JPS5935043A - ノボラック樹脂系ポジ型ホトレジスト用容器 - Google Patents
ノボラック樹脂系ポジ型ホトレジスト用容器Info
- Publication number
- JPS5935043A JPS5935043A JP57143393A JP14339382A JPS5935043A JP S5935043 A JPS5935043 A JP S5935043A JP 57143393 A JP57143393 A JP 57143393A JP 14339382 A JP14339382 A JP 14339382A JP S5935043 A JPS5935043 A JP S5935043A
- Authority
- JP
- Japan
- Prior art keywords
- container
- film
- glass
- materials
- forming material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims description 40
- 239000011521 glass Substances 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 5
- TXKMVPPZCYKFAC-UHFFFAOYSA-N disulfur monoxide Inorganic materials O=S=S TXKMVPPZCYKFAC-UHFFFAOYSA-N 0.000 claims description 3
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical compound S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 claims description 3
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 12
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 238000003860 storage Methods 0.000 description 8
- 238000000576 coating method Methods 0.000 description 7
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 6
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 6
- 235000011130 ammonium sulphate Nutrition 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 6
- 239000011253 protective coating Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- -1 insulating coatings Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 229920000734 polysilsesquioxane polymer Polymers 0.000 description 2
- 239000008399 tap water Substances 0.000 description 2
- 235000020679 tap water Nutrition 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- PQUCIEFHOVEZAU-UHFFFAOYSA-N Diammonium sulfite Chemical compound [NH4+].[NH4+].[O-]S([O-])=O PQUCIEFHOVEZAU-UHFFFAOYSA-N 0.000 description 1
- RPWFJAMTCNSJKK-UHFFFAOYSA-N Dodecyl gallate Chemical compound CCCCCCCCCCCCOC(=O)C1=CC(O)=C(O)C(O)=C1 RPWFJAMTCNSJKK-UHFFFAOYSA-N 0.000 description 1
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-N Sulfurous acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000001447 alkali salts Chemical class 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 235000010386 dodecyl gallate Nutrition 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005865 ionizing radiation Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 235000021419 vinegar Nutrition 0.000 description 1
- 239000000052 vinegar Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/008—Other surface treatment of glass not in the form of fibres or filaments comprising a lixiviation step
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Packging For Living Organisms, Food Or Medicinal Products That Are Sensitive To Environmental Conditiond (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Laminated Bodies (AREA)
- Surface Treatment Of Glass (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57143393A JPS5935043A (ja) | 1982-08-20 | 1982-08-20 | ノボラック樹脂系ポジ型ホトレジスト用容器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57143393A JPS5935043A (ja) | 1982-08-20 | 1982-08-20 | ノボラック樹脂系ポジ型ホトレジスト用容器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5935043A true JPS5935043A (ja) | 1984-02-25 |
| JPH0345018B2 JPH0345018B2 (enrdf_load_stackoverflow) | 1991-07-09 |
Family
ID=15337715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57143393A Granted JPS5935043A (ja) | 1982-08-20 | 1982-08-20 | ノボラック樹脂系ポジ型ホトレジスト用容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5935043A (enrdf_load_stackoverflow) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6175907A (ja) * | 1984-09-21 | 1986-04-18 | Ebara Corp | 水位制御装置 |
| JPS6266312U (enrdf_load_stackoverflow) * | 1985-10-14 | 1987-04-24 | ||
| JPS62100512U (enrdf_load_stackoverflow) * | 1985-12-11 | 1987-06-26 | ||
| JPS62183214U (enrdf_load_stackoverflow) * | 1986-05-07 | 1987-11-20 | ||
| JPS6373311A (ja) * | 1986-09-16 | 1988-04-02 | Shin Meiwa Ind Co Ltd | 液槽の水位制御方法 |
| JPS63121910A (ja) * | 1986-10-30 | 1988-05-26 | コーブ・ラボラトリーズ・インコーポレーテッド | 流体流通装置 |
| JPWO2005047884A1 (ja) * | 2003-10-24 | 2007-05-31 | 和光純薬工業株式会社 | 高感度分析用溶媒及びその保存方法。 |
| WO2007062694A1 (de) * | 2005-11-30 | 2007-06-07 | Gerresheimer Essen Gmbh | Innenvergütungsverfahren und -gerät zur innenvergütung von glasbehältern |
| WO2007118491A1 (de) * | 2006-04-13 | 2007-10-25 | Gerresheimer Essen Gmbh | Dosierverfahren und dosiergerät zur innenvergütung von glasbehältern |
| WO2018124203A1 (ja) | 2016-12-27 | 2018-07-05 | Jsr株式会社 | ラテックス粒子分散液の保管方法 |
| KR20200028422A (ko) | 2017-09-06 | 2020-03-16 | 후지필름 가부시키가이샤 | 약액 수용체 |
| WO2022148918A1 (fr) * | 2021-01-11 | 2022-07-14 | Sgd S.A. | Recipient en verre sodocalcique a resistance chimique amelioree pour substance pharmaceutique ou de diagnostic |
-
1982
- 1982-08-20 JP JP57143393A patent/JPS5935043A/ja active Granted
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6175907A (ja) * | 1984-09-21 | 1986-04-18 | Ebara Corp | 水位制御装置 |
| JPS6266312U (enrdf_load_stackoverflow) * | 1985-10-14 | 1987-04-24 | ||
| JPS62100512U (enrdf_load_stackoverflow) * | 1985-12-11 | 1987-06-26 | ||
| JPS62183214U (enrdf_load_stackoverflow) * | 1986-05-07 | 1987-11-20 | ||
| JPS6373311A (ja) * | 1986-09-16 | 1988-04-02 | Shin Meiwa Ind Co Ltd | 液槽の水位制御方法 |
| JPS63121910A (ja) * | 1986-10-30 | 1988-05-26 | コーブ・ラボラトリーズ・インコーポレーテッド | 流体流通装置 |
| JPWO2005047884A1 (ja) * | 2003-10-24 | 2007-05-31 | 和光純薬工業株式会社 | 高感度分析用溶媒及びその保存方法。 |
| WO2007062694A1 (de) * | 2005-11-30 | 2007-06-07 | Gerresheimer Essen Gmbh | Innenvergütungsverfahren und -gerät zur innenvergütung von glasbehältern |
| WO2007118491A1 (de) * | 2006-04-13 | 2007-10-25 | Gerresheimer Essen Gmbh | Dosierverfahren und dosiergerät zur innenvergütung von glasbehältern |
| WO2018124203A1 (ja) | 2016-12-27 | 2018-07-05 | Jsr株式会社 | ラテックス粒子分散液の保管方法 |
| KR20200028422A (ko) | 2017-09-06 | 2020-03-16 | 후지필름 가부시키가이샤 | 약액 수용체 |
| US11976001B2 (en) | 2017-09-06 | 2024-05-07 | Fujifilm Corporation | Chemical liquid storage body |
| WO2022148918A1 (fr) * | 2021-01-11 | 2022-07-14 | Sgd S.A. | Recipient en verre sodocalcique a resistance chimique amelioree pour substance pharmaceutique ou de diagnostic |
| FR3118770A1 (fr) * | 2021-01-11 | 2022-07-15 | Sgd S.A. | Recipient en verre sodocalcique a resistance chimique amelioree pour substance pharmaceutique ou de diagnostic |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0345018B2 (enrdf_load_stackoverflow) | 1991-07-09 |
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