JPS59228201A - 光学素子 - Google Patents
光学素子Info
- Publication number
- JPS59228201A JPS59228201A JP59103766A JP10376684A JPS59228201A JP S59228201 A JPS59228201 A JP S59228201A JP 59103766 A JP59103766 A JP 59103766A JP 10376684 A JP10376684 A JP 10376684A JP S59228201 A JPS59228201 A JP S59228201A
- Authority
- JP
- Japan
- Prior art keywords
- refractive index
- optical element
- layers
- layer
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims description 69
- 239000011248 coating agent Substances 0.000 claims description 57
- 238000000576 coating method Methods 0.000 claims description 57
- 239000000758 substrate Substances 0.000 claims description 37
- 239000006117 anti-reflective coating Substances 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 23
- 230000007423 decrease Effects 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000007598 dipping method Methods 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 8
- 238000009987 spinning Methods 0.000 claims description 8
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 claims description 6
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 6
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 claims description 6
- 230000003247 decreasing effect Effects 0.000 claims description 5
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 4
- 229940046892 lead acetate Drugs 0.000 claims description 3
- 229910019704 Nb2O Inorganic materials 0.000 claims description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 claims description 2
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 claims description 2
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 claims description 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 description 114
- 238000010586 diagram Methods 0.000 description 6
- 239000000835 fiber Substances 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical group [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 5
- 238000002310 reflectometry Methods 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- CXWXQJXEFPUFDZ-UHFFFAOYSA-N tetralin Chemical compound C1=CC=C2CCCCC2=C1 CXWXQJXEFPUFDZ-UHFFFAOYSA-N 0.000 description 2
- 229910020187 CeF3 Inorganic materials 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- 229910005091 Si3N Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- NLQFUUYNQFMIJW-UHFFFAOYSA-N dysprosium(III) oxide Inorganic materials O=[Dy]O[Dy]=O NLQFUUYNQFMIJW-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003678 scratch resistant effect Effects 0.000 description 1
- 229910052959 stibnite Inorganic materials 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL8301824 | 1983-05-24 | ||
| NL8301824A NL8301824A (nl) | 1983-05-24 | 1983-05-24 | Optisch element bestaande uit een doorzichtig substraat en een antireflectieve bekleding voor het golflengtegebied in het nabije infrarood. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59228201A true JPS59228201A (ja) | 1984-12-21 |
| JPS6256481B2 JPS6256481B2 (enExample) | 1987-11-26 |
Family
ID=19841897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59103766A Granted JPS59228201A (ja) | 1983-05-24 | 1984-05-24 | 光学素子 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4568140A (enExample) |
| EP (1) | EP0127231B1 (enExample) |
| JP (1) | JPS59228201A (enExample) |
| CA (1) | CA1242603A (enExample) |
| DE (1) | DE3465631D1 (enExample) |
| NL (1) | NL8301824A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006047599A (ja) * | 2004-08-03 | 2006-02-16 | Nof Corp | 近赤外線吸収材及びそれを用いた表示装置 |
| JPWO2012160979A1 (ja) * | 2011-05-24 | 2014-07-31 | 独立行政法人産業技術総合研究所 | 赤外線透過膜、赤外線透過膜の製造方法、赤外線用光学部品および赤外線装置 |
Families Citing this family (42)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4595634A (en) * | 1983-08-01 | 1986-06-17 | Gordon Roy G | Coating process for making non-iridescent glass |
| JPS6135401A (ja) * | 1984-07-27 | 1986-02-19 | Minolta Camera Co Ltd | 反射鏡 |
| EP0215371A3 (de) * | 1985-09-17 | 1989-01-04 | Siemens Aktiengesellschaft | Kanten-Interferenzfilter für die optische Nachrichtenübertragung im Wellenlängenmultiplex |
| GB8610129D0 (en) * | 1986-04-25 | 1986-05-29 | Secr Defence | Electro-optical device |
| GB8612358D0 (en) * | 1986-05-21 | 1986-06-25 | Philips Nv | Cathode ray tube |
| GB8621468D0 (en) * | 1986-09-05 | 1986-10-15 | Philips Nv | Display device |
| US4896218A (en) * | 1987-09-04 | 1990-01-23 | Rockwell International Corporation | Circularly polarized multi-bandpass interference contrast enhancement filter |
| JPH07111484B2 (ja) * | 1989-06-26 | 1995-11-29 | 松下電器産業株式会社 | プラスチック製光学部品の反射防止膜とその形成方法 |
| JP3249992B2 (ja) * | 1990-12-25 | 2002-01-28 | ミノルタ株式会社 | シリコン基板またはゲルマニウム基板用反射防止膜 |
| US5307430A (en) * | 1992-11-30 | 1994-04-26 | The United States Of America As Represented By The United States Department Of Energy | Lensing duct |
| US5993898A (en) * | 1997-05-19 | 1999-11-30 | Nikon Corporation | Fabrication method and structure for multilayer optical anti-reflection coating, and optical component and optical system using multilayer optical anti-reflection coating |
| US6379014B1 (en) | 2000-04-27 | 2002-04-30 | N & K Technology, Inc. | Graded anti-reflective coatings for photolithography |
| JP2003195006A (ja) * | 2001-10-18 | 2003-07-09 | Nippon Sheet Glass Co Ltd | 光学部品 |
| JP4179283B2 (ja) * | 2002-12-10 | 2008-11-12 | 株式会社ニコン | 光学素子及びその光学素子を用いた投影露光装置 |
| US7087936B2 (en) * | 2003-04-30 | 2006-08-08 | Cree, Inc. | Methods of forming light-emitting devices having an antireflective layer that has a graded index of refraction |
| KR101094114B1 (ko) * | 2003-08-26 | 2011-12-15 | 가부시키가이샤 니콘 | 광학소자 및 노광장치 |
| US8149381B2 (en) | 2003-08-26 | 2012-04-03 | Nikon Corporation | Optical element and exposure apparatus |
| US6954256B2 (en) * | 2003-08-29 | 2005-10-11 | Asml Netherlands B.V. | Gradient immersion lithography |
| US6842288B1 (en) * | 2003-10-30 | 2005-01-11 | 3M Innovative Properties Company | Multilayer optical adhesives and articles |
| US7924397B2 (en) * | 2003-11-06 | 2011-04-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Anti-corrosion layer on objective lens for liquid immersion lithography applications |
| US7460206B2 (en) * | 2003-12-19 | 2008-12-02 | Carl Zeiss Smt Ag | Projection objective for immersion lithography |
| EP1731299A1 (en) * | 2004-03-31 | 2006-12-13 | Konica Minolta Holdings, Inc. | Transparent conductive film, method for producing transparent conductive film and organic electroluminescent device |
| JP2006227568A (ja) * | 2005-01-19 | 2006-08-31 | Konica Minolta Opto Inc | 反射防止膜、光学素子及び光送受信モジュール |
| US20070030569A1 (en) * | 2005-08-04 | 2007-02-08 | Guardian Industries Corp. | Broad band antireflection coating and method of making same |
| WO2007139894A2 (en) | 2006-05-26 | 2007-12-06 | Cree Led Lighting Solutions, Inc. | Solid state light emitting device and method of making same |
| US20090208865A1 (en) * | 2008-02-19 | 2009-08-20 | International Business Machines Corporation | Photolithography focus improvement by reduction of autofocus radiation transmission into substrate |
| US8293451B2 (en) | 2009-08-18 | 2012-10-23 | International Business Machines Corporation | Near-infrared absorbing film compositions |
| US8772376B2 (en) | 2009-08-18 | 2014-07-08 | International Business Machines Corporation | Near-infrared absorbing film compositions |
| US20130057959A1 (en) * | 2011-09-01 | 2013-03-07 | Theodore D. Fay | Highly dispersive optical element with binary transmissibility |
| US9359261B2 (en) | 2013-05-07 | 2016-06-07 | Corning Incorporated | Low-color scratch-resistant articles with a multilayer optical film |
| US9110230B2 (en) | 2013-05-07 | 2015-08-18 | Corning Incorporated | Scratch-resistant articles with retained optical properties |
| US9684097B2 (en) | 2013-05-07 | 2017-06-20 | Corning Incorporated | Scratch-resistant articles with retained optical properties |
| US9366784B2 (en) | 2013-05-07 | 2016-06-14 | Corning Incorporated | Low-color scratch-resistant articles with a multilayer optical film |
| US9703011B2 (en) | 2013-05-07 | 2017-07-11 | Corning Incorporated | Scratch-resistant articles with a gradient layer |
| US11267973B2 (en) | 2014-05-12 | 2022-03-08 | Corning Incorporated | Durable anti-reflective articles |
| US9335444B2 (en) | 2014-05-12 | 2016-05-10 | Corning Incorporated | Durable and scratch-resistant anti-reflective articles |
| US9790593B2 (en) | 2014-08-01 | 2017-10-17 | Corning Incorporated | Scratch-resistant materials and articles including the same |
| DE102015101135B4 (de) | 2015-01-27 | 2018-12-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung eines reflexionsmindernden Schichtsystems und reflexionsminderndes Schichtsystem |
| JP2018536177A (ja) | 2015-09-14 | 2018-12-06 | コーニング インコーポレイテッド | 高光線透過性かつ耐擦傷性反射防止物品 |
| KR102824070B1 (ko) | 2018-08-17 | 2025-06-23 | 코닝 인코포레이티드 | 얇고, 내구성 있는 반사-방지 구조를 갖는 무기산화물 물품 |
| US12147009B2 (en) | 2020-07-09 | 2024-11-19 | Corning Incorporated | Textured region to reduce specular reflectance including a low refractive index substrate with higher elevated surfaces and lower elevated surfaces and a high refractive index material disposed on the lower elevated surfaces |
| US20230402573A1 (en) * | 2022-06-10 | 2023-12-14 | Creeled, Inc. | Coated phosphor particle, light emitting device including a coated phosphor particle, and method of making a coated phosphor particle |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3176574A (en) * | 1960-12-19 | 1965-04-06 | Bell & Howell Co | Low reflectance coatings for optical elements including graduated high index layer |
| JPS4828246A (enExample) * | 1971-08-16 | 1973-04-14 | ||
| JPS5133752A (enExample) * | 1974-09-17 | 1976-03-23 | Hitachi Ltd | |
| JPS526173A (en) * | 1975-07-02 | 1977-01-18 | Yoshiko Arai | Filter device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE523874A (enExample) * | 1952-10-29 | 1900-01-01 | ||
| GB1136218A (en) * | 1965-12-14 | 1968-12-11 | Standard Telephones Cables Ltd | Improvements in or relating to the manufacture of semiconductor optical devices |
| GB1292717A (en) * | 1970-02-04 | 1972-10-11 | Rank Organisation Ltd | Improvements relating to anti-reflection coatings |
| US3804491A (en) * | 1971-08-16 | 1974-04-16 | Olympus Optical Co | Multilayer reflection proof film |
| GB1380793A (en) * | 1972-07-29 | 1975-01-15 | Barr & Stroud Ltd | Multilayer anti-reflection coating |
| CH557546A (de) * | 1972-10-19 | 1974-12-31 | Balzers Patent Beteilig Ag | Aus einer mehrzahl von einfachen oder zusammengesetzen (lambda)/4-schichten bestehender reflexionsvermindernder belag. |
-
1983
- 1983-05-24 NL NL8301824A patent/NL8301824A/nl not_active Application Discontinuation
- 1983-09-12 US US06/531,115 patent/US4568140A/en not_active Expired - Fee Related
-
1984
- 1984-05-15 DE DE8484200697T patent/DE3465631D1/de not_active Expired
- 1984-05-15 EP EP84200697A patent/EP0127231B1/en not_active Expired
- 1984-05-17 CA CA000454608A patent/CA1242603A/en not_active Expired
- 1984-05-24 JP JP59103766A patent/JPS59228201A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3176574A (en) * | 1960-12-19 | 1965-04-06 | Bell & Howell Co | Low reflectance coatings for optical elements including graduated high index layer |
| JPS4828246A (enExample) * | 1971-08-16 | 1973-04-14 | ||
| JPS5133752A (enExample) * | 1974-09-17 | 1976-03-23 | Hitachi Ltd | |
| JPS526173A (en) * | 1975-07-02 | 1977-01-18 | Yoshiko Arai | Filter device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006047599A (ja) * | 2004-08-03 | 2006-02-16 | Nof Corp | 近赤外線吸収材及びそれを用いた表示装置 |
| JPWO2012160979A1 (ja) * | 2011-05-24 | 2014-07-31 | 独立行政法人産業技術総合研究所 | 赤外線透過膜、赤外線透過膜の製造方法、赤外線用光学部品および赤外線装置 |
| US9575216B2 (en) | 2011-05-24 | 2017-02-21 | National Institute Of Advanced Industrial Science And Technology | Infrared-transmitting film, method for producing infrared-transmitting film, infrared optical component, and infrared device |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3465631D1 (en) | 1987-10-01 |
| EP0127231B1 (en) | 1987-08-26 |
| NL8301824A (nl) | 1984-12-17 |
| EP0127231A1 (en) | 1984-12-05 |
| US4568140A (en) | 1986-02-04 |
| JPS6256481B2 (enExample) | 1987-11-26 |
| CA1242603A (en) | 1988-10-04 |
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