JPS59219476A - エツチング装置 - Google Patents

エツチング装置

Info

Publication number
JPS59219476A
JPS59219476A JP9102583A JP9102583A JPS59219476A JP S59219476 A JPS59219476 A JP S59219476A JP 9102583 A JP9102583 A JP 9102583A JP 9102583 A JP9102583 A JP 9102583A JP S59219476 A JPS59219476 A JP S59219476A
Authority
JP
Japan
Prior art keywords
liquid
tank
etching
plate
reaction tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9102583A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6340867B2 (ko
Inventor
Yasuo Komatsuzaki
靖男 小松崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Priority to JP9102583A priority Critical patent/JPS59219476A/ja
Publication of JPS59219476A publication Critical patent/JPS59219476A/ja
Publication of JPS6340867B2 publication Critical patent/JPS6340867B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP9102583A 1983-05-24 1983-05-24 エツチング装置 Granted JPS59219476A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9102583A JPS59219476A (ja) 1983-05-24 1983-05-24 エツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9102583A JPS59219476A (ja) 1983-05-24 1983-05-24 エツチング装置

Publications (2)

Publication Number Publication Date
JPS59219476A true JPS59219476A (ja) 1984-12-10
JPS6340867B2 JPS6340867B2 (ko) 1988-08-12

Family

ID=14014984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9102583A Granted JPS59219476A (ja) 1983-05-24 1983-05-24 エツチング装置

Country Status (1)

Country Link
JP (1) JPS59219476A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0555192A (ja) * 1991-08-27 1993-03-05 Mitsubishi Electric Corp ウエハ等の薄板体の表面処理装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7099282B2 (ja) 2018-11-26 2022-07-12 株式会社Ｊｖｃケンウッド ヘッドマウントディスプレイシステム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0555192A (ja) * 1991-08-27 1993-03-05 Mitsubishi Electric Corp ウエハ等の薄板体の表面処理装置

Also Published As

Publication number Publication date
JPS6340867B2 (ko) 1988-08-12

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