JPS5942224A - 放電加工法 - Google Patents
放電加工法Info
- Publication number
- JPS5942224A JPS5942224A JP15180082A JP15180082A JPS5942224A JP S5942224 A JPS5942224 A JP S5942224A JP 15180082 A JP15180082 A JP 15180082A JP 15180082 A JP15180082 A JP 15180082A JP S5942224 A JPS5942224 A JP S5942224A
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- electrodes
- discharge machining
- electric discharge
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003754 machining Methods 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 13
- 238000009760 electrical discharge machining Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 abstract description 15
- 239000004065 semiconductor Substances 0.000 abstract description 10
- 230000005611 electricity Effects 0.000 abstract description 2
- 238000005520 cutting process Methods 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 6
- 230000002950 deficient Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 238000009763 wire-cut EDM Methods 0.000 description 2
- 241000257465 Echinoidea Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
- B23H7/02—Wire-cutting
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15180082A JPS5942224A (ja) | 1982-09-02 | 1982-09-02 | 放電加工法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15180082A JPS5942224A (ja) | 1982-09-02 | 1982-09-02 | 放電加工法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5942224A true JPS5942224A (ja) | 1984-03-08 |
| JPH0112609B2 JPH0112609B2 (en, 2012) | 1989-03-01 |
Family
ID=15526571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15180082A Granted JPS5942224A (ja) | 1982-09-02 | 1982-09-02 | 放電加工法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5942224A (en, 2012) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4762974A (en) * | 1987-01-20 | 1988-08-09 | Harry Kern | Electrically independent wire electroerosion discharge machine |
| US4797526A (en) * | 1985-01-18 | 1989-01-10 | Inoue Japax Research Incorporated | Method for wire-cut electric discharge machining utilizing adjoining segments of a common electrode |
| EP0781619A1 (en) * | 1995-12-15 | 1997-07-02 | Cree Research, Inc. | Method of making silicone carbide wafers from silicon carbide bulk crystals |
| US6242709B1 (en) | 1998-07-29 | 2001-06-05 | Sumitomo Special Metals Co., Ltd. | Method for manufacturing conductive wafers, method for manufacturing thin-plate sintered compacts, method for manufacturing ceramic substrates for thin-film magnetic head, and method for machining conductive wafers |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5252291A (en) * | 1975-09-04 | 1977-04-26 | De Beers Ind Diamond | Method of fusion cutting material by use of spark discharge and apparatus therefor |
-
1982
- 1982-09-02 JP JP15180082A patent/JPS5942224A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5252291A (en) * | 1975-09-04 | 1977-04-26 | De Beers Ind Diamond | Method of fusion cutting material by use of spark discharge and apparatus therefor |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4797526A (en) * | 1985-01-18 | 1989-01-10 | Inoue Japax Research Incorporated | Method for wire-cut electric discharge machining utilizing adjoining segments of a common electrode |
| US4762974A (en) * | 1987-01-20 | 1988-08-09 | Harry Kern | Electrically independent wire electroerosion discharge machine |
| EP0781619A1 (en) * | 1995-12-15 | 1997-07-02 | Cree Research, Inc. | Method of making silicone carbide wafers from silicon carbide bulk crystals |
| US6242709B1 (en) | 1998-07-29 | 2001-06-05 | Sumitomo Special Metals Co., Ltd. | Method for manufacturing conductive wafers, method for manufacturing thin-plate sintered compacts, method for manufacturing ceramic substrates for thin-film magnetic head, and method for machining conductive wafers |
| CN1101738C (zh) * | 1998-07-29 | 2003-02-19 | 住友特殊金属株式会社 | 导电性薄片、薄板烧结体及陶瓷基片的制造及加工方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0112609B2 (en, 2012) | 1989-03-01 |
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