate to be evaporated. 5. The method according to claim 4, wherein each evaporation material is evaporated at different evaporation rates. 6. Use selenium alloy as evaporation material, qheel'F,
ii'7 The method described in item 4 or 5 of the scope of the request. 7. Identical other than selenium among each selenium alloy; 1-
The concentrations of the component elements of ili #ii are different from each other! 1. The method described in Section 6 of the scope of permission request. 8. The method described in item 6 of the ti1Σ section of the patent claim, wherein the types of component elements other than selenium are different among the selenium alloys.