JPS59201351A - 走査型電子顕微鏡 - Google Patents

走査型電子顕微鏡

Info

Publication number
JPS59201351A
JPS59201351A JP58076673A JP7667383A JPS59201351A JP S59201351 A JPS59201351 A JP S59201351A JP 58076673 A JP58076673 A JP 58076673A JP 7667383 A JP7667383 A JP 7667383A JP S59201351 A JPS59201351 A JP S59201351A
Authority
JP
Japan
Prior art keywords
electron microscope
scanning
scan
scanning signal
type electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58076673A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0463505B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yuji Mori
森　優治
Teruji Hirai
平居　暉士
Masao Kawai
河合　政夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP58076673A priority Critical patent/JPS59201351A/ja
Publication of JPS59201351A publication Critical patent/JPS59201351A/ja
Publication of JPH0463505B2 publication Critical patent/JPH0463505B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP58076673A 1983-04-30 1983-04-30 走査型電子顕微鏡 Granted JPS59201351A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58076673A JPS59201351A (ja) 1983-04-30 1983-04-30 走査型電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58076673A JPS59201351A (ja) 1983-04-30 1983-04-30 走査型電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS59201351A true JPS59201351A (ja) 1984-11-14
JPH0463505B2 JPH0463505B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-10-12

Family

ID=13611940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58076673A Granted JPS59201351A (ja) 1983-04-30 1983-04-30 走査型電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS59201351A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006138864A (ja) * 2001-08-29 2006-06-01 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡
JP2007003535A (ja) * 2001-08-29 2007-01-11 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡
US7659508B2 (en) 2001-08-29 2010-02-09 Hitachi, Ltd. Method for measuring dimensions of sample and scanning electron microscope

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5341062A (en) * 1977-05-12 1978-04-14 Nippon Fuirutaa Kk Purifying method and apparatus for drainage by microorganism

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5341062A (en) * 1977-05-12 1978-04-14 Nippon Fuirutaa Kk Purifying method and apparatus for drainage by microorganism

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006138864A (ja) * 2001-08-29 2006-06-01 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡
JP2007003535A (ja) * 2001-08-29 2007-01-11 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡
US7659508B2 (en) 2001-08-29 2010-02-09 Hitachi, Ltd. Method for measuring dimensions of sample and scanning electron microscope
US8080789B2 (en) 2001-08-29 2011-12-20 Hitachi, Ltd. Sample dimension measuring method and scanning electron microscope

Also Published As

Publication number Publication date
JPH0463505B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-10-12

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