JPS59221633A - 静電容量式差圧伝送器 - Google Patents

静電容量式差圧伝送器

Info

Publication number
JPS59221633A
JPS59221633A JP9772783A JP9772783A JPS59221633A JP S59221633 A JPS59221633 A JP S59221633A JP 9772783 A JP9772783 A JP 9772783A JP 9772783 A JP9772783 A JP 9772783A JP S59221633 A JPS59221633 A JP S59221633A
Authority
JP
Japan
Prior art keywords
chamber
electrode
pressure
wall surface
detection chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9772783A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429971B2 (OSRAM
Inventor
Masaru Mitake
見竹　優
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP9772783A priority Critical patent/JPS59221633A/ja
Publication of JPS59221633A publication Critical patent/JPS59221633A/ja
Publication of JPH0429971B2 publication Critical patent/JPH0429971B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP9772783A 1983-05-31 1983-05-31 静電容量式差圧伝送器 Granted JPS59221633A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9772783A JPS59221633A (ja) 1983-05-31 1983-05-31 静電容量式差圧伝送器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9772783A JPS59221633A (ja) 1983-05-31 1983-05-31 静電容量式差圧伝送器

Publications (2)

Publication Number Publication Date
JPS59221633A true JPS59221633A (ja) 1984-12-13
JPH0429971B2 JPH0429971B2 (OSRAM) 1992-05-20

Family

ID=14199915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9772783A Granted JPS59221633A (ja) 1983-05-31 1983-05-31 静電容量式差圧伝送器

Country Status (1)

Country Link
JP (1) JPS59221633A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110514351A (zh) * 2019-08-29 2019-11-29 广州敏华仪器仪表有限公司 一种共平面差压变送器
CN110514347A (zh) * 2019-08-29 2019-11-29 广州敏华仪器仪表有限公司 一种共平面悬浮绝对压力传感器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110514351A (zh) * 2019-08-29 2019-11-29 广州敏华仪器仪表有限公司 一种共平面差压变送器
CN110514347A (zh) * 2019-08-29 2019-11-29 广州敏华仪器仪表有限公司 一种共平面悬浮绝对压力传感器

Also Published As

Publication number Publication date
JPH0429971B2 (OSRAM) 1992-05-20

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