JPS59189678A - 半導体装置とその製造方法 - Google Patents

半導体装置とその製造方法

Info

Publication number
JPS59189678A
JPS59189678A JP58066144A JP6614483A JPS59189678A JP S59189678 A JPS59189678 A JP S59189678A JP 58066144 A JP58066144 A JP 58066144A JP 6614483 A JP6614483 A JP 6614483A JP S59189678 A JPS59189678 A JP S59189678A
Authority
JP
Japan
Prior art keywords
wiring
film
layer
electrode
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58066144A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0526334B2 (enExample
Inventor
Hidetake Suzuki
鈴木　秀威
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58066144A priority Critical patent/JPS59189678A/ja
Publication of JPS59189678A publication Critical patent/JPS59189678A/ja
Publication of JPH0526334B2 publication Critical patent/JPH0526334B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W20/069—

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Junction Field-Effect Transistors (AREA)
JP58066144A 1983-04-13 1983-04-13 半導体装置とその製造方法 Granted JPS59189678A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58066144A JPS59189678A (ja) 1983-04-13 1983-04-13 半導体装置とその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58066144A JPS59189678A (ja) 1983-04-13 1983-04-13 半導体装置とその製造方法

Publications (2)

Publication Number Publication Date
JPS59189678A true JPS59189678A (ja) 1984-10-27
JPH0526334B2 JPH0526334B2 (enExample) 1993-04-15

Family

ID=13307368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58066144A Granted JPS59189678A (ja) 1983-04-13 1983-04-13 半導体装置とその製造方法

Country Status (1)

Country Link
JP (1) JPS59189678A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0282554A (ja) * 1988-09-19 1990-03-23 Sony Corp 半導体装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57102014A (en) * 1980-12-17 1982-06-24 Toshiba Corp Manufacture of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57102014A (en) * 1980-12-17 1982-06-24 Toshiba Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0282554A (ja) * 1988-09-19 1990-03-23 Sony Corp 半導体装置

Also Published As

Publication number Publication date
JPH0526334B2 (enExample) 1993-04-15

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