JPS61206650U - - Google Patents

Info

Publication number
JPS61206650U
JPS61206650U JP8953185U JP8953185U JPS61206650U JP S61206650 U JPS61206650 U JP S61206650U JP 8953185 U JP8953185 U JP 8953185U JP 8953185 U JP8953185 U JP 8953185U JP S61206650 U JPS61206650 U JP S61206650U
Authority
JP
Japan
Prior art keywords
plasma processing
chamber
processing chamber
vacuum pump
install
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8953185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0417552Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8953185U priority Critical patent/JPH0417552Y2/ja
Publication of JPS61206650U publication Critical patent/JPS61206650U/ja
Application granted granted Critical
Publication of JPH0417552Y2 publication Critical patent/JPH0417552Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP8953185U 1985-06-13 1985-06-13 Expired JPH0417552Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8953185U JPH0417552Y2 (enrdf_load_stackoverflow) 1985-06-13 1985-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8953185U JPH0417552Y2 (enrdf_load_stackoverflow) 1985-06-13 1985-06-13

Publications (2)

Publication Number Publication Date
JPS61206650U true JPS61206650U (enrdf_load_stackoverflow) 1986-12-27
JPH0417552Y2 JPH0417552Y2 (enrdf_load_stackoverflow) 1992-04-20

Family

ID=30643696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8953185U Expired JPH0417552Y2 (enrdf_load_stackoverflow) 1985-06-13 1985-06-13

Country Status (1)

Country Link
JP (1) JPH0417552Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0417552Y2 (enrdf_load_stackoverflow) 1992-04-20

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