JPS59202645A - Orienter for chip - Google Patents

Abstract

PURPOSE:To position chips in all size by one device by positioning the chips on a chip base plate by opening and closing four pawls. CONSTITUTION:When air is sent in through a hole 19, an air passing hole 20 and a hole 18, a piston mechanism 16 is elevated while pushing each first arm 21a, 21a... of four T-shaped levers 21, 21... up to the positions of stoppage regulated by a stopper 23, and opens four pawls 4, 4... on a chip base plate 5 against the energizing force of compression springs 8, 8... by each second arm 21b, 21b.... A chip 2 is placed on the chip base plate 5. When the supply of air is stopped, the piston mechanism 16 is dropped by the energizing force of a compression spring 17, and separated from each first arm, and the compression strings in guides 7, 7..., on the contrary, push four pawls at a time, thus closing four pawls on the chip base plate 5, then positioning the chip.

Description

DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention is directed to mounting each chip separated from a semiconductor quano in a semiconductor device manufacturing process at a predetermined position on a lead frame in a predetermined direction. It is used as a device to position and align the chips.

In the manufacturing process of conventional semiconductor devices, a semiconductor element formed on a semicircular wafer is separated into valley vents and made into chips. After being made into chips, each chip is placed at a predetermined position on a lead frame. It is placed in the berendmakund.

In this way, when each chip is mounted on a lead frame, for example, in the conventional method, FIGS.
) is a positioning pewter whose inner surface is approximately truncated and inverted pyramid-shaped.
After inserting and positioning the chips 121 in the chip (2), each chip (23) is sucked with a suction head and placed on the lead frame in sequence. 1) has been changed, and in order to change the direction of the chip +21 and control its attitude, the positioning base fil must rotate freely. Conventionally, such a positioning base Ill has been made up of individual parts. After hardening and precision polishing, seven pieces are formed by combining them.

However, polishing such individual parts requires precision on the micrometer level, making processing difficult.
Manufacturing the positioning table [11] takes time and is expensive, and it is necessary to manufacture the positioning table (1) with several sizes for each type of chip (2), which causes an increase in cost. Also, the chip 12) of the same product building is also μm.
Positioning base (with variations in dimensions per unit and relative S)
If the storage dimensions in 1) do not match, the positioning may not be performed accurately or the chip i21 may not be inserted.

C. Purpose of the Invention The purpose of the present invention is to create a semiconductor Quano-W chip,
Position each chip and posture 1! Please control ilJ.
In this process, seven devices are used to position and control the position and posture of all types of chips in the process of flashing them onto the lead frame.

2. Structure of the Invention The chip orienter according to the present invention includes a rotary block that is rotatably supported by a support, a chip mounting table that is housed in the rotary block described in 1iij, and a plurality of guides, each of which has a rotary block that is rotatably supported by a support. is guided, and the biasing force of the springs causes the chip 'i@j to be pressed and positioned from all sides on the stand, the first arm, the second arm, and the third arm. The arms form a T-shape, are provided for each of the claws, and are centered at each intersection of the first, second, and third arms,
a number of rotating members, and a first arm mounted on the rotating block and disposed at the front;
A reciprocating mechanism that rotates the valley lever and opens the claws in all directions against the biasing force of the spring by means of the second arms, and faces the arms of @J of @fat. , when the reciprocating 4JA mechanism is moved away from the first arms and the second arms are pressed, the reciprocating 4JA mechanism By contacting the third arm, the micrometer head is positioned on the chip k d iM stand, and the rotating block is rotated in a predetermined direction by 10 J<, and the rotation is controlled by dominant braking on the stand where the chip is placed. A positioning mechanism.

E. Example Below is an example of the present invention! g, Figure 2, Figure 3, Figure 7
The explanation will start from the tip orienter (3) shown in the figure. In the figure, (4) (41・O@) is a pair of claws that press and position the chip placed on the chip mounting table 15 from all sides, and is attached to the rotating block (61). Guided by a number of guides +71171..., τ, the chip area is moved in 51 directions, for example in the (A) direction, and the chip mounting table (in the opposite direction to 61, for example in the (A) direction) is guided by a number of claws +41+41. ... moves all at once, and the chip mounting table (51
0 and 5 guides that open and close on the top [71471・ee
A compression spring (81 [81...] is fitted inside, and the claws 141f++...
5) Press in the direction. In addition, the chip mounting table (51 is a support platen 1 fixed to the rotating block t61)
191[91...] is attached to the rotation block (6
Rotates with 1. The rotating block 161 is rotatably housed on the support +101 via a bearing (Ill (l...), and further includes a tongue 7 kumukatsu link (12) The rotation speed of this pulse motor (measured by the number of pulses it generates) is determined by the rotary encoder ring and the 7-input adapter 5. Next, the river moves to the rotating block (6
1 is provided for round trip i! III mechanism, for example, a piston mechanism that is pushed by four parts formed at the center of a rotating block (61).In other words, a compression spring force η is installed around the piston iiiu*. , compression spring 07) is connected to the piston 211 clause and the rotating block (
6; When the piston mechanism (16) is driven upward, the compression spring 0 is driven upward, and conversely, the piston mechanism (16) is moved upward according to the elastic stretching force of the compression spring α. 16) descends. The upward driving force of the piston plate structure is provided by air. That is, it traces to Ifε161 of the recessed part at the center of the rotating block 16) which is connected to tm+l of the piston mechanism (+6),
Force and air are sent through the hole (18) that curves the rotating block (61) and the hole (19) that passes through the support (lO), and the piston mechanism moves upward due to the pressure. Here, since the hole rotates together with the rotary block j61, spike-shaped air passage holes are formed in the support 11Q+ over the entire circumference of the rotary block 161, and the hole rotates and is perpendicular to the hole. Even if it is not on the line, the nitrogen sent into hole 091 once passes through the annular air vent hole, enters the K state, and is sent to the bottom of the four parts in the center of the rotating block (61'K). The piston mechanism (16) is driven completely upward.

The first arm (21a), the second arm (21b), and the third arm (21c) are 1++6T.
! : A T-shaped lever, which is pivotally supported by the support grogun (9) so that it can rotate around the intersection of the 1st/, +8.2nd, and 3rd arms (21a), (21b), and (21c). , each of the first arms (21a) (21a) of the Tf' type lever levers 1). - Opposed to the piston mechanism (Kou 6), 6th, 27-m (21b)
(21b)"-"i<'nails+41141611・
It is facing the 6-stop pant. Therefore, the piston mechanism (IQ
When the is driven upward, the first arms (21a)
(21a) - To push e to 7 degrees, 7 T
The letter-shaped lever El+馨υ... is also rotated by 7 degrees in the direction away from the chip area holder 161, for example in the [E] direction in FIG. 2, and the second arms (21b) (21b)...- presses each of the two claws 14114i at once against the biasing force of the compression springs 181+81... At this time, above the piston mechanism (10), as shown in FIGS. ) by coming into contact with the rising 11 inch of the stopper (the supporting frame 124 fixed to the rotating block 61 as shown in FIG. 5) sets its rising position to 1''. The supporting frame 24
) is screwed into the end, the screw (by moving it in and out, the stopper) moves up or down, and its vertical position is set. Then, when the compressed air is removed by switching the solenoid valve, the piston 'flA structure
161 is lowered by the compression spring ση, and from each first arm (21a) (21a)...? j4 'a'
1. In the sieve and guide i71 +71..., press each of the compression springs +81 +81... in the chimp mounting stand (61 direction, e.g. Close this on the ff1m stand 151.

That is, the e4 (T-shaped lever I21 of B) rule... is caused by the piston mechanism (rotating according to the reciprocating movement of the beak).
The two claws 14i14+... will be enclosed on the chip area stand (51), and the T-shaped lever gugu
---'s 3rd A (21c) (210)
＠ II・ is supported by the rotating block + 61] Opposing the 7 micrometer heads β rec.
1 (by 81..., the chimp battle [place the stand 151 times, that is, each second arm (21b) in the closing direction (21b)
... and press the T-shaped levers (2)l) &υ・
... rotates in the same direction, for example in the opposite direction (in Fig. 7), each third arm (21c) (21c) makes contact with each micrometer head 12 (401. , determine the closing position of the claw +41+41...

Here, if the 11 positions of the claws (4) (4)... set by the Micrometer Head Co., Ltd. (2)... It is fixed by the setscrew (3 barrels...).

Next, the support uol that supports the rotating block (61) is
It is held by the vertically moving pronk V (2) and is housed in the same frame that is temporarily fixed to the pulse motor main body. The pulse motor α barrel body 1 and the vertical front block (c) are supported by the guide g8) 1291 vertically installed on the base, and the vertical movement block (the convex portion W61' is supported by the guide 1Z9). The height of the vertical movement block 4 is 1.
Verse 11 is given. At this time, the height of the support body [101 held by the vertical movement block 4] and the pulse motor main body are also adjusted. In addition, as shown in Fig. 2, WJJ Fig., and Fig. 9, two arms t+Ifno are attached to the support t101K.
) are formed in a protruding manner to face each other, and a micrometer head Ill and a compression spring 134 are in horizontal contact with the two arms +101 and +101. That is, the micrometer head (31) and the compression spring X north finely adjust the position of the support (10) relative to the rotating shaft of the pulse motor 1131. Therefore, if the position at which the rotation block 61 should stop is in the middle of the step-rotating pulse motor U3, adjust the pulse motor main body relative to the rotation block +61 and the micrometer head 31). This allows adjustment by rotating within a predetermined range. Based on the above configuration, the operation of the chip orienter 13) according to the tree is as follows. That is, first, hole t1
9) When air is sent through the air passage hole wo'r and hole f181, the piston mechanism (I port is stopper 1
23) until the first arm (21) of the T-shaped levers (21)
a) While suppressing (21a)..., rise and use the second arms (21, cut (21b)...) to compress the claws +41141... to the springs +81 +81.
The chip mounting table (51) is opened against the urging force of .... Next, the chip 12 is placed on the chip mounting table 151, but at this time, the chip mounting table (51) Chips of any size can be mounted.

Then, τ, if the air supply is stopped, the piston mechanism (1 (
2) is lowered by the biasing force of the pressure spring 0η and separates from each first arm (21a) (21a)..., and on the contrary, the pressure spring +81 (81... 7 nails 141i41-e
By pressing at the same time, the claws +41 (4)...
Close on Chimpsen Hyakudai 151 and position the chip (2).

At this time, the closing position of the claws t4N41... is i
It is set by a number of micrometer heads ci4, g2, . In order to control the attitude of the chip 12+, a pulse motor (13) is rotated, and a rotation block +61 connected to the rotation shaft thereof and a chip mounting table 15+ housed in the rotation block +61 are rotated. It is sufficient if both are rotated to the same extent in a predetermined direction.

With Q like this, the chip] 2) is the chip mounting table (5)
At the top, the position is determined by the claws +41+41, and the posture is controlled by the rotation block 161. Then, by sucking the chip (21) to the lead frame, the effect of the invention is to move the chip to the lead frame. In the step of positioning and aligning, the chips are positioned on the chip mounting table by opening and closing the claws, making it possible to position chips of various sizes using one device. Moreover, the opening and closing of the claws is driven by air and does not require electrical drive such as a motor or solenoid, so there is no need for a mechanism for supplying energy such as a plan, making the device more compact. Then, place the q-claw and the chip 1a unit on the rotating block, and set 3gθ°.
Since the rotation can be stopped freely, the posture of the chip can be controlled freely on the chip mounting table.

[Brief explanation of the drawing]

FIG. 1(a) is a perspective view of a conventional chip positioning stand.
Figure (b) is its sectional view, Figure 1 (Q) is its plan view, and Figure 2 is the main part of the tip orienter according to the present invention.
I sectional view, Figure 3 is its plan view, Figure 9 is its front view,
FIG. 6 is a plan view of essential parts of the stopper of the tip orienter according to FIG. +21 @・Chip, (3)・・Chip orienter,
]41・1 claw, (51・-chip mounting table, (61・・Kikozu long, (716@guide, (8)・spring, (lO)・・support, 113) @・pulse motor−
1 (18) @ reciprocating mechanism, 121 + 61 lever,
(21a) e ea qr; / arm, (21
b)・11 Second arm, (21c)...Third arm: 3', Q'・Micrometer head.

Claims (1)

[Claims] ]11 A rotary block rotatably supported by a support body, a chip arranging stand housed in the rotary block, each guided by a number of guides, and a chip arranging block rotatably supported by a support body, a chip arranging stand housed in the rotary block, each guided by a number of guides, and a number of chip thieves supported by a biasing force of tJt springs. It has two claws that hold and position it from all sides on the mounting table! The arm, the second arm, and the third arm form a single character shape, are provided for each of the above-mentioned claws, and are centered at each intersection of the first, second, and third arms. Then, each lever is rotated, and the 11th arm provided on the rotating block is pressed, and each lever is rotated to turn the curved claw. a reciprocating mechanism which resists the biasing force of a spring and surrounds in χ squares by a number of second arms; , the reciprocating #l structure moves away from the first arms, and the two second arms come into contact with the third arms when the two second arms are suppressed;
A chip orienter comprising: a micrometer head for positioning a chip on a mounting table; and a rotational positioning mechanism for controlling the posture of the chip on the mounting table by rotating the rotating block until it rotates in a predetermined direction.