JPS59202645A - チツプオリエンタ− - Google Patents

チツプオリエンタ−

Info

Publication number
JPS59202645A
JPS59202645A JP7707683A JP7707683A JPS59202645A JP S59202645 A JPS59202645 A JP S59202645A JP 7707683 A JP7707683 A JP 7707683A JP 7707683 A JP7707683 A JP 7707683A JP S59202645 A JPS59202645 A JP S59202645A
Authority
JP
Japan
Prior art keywords
chip
arm
arms
block
mounting table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7707683A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0566014B2 (enrdf_load_stackoverflow
Inventor
Yoshito Matsui
松井　吉人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Machinery Inc
Original Assignee
Nichiden Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nichiden Machinery Ltd filed Critical Nichiden Machinery Ltd
Priority to JP7707683A priority Critical patent/JPS59202645A/ja
Publication of JPS59202645A publication Critical patent/JPS59202645A/ja
Publication of JPH0566014B2 publication Critical patent/JPH0566014B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Die Bonding (AREA)
JP7707683A 1983-04-30 1983-04-30 チツプオリエンタ− Granted JPS59202645A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7707683A JPS59202645A (ja) 1983-04-30 1983-04-30 チツプオリエンタ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7707683A JPS59202645A (ja) 1983-04-30 1983-04-30 チツプオリエンタ−

Publications (2)

Publication Number Publication Date
JPS59202645A true JPS59202645A (ja) 1984-11-16
JPH0566014B2 JPH0566014B2 (enrdf_load_stackoverflow) 1993-09-20

Family

ID=13623690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7707683A Granted JPS59202645A (ja) 1983-04-30 1983-04-30 チツプオリエンタ−

Country Status (1)

Country Link
JP (1) JPS59202645A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05182891A (ja) * 1992-04-01 1993-07-23 Nikon Corp 基板の位置決め装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5540176A (en) * 1978-09-16 1980-03-21 Shin Meiwa Ind Co Ltd Method of and apparatus for moving container in compactor container type garbage treatment system
JPS5681940A (en) * 1979-12-10 1981-07-04 Hitachi Ltd Pellet bonding device
JPS57147243A (en) * 1981-03-06 1982-09-11 Toshiba Seiki Kk Positioning device for semiconductor pellet

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5540176A (en) * 1978-09-16 1980-03-21 Shin Meiwa Ind Co Ltd Method of and apparatus for moving container in compactor container type garbage treatment system
JPS5681940A (en) * 1979-12-10 1981-07-04 Hitachi Ltd Pellet bonding device
JPS57147243A (en) * 1981-03-06 1982-09-11 Toshiba Seiki Kk Positioning device for semiconductor pellet

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05182891A (ja) * 1992-04-01 1993-07-23 Nikon Corp 基板の位置決め装置

Also Published As

Publication number Publication date
JPH0566014B2 (enrdf_load_stackoverflow) 1993-09-20

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