JPS5921497B2 - 圧力測定装置 - Google Patents

圧力測定装置

Info

Publication number
JPS5921497B2
JPS5921497B2 JP53135626A JP13562678A JPS5921497B2 JP S5921497 B2 JPS5921497 B2 JP S5921497B2 JP 53135626 A JP53135626 A JP 53135626A JP 13562678 A JP13562678 A JP 13562678A JP S5921497 B2 JPS5921497 B2 JP S5921497B2
Authority
JP
Japan
Prior art keywords
diaphragm
pressure measuring
pressure
hole
stand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53135626A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5562332A (en
Inventor
満 玉井
毅 安原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP53135626A priority Critical patent/JPS5921497B2/ja
Priority to US06/088,423 priority patent/US4262540A/en
Priority to DE19792943800 priority patent/DE2943800A1/de
Publication of JPS5562332A publication Critical patent/JPS5562332A/ja
Publication of JPS5921497B2 publication Critical patent/JPS5921497B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP53135626A 1978-11-02 1978-11-02 圧力測定装置 Expired JPS5921497B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP53135626A JPS5921497B2 (ja) 1978-11-02 1978-11-02 圧力測定装置
US06/088,423 US4262540A (en) 1978-11-02 1979-10-25 Pressure measuring device
DE19792943800 DE2943800A1 (de) 1978-11-02 1979-10-30 Druckmessvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53135626A JPS5921497B2 (ja) 1978-11-02 1978-11-02 圧力測定装置

Publications (2)

Publication Number Publication Date
JPS5562332A JPS5562332A (en) 1980-05-10
JPS5921497B2 true JPS5921497B2 (ja) 1984-05-21

Family

ID=15156194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53135626A Expired JPS5921497B2 (ja) 1978-11-02 1978-11-02 圧力測定装置

Country Status (3)

Country Link
US (1) US4262540A (en, 2012)
JP (1) JPS5921497B2 (en, 2012)
DE (1) DE2943800A1 (en, 2012)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56102445U (en, 2012) * 1980-01-07 1981-08-11
JPS59171826A (ja) * 1983-03-22 1984-09-28 Copal Takeda Medical Kenkyusho:Kk 静電容量型圧力センサ−の温度補償装置
JPS6037837U (ja) * 1983-08-20 1985-03-15 トキコ株式会社 ダイアフラム式センサ
US4517622A (en) * 1983-08-29 1985-05-14 United Technologies Corporation Capacitive pressure transducer signal conditioning circuit
US4754365A (en) * 1987-06-15 1988-06-28 Fischer & Porter Company Differential pressure transducer
EP0333714A1 (en) * 1987-09-08 1989-09-27 Panex Corporation Pressure sensor system
US4954925A (en) * 1988-12-30 1990-09-04 United Technologies Corporation Capacitive sensor with minimized dielectric drift
AT395772B (de) * 1990-02-20 1993-03-25 Vaillant Gmbh Gasdruckregler fuer ein heizgeraet
DE4124662A1 (de) * 1991-07-25 1993-01-28 Fibronix Sensoren Gmbh Relativdrucksensor
US5396803A (en) * 1993-07-07 1995-03-14 Tylan General, Inc. Dual balanced capacitance manometers for suppressing vibration effects
JP3314538B2 (ja) 1994-08-05 2002-08-12 株式会社日立製作所 差圧伝送器
US6038961A (en) * 1998-03-02 2000-03-21 Rosemount Inc. Flush mount remote seal
US6120033A (en) * 1998-06-17 2000-09-19 Rosemount Inc. Process diaphragm seal
US6837112B2 (en) * 2003-03-22 2005-01-04 Stec Inc. Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
US8042401B2 (en) * 2008-06-12 2011-10-25 Rosemount, Inc. Isolation system for process pressure measurement
DE102013114407A1 (de) * 2013-12-18 2015-06-18 Endress + Hauser Gmbh + Co. Kg Drucksensor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3793885A (en) * 1972-09-05 1974-02-26 Rosemount Inc Diaphrgam construction for differential pressure transducer
US3965746A (en) * 1974-11-04 1976-06-29 Teledyne Industries, Inc. Pressure transducer
JPS5829862B2 (ja) * 1977-05-14 1983-06-25 富士電機株式会社 圧力測定装置
JPS542783A (en) * 1977-06-09 1979-01-10 Fuji Electric Co Ltd Production of pressure or differential pressure measuring apparatus
JPS5537968A (en) * 1978-09-11 1980-03-17 Fuji Electric Co Ltd Pressure measuring instrument

Also Published As

Publication number Publication date
JPS5562332A (en) 1980-05-10
DE2943800A1 (de) 1980-05-14
US4262540A (en) 1981-04-21
DE2943800C2 (en, 2012) 1987-10-01

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