JPS5943526A - Manufacture of resin sealed type electronic part - Google Patents

Manufacture of resin sealed type electronic part

Info

Publication number
JPS5943526A
JPS5943526A JP15410682A JP15410682A JPS5943526A JP S5943526 A JPS5943526 A JP S5943526A JP 15410682 A JP15410682 A JP 15410682A JP 15410682 A JP15410682 A JP 15410682A JP S5943526 A JPS5943526 A JP S5943526A
Authority
JP
Japan
Prior art keywords
resin
die
lead frame
sealed
type electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15410682A
Other languages
Japanese (ja)
Inventor
Hirokuni Mamiya
間宮 洋邦
Teruyoshi Shibata
柴田 輝義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP15410682A priority Critical patent/JPS5943526A/en
Publication of JPS5943526A publication Critical patent/JPS5943526A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE:To enable to continuously produce multikind parts of a small quantity as well as to reduce the percentage of rejects by a method wherein, after a lead frame has been pinched between forming materials and formed in one body with a composite tablet, an element is die-inner bonded on the molded article, and said element is sealed by performing a potting. CONSTITUTION:The upper and lower surfaces of a metal lead frame 1 are pinched with the forming material consisting of phenol resin, epoxy resin and the like, and after they are formed in one body with a composite table 6, they are formed by performing a compression molding. Subsequently, after an element 2 has been die-inner bonded on a molded article 7, the element 2 is sealed by performing a potting 9 using a casting material consisting of phenol resin, epoxy resin and the like, and a resin sealed type electronic part is obtained. In order to improve the adhesive property of the forming material and the casting material, an activating process such as a pretreatment, a coating process and the like may be performed on the surface of the element, where die-inner bonding was performed, and on the surface of the lead frame.

Description

【発明の詳細な説明】 本発明は電子機器、電気機器等に用いられる樹脂封止型
電子部品の!!!!造方法に関するもので、その目的と
するところは生爪多品種生産、連続生産を可能ならしめ
且つ不良発生率を低下せしめることKある。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to resin-sealed electronic components used in electronic equipment, electrical equipment, etc. ! ! ! This relates to a manufacturing method, and its purpose is to enable the production of a wide variety of raw nails, continuous production, and to reduce the rate of defects.

従来の樹脂封止バlJ電子部品の製造方法は第1図に示
すようにリードフレームlに素子2をダイボンディング
してからインナーボンティング8し次にバンシベーショ
ン4してカラトランスファー成1囮1.で素子を樹脂5
で封屯して樹脂封止型電子部品を得るもので、大量少品
種生ρ4、バッチ生産に好適であるが少1牧多品種生産
、連続生産に不向きで且つ不良発生率も6〜7%と高い
ものであった。
The conventional manufacturing method for resin-sealed electronic parts is as shown in FIG. .. The element is made of resin 5
It is suitable for high-volume, small-variety production, ρ4, batch production, but is unsuitable for small-scale, high-mix production, continuous production, and has a defect rate of 6 to 7%. It was very expensive.

本発明t」上記欠点を解決するもので、リードフレーム
の士「面金成形材料で挾み複合タブレットに一体化して
から成形後、該成形品に素子をダイインナーボンディン
グしてから素子2 ボンディングで封1にするため少量
多品種生産、連続生産をMl能ならしめ且つ不良発生率
を1〜2%に低下させることができだものである。
The present invention solves the above-mentioned drawbacks.The lead frame is sandwiched with a metal molding material and integrated into a composite tablet, and after molding, the element is die-inner bonded to the molded product, and then the element 2 is bonded. In order to reduce the number of seals, it is possible to make small-lot, high-mix production and continuous production more efficient, and to reduce the defect rate to 1 to 2%.

以下本発明の一実施例を第2図のIW+而にまり貯〜明
する。1 )」金属製リードプレー1・で、リーじフV
−ム1の上F 而’s) 7エフール樹11if、エポ
キシ樹脂、不飽和ボリエヌデル樹脂、ジアリルフタレー
トζ91脂、シリコン樹脂、・′ラミンj+・・1脂、
ポリアミド、ポリイミド、ボリフ゛タジ]ニン、ポリス
ルフォン、ボリウレクン等の単独又Qj混合物又t」y
;4性物からなる成形材料で挾み複合タブレアトロ(で
一体化してから圧縮成形等で成形後、J々+:′i、形
品7に素子2f6:ダイインナーボンディング8してか
ら素子2全フ丁ノール樹脂、エボギシ樹脂、イ< +j
i・(「[Jポリlステル11!Il 脂、ジアリルフ
タレ−1−+ηl 脂、シリフン(6寸1i旨、53ミ
リアミド、ポリイミド、−1!すブタジェン、ポリスル
フォン、ポリウレタン等の中独又は91.41物又は研
・l’l□ ’h+からなる注形材でボッティング9で
封1トして(I71脂封+、lx型1F、子部品を得る
ものである。なりぶ了、q゛イインリーボンデイングり
−l−′7レーム表面に!戊形材判や注形材との接着f
1を・向上させるだめの−II処理、]−ティング処+
IJ1等(7)活性化処理音節し2−C棧くこともでき
るものであン)、以ト1?h!明したように本発明の+
、:1+脂封1に型7(f、子部品の製造方法によれば
少FfL多品挿生産、連続生戸C全実現することができ
且つリードフレームの変形が全くないため不良発生率を
従来方?Jξより5%低[さすることができたものであ
る。
An embodiment of the present invention will be explained below based on IW+ in FIG. 1)"Metal lead play 1, leaf V
7 Efur resin 11if, epoxy resin, unsaturated Boriendel resin, diallyl phthalate ζ91 resin, silicone resin, Lamin j+...1 resin,
Single or mixture of polyamide, polyimide, polyvinyl, polysulfone, polyurecne, etc.
; Sandwiched with a molding material consisting of four properties, integrated with a composite table atro (and then molded by compression molding etc.), J+:'i, molded product 7, element 2f6: die inner bonding 8, then element 2 Futonol resin, Ebogishi resin, i < +j
i. Seal with botting 9 using a casting material consisting of 41 parts or 1'l□'h+ (I71 fat seal +, lx type 1F, to obtain the child parts. Iinri Bonding - l-'7 On the surface of the frame! Adhesion with molded materials and cast materials f
-II processing to improve 1, ]-ting processing +
IJ1, etc. (7) Activation processing syllables can also be used as 2-C. h! As explained above, the +
,: 1 + Grease seal 1 to mold 7 (f) According to the manufacturing method of the sub-components, it is possible to achieve low FfL multi-item insertion production, continuous raw door C, and there is no deformation of the lead frame, so the defect rate is reduced. 5% lower than the conventional method?Jξ.

【図面の簡単な説明】[Brief explanation of the drawing]

牟jliン1に従来の1.’、’1指封(ト型重了部品
の1Lfu I!!i方法の簡略T1(−図、:’n 
21図+1本発明による+Yf1脂封+ト’!1シ゛取
子部品の叫++’j ]J法の簡略工程図である。 ■(・Jリードフレーム、2は素子、8はインナーボン
ディング、41・Jバ、シベー・・4ン、 51:1 
j’pJ II?(,6は複合メブレ、ト、7 kJ、
 Ij’j ’lジ品、8 ifダイインナーボンディ
ング、9 ):j +1r 、、フ゛イングである。 特W「出願人 松ト11.工(′1式会社 代用1人)「却下 竹 元 倣 九 (に1か2名) ェ)”t 1 j、J 第2rり1 1 7 /
The conventional 1. ',' 1 finger seal (1Lfu I!!i method of 1 finger seal (-Fig., :'n
Figure 21+1+Yf1 fat sealing +to' according to the present invention! This is a simplified process diagram of the J method for 1-shield lever parts. ■(・J lead frame, 2 is element, 8 is inner bonding, 41・J bar, side...4, 51:1
j'pJ II? (, 6 is a composite mesh, 7 kJ,
Ij'j'lji product, 8 if die inner bonding, 9): j +1r, . Special W "Applicant Matsuto 11. Eng ('1 type company substitute 1 person) "Rejected Takemoto imitation 9 (1 or 2 people) e)"t 1 j, J 2nd rri 1 1 7 /

Claims (1)

【特許請求の範囲】[Claims] (1)  リードフレームの上下面を成形材料で挾み複
合タブレットに一体化してから成形後、該成形品に素子
をダイインナーボンディングしてから素子をボッティン
グで封止することを特徴とする樹脂封止型電子部品のm
進方法。
(1) A resin characterized in that the upper and lower surfaces of a lead frame are sandwiched between molding materials and integrated into a composite tablet, and after molding, an element is die-inner bonded to the molded product, and then the element is sealed by botting. m of sealed electronic components
How to proceed.
JP15410682A 1982-09-03 1982-09-03 Manufacture of resin sealed type electronic part Pending JPS5943526A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15410682A JPS5943526A (en) 1982-09-03 1982-09-03 Manufacture of resin sealed type electronic part

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15410682A JPS5943526A (en) 1982-09-03 1982-09-03 Manufacture of resin sealed type electronic part

Publications (1)

Publication Number Publication Date
JPS5943526A true JPS5943526A (en) 1984-03-10

Family

ID=15577049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15410682A Pending JPS5943526A (en) 1982-09-03 1982-09-03 Manufacture of resin sealed type electronic part

Country Status (1)

Country Link
JP (1) JPS5943526A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6464254A (en) * 1987-09-03 1989-03-10 Toshiba Corp Solid-state image sensor and manufacture thereof
JPH09213826A (en) * 1996-02-01 1997-08-15 Nec Corp Package

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6464254A (en) * 1987-09-03 1989-03-10 Toshiba Corp Solid-state image sensor and manufacture thereof
JPH09213826A (en) * 1996-02-01 1997-08-15 Nec Corp Package
US5905301A (en) * 1996-02-01 1999-05-18 Nec Corporation Mold package for sealing a chip

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