JPS61180140U - - Google Patents

Info

Publication number
JPS61180140U
JPS61180140U JP6565185U JP6565185U JPS61180140U JP S61180140 U JPS61180140 U JP S61180140U JP 6565185 U JP6565185 U JP 6565185U JP 6565185 U JP6565185 U JP 6565185U JP S61180140 U JPS61180140 U JP S61180140U
Authority
JP
Japan
Prior art keywords
wall
processing chamber
control valve
plasma
openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6565185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0348194Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985065651U priority Critical patent/JPH0348194Y2/ja
Publication of JPS61180140U publication Critical patent/JPS61180140U/ja
Application granted granted Critical
Publication of JPH0348194Y2 publication Critical patent/JPH0348194Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP1985065651U 1985-04-30 1985-04-30 Expired JPH0348194Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985065651U JPH0348194Y2 (enrdf_load_stackoverflow) 1985-04-30 1985-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985065651U JPH0348194Y2 (enrdf_load_stackoverflow) 1985-04-30 1985-04-30

Publications (2)

Publication Number Publication Date
JPS61180140U true JPS61180140U (enrdf_load_stackoverflow) 1986-11-10
JPH0348194Y2 JPH0348194Y2 (enrdf_load_stackoverflow) 1991-10-15

Family

ID=30597834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985065651U Expired JPH0348194Y2 (enrdf_load_stackoverflow) 1985-04-30 1985-04-30

Country Status (1)

Country Link
JP (1) JPH0348194Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928535U (ja) * 1982-08-12 1984-02-22 トヨタ自動車株式会社 プラズマ処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928535U (ja) * 1982-08-12 1984-02-22 トヨタ自動車株式会社 プラズマ処理装置

Also Published As

Publication number Publication date
JPH0348194Y2 (enrdf_load_stackoverflow) 1991-10-15

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