JPS5928535U - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPS5928535U
JPS5928535U JP12160982U JP12160982U JPS5928535U JP S5928535 U JPS5928535 U JP S5928535U JP 12160982 U JP12160982 U JP 12160982U JP 12160982 U JP12160982 U JP 12160982U JP S5928535 U JPS5928535 U JP S5928535U
Authority
JP
Japan
Prior art keywords
plasma
reaction chamber
plasma processing
processing equipment
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12160982U
Other languages
English (en)
Japanese (ja)
Other versions
JPS629302Y2 (enrdf_load_stackoverflow
Inventor
金子　隆興
賢治 福田
芳信 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP12160982U priority Critical patent/JPS5928535U/ja
Publication of JPS5928535U publication Critical patent/JPS5928535U/ja
Application granted granted Critical
Publication of JPS629302Y2 publication Critical patent/JPS629302Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP12160982U 1982-08-12 1982-08-12 プラズマ処理装置 Granted JPS5928535U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12160982U JPS5928535U (ja) 1982-08-12 1982-08-12 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12160982U JPS5928535U (ja) 1982-08-12 1982-08-12 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS5928535U true JPS5928535U (ja) 1984-02-22
JPS629302Y2 JPS629302Y2 (enrdf_load_stackoverflow) 1987-03-04

Family

ID=30278261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12160982U Granted JPS5928535U (ja) 1982-08-12 1982-08-12 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS5928535U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61180140U (enrdf_load_stackoverflow) * 1985-04-30 1986-11-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61180140U (enrdf_load_stackoverflow) * 1985-04-30 1986-11-10

Also Published As

Publication number Publication date
JPS629302Y2 (enrdf_load_stackoverflow) 1987-03-04

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