JPS62294253A - Electrophotographic sensitive body - Google Patents
Electrophotographic sensitive bodyInfo
- Publication number
- JPS62294253A JPS62294253A JP13752986A JP13752986A JPS62294253A JP S62294253 A JPS62294253 A JP S62294253A JP 13752986 A JP13752986 A JP 13752986A JP 13752986 A JP13752986 A JP 13752986A JP S62294253 A JPS62294253 A JP S62294253A
- Authority
- JP
- Japan
- Prior art keywords
- tellurium
- tin
- selenium
- vapor deposition
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims abstract description 20
- 238000001704 evaporation Methods 0.000 claims abstract description 19
- 230000008020 evaporation Effects 0.000 claims abstract description 18
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910001215 Te alloy Inorganic materials 0.000 claims abstract description 13
- 108091008695 photoreceptors Proteins 0.000 claims description 14
- 229910052714 tellurium Inorganic materials 0.000 abstract description 21
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 abstract description 16
- 238000007740 vapor deposition Methods 0.000 abstract description 8
- 239000000758 substrate Substances 0.000 abstract description 5
- 238000004508 fractional distillation Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 4
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 229910045601 alloy Inorganic materials 0.000 abstract 2
- 239000000956 alloy Substances 0.000 abstract 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 29
- 239000011669 selenium Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 229910052711 selenium Inorganic materials 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000004071 soot Substances 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 238000004453 electron probe microanalysis Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 125000003748 selenium group Chemical group *[Se]* 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/043—Photoconductive layers characterised by having two or more layers or characterised by their composite structure
- G03G5/0433—Photoconductive layers characterised by having two or more layers or characterised by their composite structure all layers being inorganic
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
- G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
- G03G5/08207—Selenium-based
Abstract
Description
3、発明の詳細な説明 3. Detailed description of the invention
本発明は、原料としてセレン・テルル合金を用いて蒸着
したセレン・テルル系感光層を有する電子写真用字光体
に関する。The present invention relates to an electrophotographic character having a selenium-tellurium photosensitive layer deposited using a selenium-tellurium alloy as a raw material.
セレン・テルル系感光層は、通常10−’ torr以
下の真空中でセレン・テルル合金を蒸発させ、Mなどか
らなる導電性基体の表面に蒸着することにより形成され
る。蒸発原料のセレン・テルル合金は50%以下のTe
と残部Seからなるものが一般的で、形成される感光層
は、機能分離型の場合、第3図に示すようにMなどの基
体1の上に100%≧Se≧90%、10≧Te≧O%
の純セレンまたはセレン・テルル合金を原料として蒸着
された40〜70−の厚さのキャリア輸送層2.90%
≧Ss≧70%、 309A≧Te≧10%のセレン・
テルル合金を原料としてM着された5〜Ionの厚さの
キャリア発生N3を有する。
第4図に示す感光体は、表面を保1114により被覆し
て耐剛性の向上をねらいとするもので、高速PPC複写
機あるいはレーザプリンタに使用される。基体l上のキ
ャリア輸送N2は厚さ40〜70Paで蒸発原料の組成
は100%≧Ss≧90%、 10%≧Te≧0%が主
流である。キャリア発生N3は厚さ1〜5μで、蒸発原
料の組成は90%≧38≧50%、 50%↑e≧10
%が主流である。保護層4は厚さ107111以下で蒸
発原料の組成は100%>Se≧95%、5%≧Te≧
O%が主流である。中にはTeの代わりに5%以下のA
sを含んだ原料を用いることもある。
これらの感光層を得るに用いられるセレン・テルル合金
は全体にセレンの組成が大きいが、例えば10−’ t
orrで蒸着する時の飽和蒸気圧温度はセレンが417
K、テルルが527にと大きく異なり、従って蒸発源の
中でセレンとテルルは分留を生し、これにより得られる
感光層のセレン・テルルの組成は均一性を失い、基体か
ら遠ざかるに従ってテルルの濃度が高くなる。第2図は
、EPMA (電子プローブマイクロアナリシス)に
よって得られた第3図の構造をもつ感光層の膜厚方向の
テルル濃度分布曲線であり、感光層におけるテルル濃度
は全石均−ではない事を示している。しかもこのTe濃
度分布は、セレン・テルル合金の材料ロフト、蒸着条件
等によって異なり再現性は悪い、この事は、特に感光体
の感度特性や暗減衰特性に悪影響を及ぼすものである。The selenium-tellurium based photosensitive layer is usually formed by evaporating a selenium-tellurium alloy in a vacuum of 10-' torr or less and depositing it on the surface of a conductive substrate made of M or the like. The selenium-tellurium alloy used as the evaporation raw material contains less than 50% Te.
In the case of a functionally separated type, the photosensitive layer to be formed is generally composed of 100%≧Se≧90%, 10≧Te on a substrate 1 such as M, as shown in FIG. ≧O%
2.90% carrier transport layer with a thickness of 40 to 70%, deposited from pure selenium or selenium-tellurium alloy as raw material.
Selenium with ≧Ss≧70%, 309A≧Te≧10%
It has a carrier generation N3 with a thickness of 5 to 1 ion, which is deposited using tellurium alloy as a raw material. The photoreceptor shown in FIG. 4 has its surface coated with a coating 1114 to improve its rigidity, and is used in high-speed PPC copying machines or laser printers. The carrier transport N2 on the substrate l has a thickness of 40 to 70 Pa, and the main composition of the evaporation raw material is 100%≧Ss≧90% and 10%≧Te≧0%. The carrier generation N3 has a thickness of 1 to 5μ, and the composition of the evaporation raw material is 90%≧38≧50%, 50%↑e≧10
% is the mainstream. The thickness of the protective layer 4 is 107111 or less, and the composition of the evaporation raw material is 100%>Se≧95%, 5%≧Te≧
O% is the mainstream. Some contain less than 5% A instead of Te.
Raw materials containing s may also be used. The selenium-tellurium alloy used to obtain these photosensitive layers has a large composition of selenium, for example, 10-'t
The saturated vapor pressure temperature of selenium when vapor deposited with orr is 417
K, tellurium is significantly different from 527, therefore, selenium and tellurium undergo fractional distillation in the evaporation source, and the composition of selenium and tellurium in the resulting photosensitive layer loses uniformity, and the tellurium increases as it moves away from the substrate. Concentration increases. Figure 2 shows the tellurium concentration distribution curve in the film thickness direction of the photosensitive layer having the structure shown in Figure 3 obtained by EPMA (electron probe microanalysis), which shows that the tellurium concentration in the photosensitive layer is not uniform throughout the entire stone. It shows. Moreover, this Te concentration distribution varies depending on the material loft of the selenium-tellurium alloy, the deposition conditions, etc., and has poor reproducibility. This particularly has a negative effect on the sensitivity characteristics and dark decay characteristics of the photoreceptor.
本発明は、上述の問題を解決してテルルの分留を抑制し
、均一なテルル濃度分布を存する感光層を形成し、安定
した感光体特性を有し、安定したコピー画像を生ずる電
子写真用感光体を提供することを目的とする。The present invention solves the above-mentioned problems, suppresses fractional distillation of tellurium, forms a photosensitive layer with a uniform tellurium concentration distribution, has stable photoreceptor characteristics, and produces stable copy images for electrophotography. The purpose is to provide a photoreceptor.
本発明は、セレン・テルル系感光層をすずを、添加した
セレン・テルル合金を蒸発原料とする蒸着により形成す
ることにより上記の口約を達成するものである。The present invention achieves the above-mentioned limitations by forming a selenium-tellurium based photosensitive layer by vapor deposition using a selenium-tellurium alloy added with tin as an evaporation raw material.
第1図は、本発明の一実施例によって得られた感光層の
テルル濃度分布曲線を示す、この実施例は、従来は蒸発
させると第2図にテルル濃度分布を示す感光層を形成し
た蒸発原料に対し、キャリア輸送JK!2蒸着の場合は
すずを1000ρpi、キャリア発生1i3蒸着の場合
はすすを3000ppm添加して第3図に示す構造の感
光体を作成し7たもので、第2図の濃度分布に比較して
キャリア輸送層の濃度幅dが約1/3に減少しており、
テルル濃度分布の均一度が向上したことが分かる。
この結果、感光体の特性も向上する。第5図はキャリア
輸送層、第6図はキャリア発生層の蒸発原料にのみすす
を添加した場合の暗減衰量に対する影響、第7図はキャ
リア輸送層、第8図はキャリア発生層の蒸発原料にのみ
すすを添加した場合の光減衰量への影響を示し、それぞ
れすずの添加により減衰量が減少しでいる。試料数は各
】Oで、図中の点線は規格値を示す。
第1表、第2表はキャリア発生層 (CGL)、キャリ
ア輸送層 (CTL)の原料へのすず添加の暗減衰量の
規格値80V以下、光減衰量の規格値250〜550■
に対する相互作用をそれぞれ示す。
第1表
暗減衰量(V) 規格80V
以下規格値との対照の結果から、暗減衰量は小さく、光
減衰量は大きいことが望ましいことを考慮に入れると機
能分離型感光体のキャリア輸送層へのすず添加量は10
0〜2000ppm、キャリア発生層へのすず添加量は
1000〜5000ppmの範囲が特に有効である。FIG. 1 shows a tellurium concentration distribution curve of a photosensitive layer obtained according to an embodiment of the present invention. Carrier transportation JK for raw materials! A photoreceptor with the structure shown in Fig. 3 was prepared by adding 1000 ρpi of tin in the case of 2-vapor deposition and 3000 ppm of soot in the case of carrier-generating 1i3 evaporation. The concentration width d of the transport layer is reduced to about 1/3,
It can be seen that the uniformity of the tellurium concentration distribution has improved. As a result, the characteristics of the photoreceptor are also improved. Figure 5 shows the carrier transport layer, Figure 6 shows the effect on dark decay when soot is added only to the evaporation raw material in the carrier generation layer, Figure 7 shows the carrier transport layer, and Figure 8 shows the evaporation raw material in the carrier generation layer. The effect of adding soot on the optical attenuation is shown, and the attenuation decreases with the addition of tin. The number of samples is [0] for each, and the dotted line in the figure indicates the standard value. Tables 1 and 2 show the standard dark attenuation value of 80 V or less and the standard value of optical attenuation of 250 to 550 V when tin is added to the carrier generation layer (CGL) and carrier transport layer (CTL) raw materials.
The interaction with each is shown. Table 1 Dark attenuation (V) Standard 80V
From the results of comparison with the standard values below, taking into consideration that it is desirable that the dark attenuation is small and the light attenuation is large, the amount of tin added to the carrier transport layer of the functionally separated photoreceptor is 10
It is particularly effective that the amount of tin added to the carrier generation layer is in the range of 1000 to 5000 ppm.
本発明によれば、セレン・テルル系恐光層蒸着のための
蒸発原料にすすを添加することにより、テルルの分留を
抑制でき、均一な);炭分布の感光層が得られるため感
光体の感度、暗減衰特性等のばらつきが減少し、安定し
た画像濃度のコピーを作ることのできる電子写真用感光
体を得ることができる。According to the present invention, by adding soot to the evaporation raw material for the deposition of a selenium-tellurium photophobic layer, fractional distillation of tellurium can be suppressed and a photosensitive layer with a uniform carbon distribution can be obtained. It is possible to obtain an electrophotographic photoreceptor in which variations in sensitivity, dark decay characteristics, etc. are reduced, and copies with stable image density can be made.
第1図は本発明の一実施例の感光層のテルル濃度分布線
図、第2図は従来の感光層のテルル濃度分布線図、第3
図は本発明の実施の対象となる感光体の一例の断面図、
第4図は他の例の断面図、第5図はキャリア輸送層用蒸
発原料へのすず添加量と感光体の暗減衰量との関係線図
、第6図はキャリア発生層用蒸発原料へのすず添加量と
感光体の暗減衰量との関係線図、第7図はキャリア輸送
層用蒸発原料へのすず添加量と感光体の光減衰量との関
係線図、第8図はキャリア発生層用蒸発原料へのすず添
加量と感光体の光減衰量との関係線図である。
第1図
第4図
第5図
第6図FIG. 1 is a tellurium concentration distribution diagram of a photosensitive layer according to an embodiment of the present invention, FIG. 2 is a tellurium concentration distribution diagram of a conventional photosensitive layer, and FIG.
The figure is a cross-sectional view of an example of a photoreceptor to which the present invention is implemented;
Figure 4 is a cross-sectional view of another example, Figure 5 is a relationship diagram between the amount of tin added to the evaporation raw material for the carrier transport layer and the amount of dark attenuation of the photoreceptor, and Figure 6 is the relationship diagram for the evaporation raw material for the carrier generation layer. Figure 7 is a relationship diagram between the amount of tin added to the evaporation material for the carrier transport layer and the amount of light attenuation of the photoreceptor, and Figure 8 is a relationship diagram between the amount of tin added to the evaporation material for the carrier transport layer and the amount of light attenuation of the photoreceptor. FIG. 3 is a relationship diagram between the amount of tin added to the evaporation raw material for the generation layer and the amount of light attenuation of the photoreceptor. Figure 1 Figure 4 Figure 5 Figure 6
Claims (1)
光層を有するものにおいて、蒸発原料にすずが添加され
たことを特徴とする電子写真用感光体。1) An electrophotographic photoreceptor having a photosensitive layer deposited using a selenium-tellurium alloy as an evaporation raw material, characterized in that tin is added to the evaporation raw material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13752986A JPS62294253A (en) | 1986-06-13 | 1986-06-13 | Electrophotographic sensitive body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13752986A JPS62294253A (en) | 1986-06-13 | 1986-06-13 | Electrophotographic sensitive body |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62294253A true JPS62294253A (en) | 1987-12-21 |
Family
ID=15200807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13752986A Pending JPS62294253A (en) | 1986-06-13 | 1986-06-13 | Electrophotographic sensitive body |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62294253A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11938583B2 (en) | 2018-08-30 | 2024-03-26 | Deckel Maho Pfronten Gmbh | Transport device for receiving one or more module units having machine tool accessory devices and for transporting the one or more received module units |
-
1986
- 1986-06-13 JP JP13752986A patent/JPS62294253A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11938583B2 (en) | 2018-08-30 | 2024-03-26 | Deckel Maho Pfronten Gmbh | Transport device for receiving one or more module units having machine tool accessory devices and for transporting the one or more received module units |
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