JPS59204282A - 薄膜形成方法および薄膜形成装置 - Google Patents

薄膜形成方法および薄膜形成装置

Info

Publication number
JPS59204282A
JPS59204282A JP58079019A JP7901983A JPS59204282A JP S59204282 A JPS59204282 A JP S59204282A JP 58079019 A JP58079019 A JP 58079019A JP 7901983 A JP7901983 A JP 7901983A JP S59204282 A JPS59204282 A JP S59204282A
Authority
JP
Japan
Prior art keywords
thin film
substrate
particles
film forming
film formation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58079019A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0445972B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yoshio Furuya
古屋　義夫
Hisao Ito
久夫 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP58079019A priority Critical patent/JPS59204282A/ja
Publication of JPS59204282A publication Critical patent/JPS59204282A/ja
Publication of JPH0445972B2 publication Critical patent/JPH0445972B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors

Landscapes

  • Light Receiving Elements (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Photovoltaic Devices (AREA)
JP58079019A 1983-05-06 1983-05-06 薄膜形成方法および薄膜形成装置 Granted JPS59204282A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58079019A JPS59204282A (ja) 1983-05-06 1983-05-06 薄膜形成方法および薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58079019A JPS59204282A (ja) 1983-05-06 1983-05-06 薄膜形成方法および薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS59204282A true JPS59204282A (ja) 1984-11-19
JPH0445972B2 JPH0445972B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-28

Family

ID=13678226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58079019A Granted JPS59204282A (ja) 1983-05-06 1983-05-06 薄膜形成方法および薄膜形成装置

Country Status (1)

Country Link
JP (1) JPS59204282A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03205394A (ja) * 1989-12-28 1991-09-06 Shimadzu Corp 薄膜製造方法
JP2013179213A (ja) * 2012-02-29 2013-09-09 Oki Electric Ind Co Ltd 発光素子における透明電極の製造方法
JP2014110300A (ja) * 2012-11-30 2014-06-12 Nichia Chem Ind Ltd 半導体発光素子の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48100075A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-03-29 1973-12-18
JPS57208180A (en) * 1981-06-17 1982-12-21 Hitachi Ltd Manufacture of photoconductive film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48100075A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-03-29 1973-12-18
JPS57208180A (en) * 1981-06-17 1982-12-21 Hitachi Ltd Manufacture of photoconductive film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03205394A (ja) * 1989-12-28 1991-09-06 Shimadzu Corp 薄膜製造方法
JP2013179213A (ja) * 2012-02-29 2013-09-09 Oki Electric Ind Co Ltd 発光素子における透明電極の製造方法
JP2014110300A (ja) * 2012-11-30 2014-06-12 Nichia Chem Ind Ltd 半導体発光素子の製造方法

Also Published As

Publication number Publication date
JPH0445972B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-28

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