JPS59204785A - 光学的検出装置 - Google Patents

光学的検出装置

Info

Publication number
JPS59204785A
JPS59204785A JP58081575A JP8157583A JPS59204785A JP S59204785 A JPS59204785 A JP S59204785A JP 58081575 A JP58081575 A JP 58081575A JP 8157583 A JP8157583 A JP 8157583A JP S59204785 A JPS59204785 A JP S59204785A
Authority
JP
Japan
Prior art keywords
light
light emitting
emitting means
receiving means
processing circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58081575A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0369042B2 (cs
Inventor
Takashi Ito
隆 伊藤
Sumihiro Ueda
上田 澄広
Masaaki Hirayama
平山 真明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kawasaki Heavy Industries Ltd
Kawasaki Motors Ltd
Original Assignee
Kawasaki Heavy Industries Ltd
Kawasaki Jukogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Heavy Industries Ltd, Kawasaki Jukogyo KK filed Critical Kawasaki Heavy Industries Ltd
Priority to JP58081575A priority Critical patent/JPS59204785A/ja
Publication of JPS59204785A publication Critical patent/JPS59204785A/ja
Publication of JPH0369042B2 publication Critical patent/JPH0369042B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V8/00Prospecting or detecting by optical means
    • G01V8/10Detecting, e.g. by using light barriers
    • G01V8/20Detecting, e.g. by using light barriers using multiple transmitters or receivers

Landscapes

  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Geophysics (AREA)
  • Measurement Of Optical Distance (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP58081575A 1983-05-09 1983-05-09 光学的検出装置 Granted JPS59204785A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58081575A JPS59204785A (ja) 1983-05-09 1983-05-09 光学的検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58081575A JPS59204785A (ja) 1983-05-09 1983-05-09 光学的検出装置

Publications (2)

Publication Number Publication Date
JPS59204785A true JPS59204785A (ja) 1984-11-20
JPH0369042B2 JPH0369042B2 (cs) 1991-10-30

Family

ID=13750100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58081575A Granted JPS59204785A (ja) 1983-05-09 1983-05-09 光学的検出装置

Country Status (1)

Country Link
JP (1) JPS59204785A (cs)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62245110A (ja) * 1986-04-16 1987-10-26 Anritsu Corp 変位測定装置
JPS6347479A (ja) * 1986-08-18 1988-02-29 五反田 基博 磁気キ−
JPS6395380A (ja) * 1986-10-09 1988-04-26 Ohkura Electric Co Ltd 記録紙及び記録紙ホルダの検出器
JPS63128220A (ja) * 1986-11-18 1988-05-31 Koito Ind Co Ltd 距離測定装置用演算回路
JPS6396464U (cs) * 1986-12-15 1988-06-22
JPS6466510A (en) * 1987-09-07 1989-03-13 Matsushita Electric Industrial Co Ltd Distance measuring apparatus
JPH0179183U (cs) * 1987-11-13 1989-05-26
JPH0189384U (cs) * 1987-12-02 1989-06-13
JPH02306109A (ja) * 1989-05-19 1990-12-19 Hamamatsu Photonics Kk 3次元位置認識装置
JPH02306108A (ja) * 1989-05-19 1990-12-19 Hamamatsu Photonics Kk 3次元位置認識装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54121164A (en) * 1978-03-10 1979-09-20 Minolta Camera Co Ltd Photometric circuit of distance detector
JPS54148551A (en) * 1978-05-15 1979-11-20 Ricoh Co Ltd Photo detecting system
JPS5714704A (en) * 1980-07-01 1982-01-26 Rikagaku Kenkyusho Signal processing system for semiconductor position detecting sensor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54121164A (en) * 1978-03-10 1979-09-20 Minolta Camera Co Ltd Photometric circuit of distance detector
JPS54148551A (en) * 1978-05-15 1979-11-20 Ricoh Co Ltd Photo detecting system
JPS5714704A (en) * 1980-07-01 1982-01-26 Rikagaku Kenkyusho Signal processing system for semiconductor position detecting sensor

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62245110A (ja) * 1986-04-16 1987-10-26 Anritsu Corp 変位測定装置
JPS6347479A (ja) * 1986-08-18 1988-02-29 五反田 基博 磁気キ−
JPS6395380A (ja) * 1986-10-09 1988-04-26 Ohkura Electric Co Ltd 記録紙及び記録紙ホルダの検出器
JPS63128220A (ja) * 1986-11-18 1988-05-31 Koito Ind Co Ltd 距離測定装置用演算回路
JPS6396464U (cs) * 1986-12-15 1988-06-22
JPS6466510A (en) * 1987-09-07 1989-03-13 Matsushita Electric Industrial Co Ltd Distance measuring apparatus
JPH0179183U (cs) * 1987-11-13 1989-05-26
JPH0189384U (cs) * 1987-12-02 1989-06-13
JPH02306109A (ja) * 1989-05-19 1990-12-19 Hamamatsu Photonics Kk 3次元位置認識装置
JPH02306108A (ja) * 1989-05-19 1990-12-19 Hamamatsu Photonics Kk 3次元位置認識装置

Also Published As

Publication number Publication date
JPH0369042B2 (cs) 1991-10-30

Similar Documents

Publication Publication Date Title
JPS59204785A (ja) 光学的検出装置
JPH10197212A (ja) 光式変位センサ、光式厚さセンサ、変位検出方法及び厚さ検出方法
CN118486627B (zh) 一种晶圆预定位方法及装置、电子设备
US20210343257A1 (en) Detection of blink period for ambient light sensing
JP2000012657A (ja) 半導体ウェハの位置決め装置
JPS6410108A (en) Constitution of semiconductor image position detecting element and image position detecting method
JPH07128018A (ja) 2値化法
JPH0352883B2 (cs)
KR101677161B1 (ko) 열화상 정보를 이용한 도포패턴 검사 장치 및 이를 이용한 도포패턴 검사 방법
JPH08178647A (ja) 光電センサ
JPS6478206A (en) Detecting method for defocusing quantity
TW201832056A (zh) 可動態學習不同工作表面之材質的光學導航機制
JP2886663B2 (ja) 光走査型変位センサ
JPH1082633A (ja) 測距センサ
JP2519704Y2 (ja) 変位測定装置
JPH0329733A (ja) ラベル検知装置
JP2688819B2 (ja) 塗布剤検出方法及びその装置
JPS60205303A (ja) 光変位計測装置
JP2003179035A (ja) プラズマ応用機器におけるエンドポイント検出方法
JPH02304307A (ja) 光センサの信号処理方法
JPS63111402A (ja) 位置計測装置
JP2516092Y2 (ja) 光電スイッチ
JPH08247712A (ja) 光学式変位センサ
Moreira et al. Adsorptive stripping voltammetry of phenylthiohydantoin and methylthiohydantoin derivatives of amino acids in the presence of copper (II) ions at a hanging mercury drop electrode
US7050948B2 (en) Method and computer program product for evaluation of data recorded by measuring instruments