DE3465631D1 - Optical element comprising a transparent substrate and an anti-reflection coating for the near-infrared region of wavelengths - Google Patents

Optical element comprising a transparent substrate and an anti-reflection coating for the near-infrared region of wavelengths

Info

Publication number
DE3465631D1
DE3465631D1 DE8484200697T DE3465631T DE3465631D1 DE 3465631 D1 DE3465631 D1 DE 3465631D1 DE 8484200697 T DE8484200697 T DE 8484200697T DE 3465631 T DE3465631 T DE 3465631T DE 3465631 D1 DE3465631 D1 DE 3465631D1
Authority
DE
Germany
Prior art keywords
wavelengths
optical element
transparent substrate
infrared region
reflection coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484200697T
Other languages
German (de)
English (en)
Inventor
Der Werf Pieter Van
Jan Haisma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of DE3465631D1 publication Critical patent/DE3465631D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Surface Treatment Of Glass (AREA)
DE8484200697T 1983-05-24 1984-05-15 Optical element comprising a transparent substrate and an anti-reflection coating for the near-infrared region of wavelengths Expired DE3465631D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8301824A NL8301824A (nl) 1983-05-24 1983-05-24 Optisch element bestaande uit een doorzichtig substraat en een antireflectieve bekleding voor het golflengtegebied in het nabije infrarood.

Publications (1)

Publication Number Publication Date
DE3465631D1 true DE3465631D1 (en) 1987-10-01

Family

ID=19841897

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484200697T Expired DE3465631D1 (en) 1983-05-24 1984-05-15 Optical element comprising a transparent substrate and an anti-reflection coating for the near-infrared region of wavelengths

Country Status (6)

Country Link
US (1) US4568140A (enExample)
EP (1) EP0127231B1 (enExample)
JP (1) JPS59228201A (enExample)
CA (1) CA1242603A (enExample)
DE (1) DE3465631D1 (enExample)
NL (1) NL8301824A (enExample)

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US4595634A (en) * 1983-08-01 1986-06-17 Gordon Roy G Coating process for making non-iridescent glass
JPS6135401A (ja) * 1984-07-27 1986-02-19 Minolta Camera Co Ltd 反射鏡
EP0215371A3 (de) * 1985-09-17 1989-01-04 Siemens Aktiengesellschaft Kanten-Interferenzfilter für die optische Nachrichtenübertragung im Wellenlängenmultiplex
GB8610129D0 (en) * 1986-04-25 1986-05-29 Secr Defence Electro-optical device
GB8612358D0 (en) * 1986-05-21 1986-06-25 Philips Nv Cathode ray tube
GB8621468D0 (en) * 1986-09-05 1986-10-15 Philips Nv Display device
US4896218A (en) * 1987-09-04 1990-01-23 Rockwell International Corporation Circularly polarized multi-bandpass interference contrast enhancement filter
JPH07111484B2 (ja) * 1989-06-26 1995-11-29 松下電器産業株式会社 プラスチック製光学部品の反射防止膜とその形成方法
JP3249992B2 (ja) * 1990-12-25 2002-01-28 ミノルタ株式会社 シリコン基板またはゲルマニウム基板用反射防止膜
US5307430A (en) * 1992-11-30 1994-04-26 The United States Of America As Represented By The United States Department Of Energy Lensing duct
US5993898A (en) * 1997-05-19 1999-11-30 Nikon Corporation Fabrication method and structure for multilayer optical anti-reflection coating, and optical component and optical system using multilayer optical anti-reflection coating
US6379014B1 (en) 2000-04-27 2002-04-30 N & K Technology, Inc. Graded anti-reflective coatings for photolithography
JP2003195006A (ja) * 2001-10-18 2003-07-09 Nippon Sheet Glass Co Ltd 光学部品
JP4179283B2 (ja) * 2002-12-10 2008-11-12 株式会社ニコン 光学素子及びその光学素子を用いた投影露光装置
US7087936B2 (en) * 2003-04-30 2006-08-08 Cree, Inc. Methods of forming light-emitting devices having an antireflective layer that has a graded index of refraction
KR101094114B1 (ko) * 2003-08-26 2011-12-15 가부시키가이샤 니콘 광학소자 및 노광장치
US8149381B2 (en) 2003-08-26 2012-04-03 Nikon Corporation Optical element and exposure apparatus
US6954256B2 (en) * 2003-08-29 2005-10-11 Asml Netherlands B.V. Gradient immersion lithography
US6842288B1 (en) * 2003-10-30 2005-01-11 3M Innovative Properties Company Multilayer optical adhesives and articles
US7924397B2 (en) * 2003-11-06 2011-04-12 Taiwan Semiconductor Manufacturing Company, Ltd. Anti-corrosion layer on objective lens for liquid immersion lithography applications
US7460206B2 (en) * 2003-12-19 2008-12-02 Carl Zeiss Smt Ag Projection objective for immersion lithography
EP1731299A1 (en) * 2004-03-31 2006-12-13 Konica Minolta Holdings, Inc. Transparent conductive film, method for producing transparent conductive film and organic electroluminescent device
JP4736373B2 (ja) * 2004-08-03 2011-07-27 日油株式会社 近赤外線吸収材及びそれを用いた表示装置
JP2006227568A (ja) * 2005-01-19 2006-08-31 Konica Minolta Opto Inc 反射防止膜、光学素子及び光送受信モジュール
US20070030569A1 (en) * 2005-08-04 2007-02-08 Guardian Industries Corp. Broad band antireflection coating and method of making same
WO2007139894A2 (en) 2006-05-26 2007-12-06 Cree Led Lighting Solutions, Inc. Solid state light emitting device and method of making same
US20090208865A1 (en) * 2008-02-19 2009-08-20 International Business Machines Corporation Photolithography focus improvement by reduction of autofocus radiation transmission into substrate
US8293451B2 (en) 2009-08-18 2012-10-23 International Business Machines Corporation Near-infrared absorbing film compositions
US8772376B2 (en) 2009-08-18 2014-07-08 International Business Machines Corporation Near-infrared absorbing film compositions
JP6016037B2 (ja) * 2011-05-24 2016-10-26 国立研究開発法人産業技術総合研究所 赤外線透過膜、赤外線透過膜の製造方法、赤外線用光学部品および赤外線装置
US20130057959A1 (en) * 2011-09-01 2013-03-07 Theodore D. Fay Highly dispersive optical element with binary transmissibility
US9359261B2 (en) 2013-05-07 2016-06-07 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US9110230B2 (en) 2013-05-07 2015-08-18 Corning Incorporated Scratch-resistant articles with retained optical properties
US9684097B2 (en) 2013-05-07 2017-06-20 Corning Incorporated Scratch-resistant articles with retained optical properties
US9366784B2 (en) 2013-05-07 2016-06-14 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US9703011B2 (en) 2013-05-07 2017-07-11 Corning Incorporated Scratch-resistant articles with a gradient layer
US11267973B2 (en) 2014-05-12 2022-03-08 Corning Incorporated Durable anti-reflective articles
US9335444B2 (en) 2014-05-12 2016-05-10 Corning Incorporated Durable and scratch-resistant anti-reflective articles
US9790593B2 (en) 2014-08-01 2017-10-17 Corning Incorporated Scratch-resistant materials and articles including the same
DE102015101135B4 (de) 2015-01-27 2018-12-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung eines reflexionsmindernden Schichtsystems und reflexionsminderndes Schichtsystem
JP2018536177A (ja) 2015-09-14 2018-12-06 コーニング インコーポレイテッド 高光線透過性かつ耐擦傷性反射防止物品
KR102824070B1 (ko) 2018-08-17 2025-06-23 코닝 인코포레이티드 얇고, 내구성 있는 반사-방지 구조를 갖는 무기산화물 물품
US12147009B2 (en) 2020-07-09 2024-11-19 Corning Incorporated Textured region to reduce specular reflectance including a low refractive index substrate with higher elevated surfaces and lower elevated surfaces and a high refractive index material disposed on the lower elevated surfaces
US20230402573A1 (en) * 2022-06-10 2023-12-14 Creeled, Inc. Coated phosphor particle, light emitting device including a coated phosphor particle, and method of making a coated phosphor particle

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE523874A (enExample) * 1952-10-29 1900-01-01
US3176574A (en) * 1960-12-19 1965-04-06 Bell & Howell Co Low reflectance coatings for optical elements including graduated high index layer
GB1136218A (en) * 1965-12-14 1968-12-11 Standard Telephones Cables Ltd Improvements in or relating to the manufacture of semiconductor optical devices
GB1292717A (en) * 1970-02-04 1972-10-11 Rank Organisation Ltd Improvements relating to anti-reflection coatings
JPS526094B2 (enExample) * 1971-08-16 1977-02-18
US3804491A (en) * 1971-08-16 1974-04-16 Olympus Optical Co Multilayer reflection proof film
GB1380793A (en) * 1972-07-29 1975-01-15 Barr & Stroud Ltd Multilayer anti-reflection coating
CH557546A (de) * 1972-10-19 1974-12-31 Balzers Patent Beteilig Ag Aus einer mehrzahl von einfachen oder zusammengesetzen (lambda)/4-schichten bestehender reflexionsvermindernder belag.
JPS5313408B2 (enExample) * 1974-09-17 1978-05-10
JPS526173A (en) * 1975-07-02 1977-01-18 Yoshiko Arai Filter device

Also Published As

Publication number Publication date
EP0127231B1 (en) 1987-08-26
NL8301824A (nl) 1984-12-17
EP0127231A1 (en) 1984-12-05
US4568140A (en) 1986-02-04
JPS6256481B2 (enExample) 1987-11-26
JPS59228201A (ja) 1984-12-21
CA1242603A (en) 1988-10-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee