JPS5925968A - 多重被覆材料およびその製造法 - Google Patents
多重被覆材料およびその製造法Info
- Publication number
- JPS5925968A JPS5925968A JP13591382A JP13591382A JPS5925968A JP S5925968 A JPS5925968 A JP S5925968A JP 13591382 A JP13591382 A JP 13591382A JP 13591382 A JP13591382 A JP 13591382A JP S5925968 A JPS5925968 A JP S5925968A
- Authority
- JP
- Japan
- Prior art keywords
- tic
- coated
- coating
- thickness
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims abstract description 8
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 5
- 239000011248 coating agent Substances 0.000 claims abstract description 15
- 238000000576 coating method Methods 0.000 claims abstract description 15
- 239000011195 cermet Substances 0.000 claims abstract description 8
- 239000011247 coating layer Substances 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims abstract description 8
- 239000010410 layer Substances 0.000 claims description 21
- 239000002356 single layer Substances 0.000 claims description 7
- 229910005091 Si3N Inorganic materials 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 4
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 2
- 239000000956 alloy Substances 0.000 abstract 2
- 229910045601 alloy Inorganic materials 0.000 abstract 2
- 229910003074 TiCl4 Inorganic materials 0.000 abstract 1
- 239000008246 gaseous mixture Substances 0.000 abstract 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 abstract 1
- 238000005520 cutting process Methods 0.000 description 9
- 239000010408 film Substances 0.000 description 8
- 150000004767 nitrides Chemical class 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 101100008044 Caenorhabditis elegans cut-1 gene Proteins 0.000 description 1
- 241000567769 Isurus oxyrinchus Species 0.000 description 1
- 101150035095 RIC8 gene Proteins 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13591382A JPS5925968A (ja) | 1982-08-04 | 1982-08-04 | 多重被覆材料およびその製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13591382A JPS5925968A (ja) | 1982-08-04 | 1982-08-04 | 多重被覆材料およびその製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5925968A true JPS5925968A (ja) | 1984-02-10 |
| JPS6112029B2 JPS6112029B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-04-05 |
Family
ID=15162761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13591382A Granted JPS5925968A (ja) | 1982-08-04 | 1982-08-04 | 多重被覆材料およびその製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5925968A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61174379A (ja) * | 1985-01-29 | 1986-08-06 | Sumitomo Electric Ind Ltd | 窒化硅素被覆超硬合金部品およびその製造法 |
| JP2011051033A (ja) * | 2009-08-31 | 2011-03-17 | Mitsubishi Materials Corp | 表面被覆切削工具 |
| JP2013534186A (ja) * | 2010-08-06 | 2013-09-02 | バルター アクチェンゲゼルシャフト | 多層被膜を有する切削工具 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6316254A (ja) * | 1986-06-02 | 1988-01-23 | Inax Corp | 板状物表面斑点の自動検査方法 |
| US4731663A (en) * | 1987-05-20 | 1988-03-15 | American Telephone And Telegraph | Method and apparatus for color identification |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52105396A (en) * | 1976-02-28 | 1977-09-03 | Toshiba Tungaloy Co Ltd | Wear proof damage proof multiilayer coating material |
| JPS54158778A (en) * | 1978-06-05 | 1979-12-14 | Toshiba Tungaloy Co Ltd | Compound coated cutting tool |
| JPS55137803A (en) * | 1979-04-09 | 1980-10-28 | Mitsubishi Metal Corp | Cutting tool covered with cemented carbide and manufacture thereof |
-
1982
- 1982-08-04 JP JP13591382A patent/JPS5925968A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52105396A (en) * | 1976-02-28 | 1977-09-03 | Toshiba Tungaloy Co Ltd | Wear proof damage proof multiilayer coating material |
| JPS54158778A (en) * | 1978-06-05 | 1979-12-14 | Toshiba Tungaloy Co Ltd | Compound coated cutting tool |
| JPS55137803A (en) * | 1979-04-09 | 1980-10-28 | Mitsubishi Metal Corp | Cutting tool covered with cemented carbide and manufacture thereof |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61174379A (ja) * | 1985-01-29 | 1986-08-06 | Sumitomo Electric Ind Ltd | 窒化硅素被覆超硬合金部品およびその製造法 |
| JP2011051033A (ja) * | 2009-08-31 | 2011-03-17 | Mitsubishi Materials Corp | 表面被覆切削工具 |
| JP2013534186A (ja) * | 2010-08-06 | 2013-09-02 | バルター アクチェンゲゼルシャフト | 多層被膜を有する切削工具 |
| US9028954B2 (en) | 2010-08-06 | 2015-05-12 | Walter Ag | Cutting tool with multi-layer coating |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6112029B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-04-05 |