JPS59202381A - アルゴン回収方法 - Google Patents
アルゴン回収方法Info
- Publication number
- JPS59202381A JPS59202381A JP58076996A JP7699683A JPS59202381A JP S59202381 A JPS59202381 A JP S59202381A JP 58076996 A JP58076996 A JP 58076996A JP 7699683 A JP7699683 A JP 7699683A JP S59202381 A JPS59202381 A JP S59202381A
- Authority
- JP
- Japan
- Prior art keywords
- argon
- gas
- argon gas
- recovered
- liquefied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 title claims description 186
- 229910052786 argon Inorganic materials 0.000 title claims description 93
- 238000000034 method Methods 0.000 title claims description 8
- 239000007789 gas Substances 0.000 claims description 53
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 26
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 13
- 239000001569 carbon dioxide Substances 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 8
- 238000004821 distillation Methods 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 6
- 239000007800 oxidant agent Substances 0.000 claims description 4
- 238000000926 separation method Methods 0.000 claims description 4
- VUZPPFZMUPKLLV-UHFFFAOYSA-N methane;hydrate Chemical compound C.O VUZPPFZMUPKLLV-UHFFFAOYSA-N 0.000 claims description 3
- 238000011084 recovery Methods 0.000 claims description 3
- 238000005057 refrigeration Methods 0.000 claims description 3
- 239000003507 refrigerant Substances 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 14
- 230000003647 oxidation Effects 0.000 description 8
- 238000007254 oxidation reaction Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 7
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 238000003860 storage Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/08—Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2200/00—Processes or apparatus using separation by rectification
- F25J2200/02—Processes or apparatus using separation by rectification in a single pressure main column system
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2215/00—Processes characterised by the type or other details of the product stream
- F25J2215/58—Argon
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Separation By Low-Temperature Treatments (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58076996A JPS59202381A (ja) | 1983-04-30 | 1983-04-30 | アルゴン回収方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58076996A JPS59202381A (ja) | 1983-04-30 | 1983-04-30 | アルゴン回収方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59202381A true JPS59202381A (ja) | 1984-11-16 |
JPH0451753B2 JPH0451753B2 (enrdf_load_stackoverflow) | 1992-08-19 |
Family
ID=13621385
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58076996A Granted JPS59202381A (ja) | 1983-04-30 | 1983-04-30 | アルゴン回収方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59202381A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4623524A (en) * | 1985-02-08 | 1986-11-18 | Hitachi, Ltd. | Process and apparatus for recovering inert gas |
JP2010538234A (ja) * | 2007-06-14 | 2010-12-09 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | メタンリッチ流の極低温分離方法及び装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5243478A (en) * | 1975-10-01 | 1977-04-05 | Ibm | Sample retainer for spectrophotometer |
JPS5254679A (en) * | 1975-10-31 | 1977-05-04 | Nippon Oxygen Co Ltd | Air separation by liquefaction |
JPS5649319A (en) * | 1972-07-31 | 1981-05-02 | Lilly Co Eli | Animal medicine composition |
JPS5674578A (en) * | 1979-11-21 | 1981-06-20 | Hitachi Ltd | Pretreatment method for adsorption tower unilizing cold of liquefied natural gas |
JPS5946473A (ja) * | 1982-09-10 | 1984-03-15 | 共同酸素株式会社 | 半導体用単結晶製造炉における雰囲気用アルゴン回収方法 |
-
1983
- 1983-04-30 JP JP58076996A patent/JPS59202381A/ja active Granted
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5649319A (en) * | 1972-07-31 | 1981-05-02 | Lilly Co Eli | Animal medicine composition |
JPS5243478A (en) * | 1975-10-01 | 1977-04-05 | Ibm | Sample retainer for spectrophotometer |
JPS5254679A (en) * | 1975-10-31 | 1977-05-04 | Nippon Oxygen Co Ltd | Air separation by liquefaction |
JPS5674578A (en) * | 1979-11-21 | 1981-06-20 | Hitachi Ltd | Pretreatment method for adsorption tower unilizing cold of liquefied natural gas |
JPS5946473A (ja) * | 1982-09-10 | 1984-03-15 | 共同酸素株式会社 | 半導体用単結晶製造炉における雰囲気用アルゴン回収方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4623524A (en) * | 1985-02-08 | 1986-11-18 | Hitachi, Ltd. | Process and apparatus for recovering inert gas |
JP2010538234A (ja) * | 2007-06-14 | 2010-12-09 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | メタンリッチ流の極低温分離方法及び装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0451753B2 (enrdf_load_stackoverflow) | 1992-08-19 |
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