JPS59228737A - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPS59228737A JPS59228737A JP10379983A JP10379983A JPS59228737A JP S59228737 A JPS59228737 A JP S59228737A JP 10379983 A JP10379983 A JP 10379983A JP 10379983 A JP10379983 A JP 10379983A JP S59228737 A JPS59228737 A JP S59228737A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- silicon layer
- contact
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 34
- 239000010410 layer Substances 0.000 claims description 58
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 21
- 239000002184 metal Substances 0.000 claims description 18
- 239000011229 interlayer Substances 0.000 claims description 9
- 230000000295 complement effect Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 6
- 230000010354 integration Effects 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 101100346156 Caenorhabditis elegans moe-3 gene Proteins 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10379983A JPS59228737A (ja) | 1983-06-10 | 1983-06-10 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10379983A JPS59228737A (ja) | 1983-06-10 | 1983-06-10 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59228737A true JPS59228737A (ja) | 1984-12-22 |
| JPH0550140B2 JPH0550140B2 (enrdf_load_stackoverflow) | 1993-07-28 |
Family
ID=14363440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10379983A Granted JPS59228737A (ja) | 1983-06-10 | 1983-06-10 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59228737A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4926236A (en) * | 1986-02-12 | 1990-05-15 | General Electric Company | Multilayer interconnect and method of forming same |
| US5619071A (en) * | 1994-10-17 | 1997-04-08 | Intel Corporation | Anchored via connection |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4841683A (enrdf_load_stackoverflow) * | 1971-09-27 | 1973-06-18 | ||
| JPS55130145A (en) * | 1980-03-03 | 1980-10-08 | Nec Corp | Semiconductor integrated circuit device |
-
1983
- 1983-06-10 JP JP10379983A patent/JPS59228737A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4841683A (enrdf_load_stackoverflow) * | 1971-09-27 | 1973-06-18 | ||
| JPS55130145A (en) * | 1980-03-03 | 1980-10-08 | Nec Corp | Semiconductor integrated circuit device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4926236A (en) * | 1986-02-12 | 1990-05-15 | General Electric Company | Multilayer interconnect and method of forming same |
| US5619071A (en) * | 1994-10-17 | 1997-04-08 | Intel Corporation | Anchored via connection |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0550140B2 (enrdf_load_stackoverflow) | 1993-07-28 |
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