JPS59195644A - 露光マスク洗浄装置 - Google Patents

露光マスク洗浄装置

Info

Publication number
JPS59195644A
JPS59195644A JP58070493A JP7049383A JPS59195644A JP S59195644 A JPS59195644 A JP S59195644A JP 58070493 A JP58070493 A JP 58070493A JP 7049383 A JP7049383 A JP 7049383A JP S59195644 A JPS59195644 A JP S59195644A
Authority
JP
Japan
Prior art keywords
exposure mask
mask
washing
cleaning
defect detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58070493A
Other languages
English (en)
Japanese (ja)
Other versions
JPH045978B2 (enExample
Inventor
Hiromi Yamashita
裕己 山下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP58070493A priority Critical patent/JPS59195644A/ja
Publication of JPS59195644A publication Critical patent/JPS59195644A/ja
Publication of JPH045978B2 publication Critical patent/JPH045978B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP58070493A 1983-04-21 1983-04-21 露光マスク洗浄装置 Granted JPS59195644A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58070493A JPS59195644A (ja) 1983-04-21 1983-04-21 露光マスク洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58070493A JPS59195644A (ja) 1983-04-21 1983-04-21 露光マスク洗浄装置

Publications (2)

Publication Number Publication Date
JPS59195644A true JPS59195644A (ja) 1984-11-06
JPH045978B2 JPH045978B2 (enExample) 1992-02-04

Family

ID=13433097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58070493A Granted JPS59195644A (ja) 1983-04-21 1983-04-21 露光マスク洗浄装置

Country Status (1)

Country Link
JP (1) JPS59195644A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6373628A (ja) * 1986-09-17 1988-04-04 Dainippon Screen Mfg Co Ltd 洗浄乾燥処理方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5027181A (enExample) * 1973-07-14 1975-03-20
JPS55102233A (en) * 1979-01-30 1980-08-05 Matsushita Electric Ind Co Ltd Removing method of dust

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5027181A (enExample) * 1973-07-14 1975-03-20
JPS55102233A (en) * 1979-01-30 1980-08-05 Matsushita Electric Ind Co Ltd Removing method of dust

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6373628A (ja) * 1986-09-17 1988-04-04 Dainippon Screen Mfg Co Ltd 洗浄乾燥処理方法

Also Published As

Publication number Publication date
JPH045978B2 (enExample) 1992-02-04

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