JPS5933765U - イオンミリングエツチング装置 - Google Patents

イオンミリングエツチング装置

Info

Publication number
JPS5933765U
JPS5933765U JP12771082U JP12771082U JPS5933765U JP S5933765 U JPS5933765 U JP S5933765U JP 12771082 U JP12771082 U JP 12771082U JP 12771082 U JP12771082 U JP 12771082U JP S5933765 U JPS5933765 U JP S5933765U
Authority
JP
Japan
Prior art keywords
ion milling
sample surface
etching equipment
milling etching
argon ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12771082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6133000Y2 (https=
Inventor
康一 光嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP12771082U priority Critical patent/JPS5933765U/ja
Publication of JPS5933765U publication Critical patent/JPS5933765U/ja
Application granted granted Critical
Publication of JPS6133000Y2 publication Critical patent/JPS6133000Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP12771082U 1982-08-23 1982-08-23 イオンミリングエツチング装置 Granted JPS5933765U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12771082U JPS5933765U (ja) 1982-08-23 1982-08-23 イオンミリングエツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12771082U JPS5933765U (ja) 1982-08-23 1982-08-23 イオンミリングエツチング装置

Publications (2)

Publication Number Publication Date
JPS5933765U true JPS5933765U (ja) 1984-03-02
JPS6133000Y2 JPS6133000Y2 (https=) 1986-09-26

Family

ID=30289961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12771082U Granted JPS5933765U (ja) 1982-08-23 1982-08-23 イオンミリングエツチング装置

Country Status (1)

Country Link
JP (1) JPS5933765U (https=)

Also Published As

Publication number Publication date
JPS6133000Y2 (https=) 1986-09-26

Similar Documents

Publication Publication Date Title
FR2338493A1 (fr) Structure d'electrodes pour un appareil de detection d'ions
JPS5933765U (ja) イオンミリングエツチング装置
JPS5219585A (en) Speed detection system
JPS5985573U (ja) 質量分析装置
JPS55162078A (en) Detecting method for magnetic substance
JPS5257884A (en) Solid surface analyzer
JPS60140764U (ja) プラズマ処理装置
JPS5861461U (ja) スパツタリング装置
JPS594485U (ja) 半導体検出器
JPS58120558U (ja) 負イオン検出装置
JPS5998566U (ja) 質量分析計の試料導入装置
JPS60138300U (ja) 中性粒子入射装置の中性化セル
JPS6016756U (ja) イオンビ−ムスパツタリング装置
JPS5926859U (ja) 質量分析装置のイオン源装置
JPS6418568U (https=)
JPS5241585A (en) Magnetic field detection device
JPS60184257U (ja) イオン衝撃銃
JPS5833643Y2 (ja) 質量分析装置におけるイオンビ−ム電流検出装置
JPS58121622U (ja) 回転被加工物の電気加工装置
JPS58165899U (ja) 中性粒子入射装置
JPS5260179A (en) Mass analyzer
GB1076826A (en) High sensitivity neutron ionisation chamber
JPS5250770A (en) Apparent specific electric resistance measuring device
JPS60122860U (ja) 質量分析装置
JPS60174166U (ja) イオン衝撃銃