JPS5939634Y2 - 吸込式リ−ク試験装置 - Google Patents

吸込式リ−ク試験装置

Info

Publication number
JPS5939634Y2
JPS5939634Y2 JP1980043953U JP4395380U JPS5939634Y2 JP S5939634 Y2 JPS5939634 Y2 JP S5939634Y2 JP 1980043953 U JP1980043953 U JP 1980043953U JP 4395380 U JP4395380 U JP 4395380U JP S5939634 Y2 JPS5939634 Y2 JP S5939634Y2
Authority
JP
Japan
Prior art keywords
cable
suction
tail end
test device
leak test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980043953U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55137350U (enrdf_load_stackoverflow
Inventor
理一 福留
市郎 松原
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP1980043953U priority Critical patent/JPS5939634Y2/ja
Publication of JPS55137350U publication Critical patent/JPS55137350U/ja
Application granted granted Critical
Publication of JPS5939634Y2 publication Critical patent/JPS5939634Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP1980043953U 1980-04-03 1980-04-03 吸込式リ−ク試験装置 Expired JPS5939634Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980043953U JPS5939634Y2 (ja) 1980-04-03 1980-04-03 吸込式リ−ク試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980043953U JPS5939634Y2 (ja) 1980-04-03 1980-04-03 吸込式リ−ク試験装置

Publications (2)

Publication Number Publication Date
JPS55137350U JPS55137350U (enrdf_load_stackoverflow) 1980-09-30
JPS5939634Y2 true JPS5939634Y2 (ja) 1984-11-06

Family

ID=28919340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980043953U Expired JPS5939634Y2 (ja) 1980-04-03 1980-04-03 吸込式リ−ク試験装置

Country Status (1)

Country Link
JP (1) JPS5939634Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0816634B2 (ja) * 1991-05-16 1996-02-21 日本真空技術株式会社 ガス洩れ検査装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1047204A (enrdf_load_stackoverflow) * 1964-05-26 1900-01-01

Also Published As

Publication number Publication date
JPS55137350U (enrdf_load_stackoverflow) 1980-09-30

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