JPS62160460A - Vaporization source for vacuum vapor deposition - Google Patents

Abstract

PURPOSE:To uniformize vapor temperature and to form a photosensitive layer which has uniform film thickness and small variance in photosensitivity by fitting a heat pipe on both sides of the vapor blowout port of the external container of a vaporization source for vacuum vapor deposition. CONSTITUTION:A vapor-deposition material is charged in an internal container 12 and vaporized by being heated by a heating body 13, so that the vapor of the vapor-deposition material is blown out of the vapor blowout port 14. At this time, the heat pipes 15 are fitted on both sides of the vapor blowout port, so if variance of heat from the heating body 13 or temperature variance originating from the installation conditions of the external container 11 and other external factors is caused, the temperature variance is relieved speedily and eliminated because of the superior heat conduction of the heat pipes 15. Temperature variance that the vapor has when the vapor-deposition material is vaporized is reduced by heat conduction between the vapor and the external container, specially, the periphery of the vapor blowout port 14 fitted to the heat pipes 14.

Description

[Detailed Description of the Invention] [Field 5) to which the invention pertains] The present invention is a method for manufacturing an electrophotographic photoreceptor by vacuum solidifying a photoconductive material such as selenium or a selenium alloy onto a substrate. Regarding evaporation sources for vacuum evaporation.

[Prior art and its problems]

A general method for forming the photosensitive layer of an electrophotographic photoreceptor by vacuum vaporization is as shown in FIG. The cylindrical base 3 is attached to the shaft 2 and while rotating, the evaporation source 4 located below is
The vapor deposition material 5 is put into the substrate 3 and heated with a heater to evaporate it.
A photosensitive layer is formed on top. At this time, in order to increase production efficiency, it is customary to make the support shaft 2 as long as possible so that a large number of substrates can be attached at once, and the evaporation source 4 to be correspondingly long.

Figure 4 is a conceptual cross-sectional view of a general evaporation source;
The figure is a c-cWIT plane view of FIG. 4. The evaporation source has a double structure: an inner container 7 that houses the evaporation material, a heater 10 that heats and evaporates the evaporation material, and a heater 10 that surrounds the inner container 7 and the heater 10 to direct the flow of vapor of the evaporated material. It is composed of an outer container 9 in which steam is uniformly spouted toward a large number of substrates from a spout (slit) 8 having a length corresponding to the length of the substrates in a controlled manner. When a photosensitive layer is formed using such an evaporation source, variations in film thickness can be significantly reduced by considering the shape of the slits 8.

On the other hand, the photosensitivity, which is one of the important electrophotographic properties of a photoreceptor, is due to the evaporation of the deposited material! It depends a lot on once.

In particular, when selenium-tellurium alloys or selenium-arsenic thread alloys are used as photoconductive materials, the photosensitivity is controlled by the amount of tellurium or arsenic doped. Since the degree of fractional distillation varies depending on the evaporation temperature, variations in the evaporation temperature will cause variations in photosensitivity. If the inner container 7 is long, the temperature at the periphery will be lower than the center, and the temperature will tend to vary widely, making the photosensitivity more likely to vary. Therefore, in order to avoid this problem, the length of the inner content 557 is shortened from length A to length B of the container 71, as shown by the two-dot chain line in FIG. Therefore, an attempt was made to reduce the temperature variation on the evaporation surface of the evaporation material by placing the evaporation material in the center of the outer container 9. However, in this case, the temperature variation on the evaporation surface was reduced, but the evaporation The temperature variation in the slit 8 from which the steam spouts becomes larger because the only part of the heater 10 that absorbs heat is the central part where heat absorption due to the heat of evaporation occurs, and the variation in photosensitivity cannot be reduced. There wasn't.

[Purpose of the invention]

The present invention has been made in view of the above-mentioned points, and is an object of the present invention to reduce temperature variations at the vapor jet port of an external container of an evaporation source, and to form a photosensitive layer with a uniform film thickness and less variation in photosensitivity. The purpose is to provide an evaporation source for vacuum evaporation that can be used.

[Key points of the invention]

The object of the present invention is achieved by attaching a heat pipe near the steam outlet of the outer container surrounding the inner container and heating element of the evaporation source for vacuum evaporation.

[Embodiments of the invention]

FIG. 1 is a cross-sectional view of an evaporation source according to an embodiment of the present invention,
FIG. 2 is a top view of the same. An inner container 12 and a heating element 13 are arranged inside the outer container 11, and heat pipes 15 are arranged on both sides of the slit-shaped steam outlet at the upper part of the outer container 11 in parallel with the longitudinal direction of the steam outlet. Welded.

4 Using such a vacuum evaporation source, when the inner container 12 is filled with a evaporation material and the material is heated and evaporated by the heating element 13, the vapor of the evaporation material is ejected from the steam outlet 14. At this time, because heat pipes are attached to both sides of the steam outlet, if temperature variations occur due to variations in heat from the first heating element 13, installation conditions of the outer container 11, or other external factors, the heat pipes may .

Due to the excellent heat transport ability of the heat pipe 15, temperature fluctuations will be quickly alleviated and eliminated.Also, temperature fluctuations caused in the steam when the deposition material is evaporated can be reduced by connecting the steam and the external container, especially the heat pipe 15 attached. This can be reduced by transferring heat to and from the vicinity of the steam outlet 14.

In this way, even in the case of materials that are prone to fractional distillation, such as selenium-tellurium alloys and selenium-arsenic thread alloys, homogeneous steam with little variation is ejected from the steam outlet, and the film thickness can be reduced. A uniform photosensitive layer with little variation in photosensitivity and the like can be obtained, making it possible to manufacture an excellent electrophotographic photoreceptor.

[Effect of the invention 1 The invention is to make the steam temperature uniform by installing heat pipes on both sides of the steam outlet of the external container of the evaporation source for vacuum evaporation, thereby making the steam components homogeneous. This method is particularly effective in manufacturing electrophotographic photoreceptors in which a vapor-deposited film of a selenium-based material is formed and utilized.

[Brief explanation of drawings]

Fig. 1 is a cross-sectional view of an evaporation source according to an embodiment of the present invention, Fig. 2 is a top view thereof, Fig. 3 is a cross-sectional view of a vacuum evaporation tank, and Fig. 4 is a cross-sectional view of an evaporation source of a conventional example. Top view, Figure 5 is C of Figure 4
-C sectional view. 11...Outer container, 12...Inner container, 13...
Heating body, 14... Steam spout, 15... Heat pipe. ,' v 1 Figure 3-c Figure 4

Claims (1)

[Claims] 1) An evaporation source for vacuum evaporation, characterized in that a heat pipe is attached near the steam outlet of an outer container that surrounds an inner container that accommodates an evaporation material and a heating element.