JPS593098A - ダイヤモンドの合成法 - Google Patents
ダイヤモンドの合成法Info
- Publication number
- JPS593098A JPS593098A JP57109044A JP10904482A JPS593098A JP S593098 A JPS593098 A JP S593098A JP 57109044 A JP57109044 A JP 57109044A JP 10904482 A JP10904482 A JP 10904482A JP S593098 A JPS593098 A JP S593098A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- diamond
- gas
- gaseous
- microwave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010432 diamond Substances 0.000 title abstract description 37
- 229910003460 diamond Inorganic materials 0.000 title abstract description 32
- 238000000034 method Methods 0.000 title description 21
- 230000002194 synthesizing effect Effects 0.000 title description 2
- 239000000758 substrate Substances 0.000 claims abstract description 39
- 239000007789 gas Substances 0.000 claims abstract description 27
- 239000011261 inert gas Substances 0.000 claims abstract description 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 23
- 150000002430 hydrocarbons Chemical class 0.000 abstract description 23
- 229930195733 hydrocarbon Natural products 0.000 abstract description 21
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 abstract description 14
- 239000004215 Carbon black (E152) Substances 0.000 abstract description 12
- 238000006243 chemical reaction Methods 0.000 abstract description 12
- 238000010438 heat treatment Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 2
- 239000008246 gaseous mixture Substances 0.000 abstract 2
- 230000001276 controlling effect Effects 0.000 abstract 1
- 230000001376 precipitating effect Effects 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 12
- 239000001257 hydrogen Substances 0.000 description 8
- 229910052739 hydrogen Inorganic materials 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 229910002804 graphite Inorganic materials 0.000 description 5
- 239000010439 graphite Substances 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 230000005281 excited state Effects 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 206010041235 Snoring Diseases 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004581 coalescence Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007323 disproportionation reaction Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 210000003097 mucus Anatomy 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 238000010581 sealed tube method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57109044A JPS593098A (ja) | 1982-06-24 | 1982-06-24 | ダイヤモンドの合成法 |
| US06/442,506 US4434188A (en) | 1981-12-17 | 1982-11-17 | Method for synthesizing diamond |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57109044A JPS593098A (ja) | 1982-06-24 | 1982-06-24 | ダイヤモンドの合成法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS593098A true JPS593098A (ja) | 1984-01-09 |
| JPS613320B2 JPS613320B2 (enExample) | 1986-01-31 |
Family
ID=14500180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57109044A Granted JPS593098A (ja) | 1981-12-17 | 1982-06-24 | ダイヤモンドの合成法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS593098A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63265892A (ja) * | 1987-04-22 | 1988-11-02 | Idemitsu Petrochem Co Ltd | ダイヤモンドの合成方法および合成装置 |
| US5242663A (en) * | 1989-09-20 | 1993-09-07 | Sumitomo Electric Industries, Ltd. | Method of and apparatus for synthesizing hard material |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3728465B2 (ja) * | 1994-11-25 | 2005-12-21 | 株式会社神戸製鋼所 | 単結晶ダイヤモンド膜の形成方法 |
| JP3728464B2 (ja) * | 1994-11-25 | 2005-12-21 | 株式会社神戸製鋼所 | 単結晶ダイヤモンド膜気相合成用基板の製造方法 |
-
1982
- 1982-06-24 JP JP57109044A patent/JPS593098A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63265892A (ja) * | 1987-04-22 | 1988-11-02 | Idemitsu Petrochem Co Ltd | ダイヤモンドの合成方法および合成装置 |
| US5242663A (en) * | 1989-09-20 | 1993-09-07 | Sumitomo Electric Industries, Ltd. | Method of and apparatus for synthesizing hard material |
| US5436036A (en) * | 1989-09-20 | 1995-07-25 | Sumitomo Electric Industries, Ltd. | Method of synthesizing hard material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS613320B2 (enExample) | 1986-01-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4434188A (en) | Method for synthesizing diamond | |
| US4985227A (en) | Method for synthesis or diamond | |
| JPH0346436B2 (enExample) | ||
| JPS5927754B2 (ja) | ダイヤモンドの合成法 | |
| JPS5927753B2 (ja) | ダイヤモンドの合成法 | |
| JPH04958B2 (enExample) | ||
| JPS6136200A (ja) | ダイヤモンドの気相合成法 | |
| JPS593098A (ja) | ダイヤモンドの合成法 | |
| JPS6221757B2 (enExample) | ||
| JPH0518796B2 (enExample) | ||
| WO1989011556A1 (fr) | Procede de synthese en phase gazeuse de diamants | |
| JPS6054996A (ja) | ダイヤモンドの合成法 | |
| JPS62158195A (ja) | ダイヤモンドの合成法 | |
| JPS6033300A (ja) | ダイヤモンドの気相合成方法及びその装置 | |
| JPS60200896A (ja) | 繊維状ダイヤモンドの合成法 | |
| JPH0481552B2 (enExample) | ||
| JPH0524114B2 (enExample) | ||
| JPS60145995A (ja) | ダイヤモンド状カ−ボンの製造方法 | |
| JPS61236691A (ja) | ダイヤモンドの気相合成法 | |
| JPS5935092A (ja) | ダイヤモンドの気相合成法 | |
| JPH0518798B2 (enExample) | ||
| JPS60112698A (ja) | ダイヤモンドの製造方法 | |
| JPH02120219A (ja) | ダイヤモンド粉末の合成方法 | |
| JPS60112699A (ja) | ダイヤモンドの製造方法 | |
| JPS63117995A (ja) | ダイヤモンドの気相合成法 |