JPS5918769A - Paste for transparent conductive film formation - Google Patents

Paste for transparent conductive film formation

Info

Publication number
JPS5918769A
JPS5918769A JP12806182A JP12806182A JPS5918769A JP S5918769 A JPS5918769 A JP S5918769A JP 12806182 A JP12806182 A JP 12806182A JP 12806182 A JP12806182 A JP 12806182A JP S5918769 A JPS5918769 A JP S5918769A
Authority
JP
Japan
Prior art keywords
paste
organic
transparent conductive
film
organic dye
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12806182A
Other languages
Japanese (ja)
Other versions
JPS6346789B2 (en
Inventor
Mitsuru Kano
満 鹿野
Yoshimi Kamijo
芳省 上條
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alps Alpine Co Ltd
Original Assignee
Alps Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co Ltd filed Critical Alps Electric Co Ltd
Priority to JP12806182A priority Critical patent/JPS5918769A/en
Publication of JPS5918769A publication Critical patent/JPS5918769A/en
Publication of JPS6346789B2 publication Critical patent/JPS6346789B2/ja
Granted legal-status Critical Current

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  • Conductive Materials (AREA)

Abstract

PURPOSE:To obtain titled paste capable of forming film, on an insulated base such as of glass, of low electrical resistance and high transparency and adhesiveness, by incorporating a paste containing an organometallic compound convertible to transparent conductive metallic oxide by sintering, with a high- temperature sublimable organic dye sparingly soluble to organic solvents. CONSTITUTION:The objective paste can be obtained by incorporating a mixture comprising (A) an organometallic compound convertible to transparent conductive metallic oxide by sintering [e.g., trisacetyl acetonate indium (III)], (B) an organic solvent (e.g., terpineol), and (C) a binder (pref. a deacidified nitrocellulose) with (D) an organic dye sparingly soluble to organic solvents, with nearly all of it sublimed at <=300 deg.C, little remained at >=300 deg.C, and no residue at >=500 deg.C (e.g., butyl carbitol). USE:Semiconductor elements, liquid crystal displays, electrochromic displays, conductive films for deicing window glass, etc.

Description

【発明の詳細な説明】 本発明は、スクリーン印刷と焼成により、ガラスやセラ
ミックス等の絶縁基板上に密N性に優れた忙嬌酸化物よ
りなる透明帰屯性扱膜全所望の形状に形成するための透
明24眠性被膜形成用ペーストに関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention is a method of forming a transparent reproducible film made of a flexible oxide with excellent N-density onto an insulating substrate such as glass or ceramics into a desired shape by screen printing and firing. The present invention relates to a paste for forming a transparent 24-diameter film.

ガラス、セラミックス等の絶縁基板上に形成したIn、
Sn、Sb、Cd等の酸化物板膜は、透過率が高く良好
な導′甑性を示すことはよく知られており、半導体素子
、液晶表示装置区、エレクトロクロミック表示装置等に
使用したり、或は、窓ガラス等の氷結防市川導電膜とし
て利用されたりして、近年益々その応用範囲が拡大して
きている。この様な金属酸化物透明槽′亀性被膜の形成
方法としては、化学スプレー法、真空蒸着法、浸漬法、
スフIJ −ン印刷法等がある。
In formed on an insulating substrate such as glass or ceramics,
It is well known that oxide plate films of Sn, Sb, Cd, etc. have high transmittance and good conductivity, and are used in semiconductor devices, liquid crystal display devices, electrochromic display devices, etc. In recent years, the range of its applications has been expanding more and more, such as being used as an anti-icing Ichikawa conductive film for window glass and the like. Methods for forming such a transparent metal oxide coating include chemical spraying, vacuum evaporation, dipping, and
There is a double printing method, etc.

化学スプレー法はS比較的面積の太さな破膜を得るには
、有利であるが、微細で複雑な形状の被膜を得るには、
エツチング処理等の余分な工1’!必要とし経済的でな
い。真空蒸着法は、最近マスク蒸着法が発達し、エツチ
ング処理の必要性(l−1′なくなったが、処理がバッ
チ式であるために量産性の点で難がある。浸漬法は量産
向きの方法と1えるが、形成される被膜の特性は前者と
較べて著しく劣り、又、エツチング処理も必要で実用的
でない。一方、スクリーン印刷法は、係る問題がなく、
目的形状のものを印刷、焼成により得ることができ、エ
ラチン光処理に伴う廃液処理の必要もないという利点が
ある。しかし、従来は透明導亀性被膜形成用ペースト自
体の安定性も良くすく、スクリーン印刷時の作業性も悪
かったために特に倣細なパターン金安定に印刷で@ない
という雑魚を有していた。
The chemical spray method is advantageous for obtaining a ruptured film with a relatively large area, but it is not suitable for obtaining a film with a fine and complex shape.
Extra work such as etching 1'! not necessary and economical. The vacuum evaporation method has recently developed the mask evaporation method, eliminating the need for etching treatment (l-1'), but the process is batch-type, making it difficult to mass-produce. However, the properties of the film formed are significantly inferior to those of the former method, and etching treatment is also required, making it impractical.On the other hand, the screen printing method does not have such problems;
It has the advantage that it can be obtained in the desired shape by printing and firing, and there is no need for waste liquid treatment associated with photo-treatment of eratin. However, in the past, the stability of the paste itself for forming a transparent turtle-conducting film was not good, and the workability during screen printing was also poor, resulting in the inability to stably print particularly fine patterns on gold.

すなわち、従来この柚のペーストとしてオクチ/L/ 
rx’lインジウムC(CyHsCOt )s In)
 寺のイオン結合性の強い有機酸インジウム石ケン等の
有機金属化合物金用いていた。ところが、これ等に加水
分解し易く、又、ペーストにした場合ゲル化が早く、比
較的容易に化学変化し、ペースト自体に安定性がなく、
スクリーン印刷時の作業性を悪くする原因となっていた
。父、前記有機金属化合物を用いたペーストのバインダ
ーは、エチルセルローズを用いていたが、例えば、50
0℃で焼成した場合バインダーが完全燃焼せず、そのた
めに形成される腺の比抵抗が畠く、成膜強度の弱い膜し
か得ら本発明者等に、これ等の欠点Kl消すべく棹々研
究を重ねた結果、焼成によって金属酸化物膜を与える化
合物として、例えば、アセチルアセトン(Hacac)
の配位したトリスアセチルアセトナートインジウム(g
 (In(acac)、 ) 等の配位有機インジウム
錯体を使用したり、抵抗値?A繁用スズ化合物として、
例えば、ジメチルスズアセドープ((CHII)!5n
(acac)り等の配位有機スズ錯体を用いてペースト
の安定性を高め好結果が得られることを見出した。又、
バインダーとして使用するセルローズ化合物に、ニトロ
セルローズを用いることで、密着強度大で、低抵抗な被
膜が得られることをつきとめた。
In other words, conventionally, this yuzu paste was made using occhi/L/
rx'l Indium C (CyHsCOt)s In)
Organic acid indium soap and other organic metal compounds with strong ionic bonding properties were used. However, they are easily hydrolyzed, and when made into a paste, they gel quickly, chemically change relatively easily, and the paste itself is not stable.
This caused poor workability during screen printing. My father used to use ethyl cellulose as the binder for the paste using the organometallic compound.
When fired at 0°C, the binder does not burn completely, and as a result, the specific resistance of the glands formed increases, resulting in a film with weak film formation strength.The present inventors have made every effort to eliminate these drawbacks. As a result of repeated research, we have found that, for example, acetylacetone (Hacac) is a compound that forms a metal oxide film by firing.
trisacetylacetonatoindium (g
(In(acac), ) or other coordinated organic indium complexes or resistance value? As a frequently used tin compound,
For example, dimethyltinacedope ((CHII)!5n
It has been found that good results can be obtained by increasing the stability of the paste by using a coordinated organotin complex such as (acac). or,
We have found that by using nitrocellulose as the cellulose compound used as a binder, a film with high adhesion strength and low resistance can be obtained.

しかし、ニトロセルローズを用いた場合、エチルセルロ
ーズの場合と比較してペースト寿命が短く、スクリーン
印刷時の作業性の問題は依然として残っていた。そこで
、本発明者等は、更に脱酸処理したニトロセルローズや
、有機溶媒としてブチルカルピトール、ブチルセロソル
ブ、ベンジルアセゲート、及びジメチルフタV−)の混
合溶媒を用いることで特性改善がなされること全見出し
印刷性の向上を計ったが、1だ十分とはぎえず、特に、
0.1 mm程度の微細パターン全スクリーン印刷する
時の印刷性に問題が残っていた。係る問題全解決するた
めに本発明者等は、有機全編化合物と有機溶媒とバイン
ダーとを含むペーストに、?’+1把有機溶媒に難溶性
でかつ400℃程度の高温でほぼ完全燃焼し、アルカリ
イオンや金属成分を含まないメチル基置換のモノアゾ系
廟槻顔料を添加することで大巾に特性改善されることを
見出した。
However, when nitrocellulose was used, the paste life was shorter than when ethylcellulose was used, and problems with workability during screen printing still remained. Therefore, the present inventors have found that properties can be improved by using nitrocellulose that has been further deoxidized and a mixed solvent of butylcarpitol, butylcellosolve, benzyl acegate, and dimethylphthalate V-) as an organic solvent. I tried to improve the printability, but 1 was not enough, especially.
There remained a problem in printability when performing full screen printing of a fine pattern of about 0.1 mm. In order to solve all of these problems, the present inventors created a paste containing a whole organic compound, an organic solvent, and a binder. '+1' Characteristics can be greatly improved by adding methyl group-substituted monoazo-based Myotsuki pigments that are poorly soluble in organic solvents, burn almost completely at high temperatures of around 400°C, and do not contain alkali ions or metal components. I discovered that.

こうした有機顔料に要求される特性としては、次の悸な
諸条件全具備していることが窒ましい。すなわち、 ■ ペースト作成用に使用する有機溶媒に難溶性で、そ
の溶解度が約0.2wt%以下のもの。
As for the properties required of such organic pigments, it is desirable that they meet all of the following conditions. That is, (1) It is poorly soluble in the organic solvent used for paste preparation, and its solubility is about 0.2 wt% or less.

■ 300℃以前に重量変化が始″1v、300℃で有
愼吻としての残分が極めて少なく、500℃では残分ゼ
ロのもの。
■ The weight starts to change by 1v before 300°C, and there is very little residual content as a strong proboscis at 300°C, and there is no residual content at 500°C.

■ ペースト組成物と反応性に乏しいもの。■ Items that have poor reactivity with the paste composition.

■ アルカリイオン、菫属成分金宮1ぬもの。■ Alkaline ion, violet component Kinnomiya 1 Numono.

である。Ail記有機顔料において■、■、■の条件全
満足させることは容易で、前述の様な特性改善されるこ
とが判明したが、■の条件が完全に満足されたものでは
ないため、M機顔料未添加のペーストから形成された被
膜の特性と較べて、若干劣るものであった。
It is. It has been found that it is easy to satisfy all of the conditions (■, ■, and ■) in the Ail organic pigment, and the characteristics as described above are improved, but since the condition (■) is not completely satisfied, the M machine The characteristics were slightly inferior to those of a film formed from a paste to which no pigment was added.

゛ 本発明は、叙上の欠点を解消し、良好な被膜特性、
すなわち、低抵抗で透明度及び密着性の良好な被1+Q
が得られ、かつ従来通りのペーストの安定性、微細パタ
ーンの印刷性及び印刷作業性が良好な透明導電性被膜形
成用ベースIf提供ならしめる目的でなされた。
゛ The present invention eliminates the above-mentioned drawbacks and provides good coating properties,
In other words, the coating 1+Q has low resistance and good transparency and adhesion.
The present invention was made with the object of providing a base If for forming a transparent conductive film which has good paste stability, fine pattern printability, and printing workability as in the past.

この目的を達成させるため、本発明は、有機金属化合物
と有機溶媒とバインダーとを含むペーストに、前記有機
溶媒に難溶性で300℃以下の温度で、その大半が昇華
によって消失され、500℃での残分ゼロの、ペースト
組成物との反応性に乏しく、かつアルカリイオンや金属
成分を含まない昇華性有機染料を添加することを特徴と
している。
In order to achieve this object, the present invention provides a paste containing an organometallic compound, an organic solvent, and a binder that is sparingly soluble in the organic solvent, most of which disappears by sublimation at a temperature of 300°C or lower, and at a temperature of 500°C. It is characterized by the addition of a sublimable organic dye that has zero residue, has poor reactivity with the paste composition, and does not contain alkali ions or metal components.

即ち、温度によって消失されるプロセスが燃焼によるタ
イプの有機顔料の場合、最終的に残分ゼロの状iル全実
現することは困難で、これが被膜特性に悪影響企及はし
ていると考えられる。本発明は、このことに着目し、容
易に残分ゼロの状態の実現可能な昇華性有機染料を過敏
添加することにより、被膜特性を著しく改善したもので
ある。
That is, in the case of organic pigments where the process of disappearance due to temperature is combustion, it is difficult to achieve a final state of zero residue, and this is considered to have an adverse effect on the properties of the coating. The present invention focuses on this and significantly improves the film properties by hypersensitively adding a sublimable organic dye that can be easily produced in a state of zero residue.

前記昇華性有機染料全添加したペーストは次の様にして
作成される。即ち、焼成により余端酸化物となる有機溶
媒に可溶なIn(acac)1等の有慎インジウみ化合
物と、抵抗値調整用の(CH,)、 5n(acaC)
を等の有機スズ化合物と、有機溶媒と、ノ(インダーと
を夫々混合する。その後前記昇華性有機染料が添加され
る。尚、有機染料は、)くインダーの添ノ用以前に添加
してもよい。
The paste to which all the sublimable organic dyes are added is prepared as follows. That is, a prudent indium compound such as In(acac)1 which is soluble in an organic solvent and becomes an oxide after firing, and (CH,) and 5n(acac) for adjusting the resistance value.
An organic tin compound such as , an organic solvent, and an inder are mixed respectively.Then, the sublimable organic dye is added.The organic dye must be added before adding the inder. Good too.

有機溶媒には、例えば、ターピネオール、2−エチルヘ
キサノール、ベンジルアルコール等ノ爾沸点アルコール
類、ベンジルアセテート、カルピトールアセテート、ジ
メチルフタレート等の^沸点エステル類、ブチルセロソ
ルブ、カルピトール、ブチルカルピトール等の高沸点ア
ルコールエーテル類、等が用いられる。又、バインダー
どしては、脱酸処理したニトロセルローズが好適である
Examples of organic solvents include low-boiling point alcohols such as terpineol, 2-ethylhexanol, and benzyl alcohol, boiling point esters such as benzyl acetate, carpitol acetate, and dimethyl phthalate, and high-boiling point alcohols such as butyl cellosolve, calpitol, and butyl carpitol. Alcohol ethers, etc. are used. Further, as the binder, deoxidized nitrocellulose is suitable.

以下、実施例に基づいて更に詳しく説明する。A more detailed explanation will be given below based on examples.

実施例1゜ ペーストに添加する昇華性有機染料の種類と印刷性及び
被膜特性の関係をみるために、各昇華性有機染料の混合
有機溶媒(プチルカルビトール:プチルセロソルプ:ベ
ンジルアセテート:ジメチルフタレート=4:2:2:
2)に対する溶解性を検討した。次に、印刷性及び被膜
特性検討用のペーストを作成するために、In(aca
c)32.69wt係、(CH,、)2Sn(acac
)、  o、 31 wt%、有4幾浴媒に前記混合有
機溶媒、そしてバインダーに脱酸処理シタニトロセルロ
ーズ80秒の13.8 wt  %金柑い、これに前記
昇華性M磯染料の溶解度(wtチ)十1wt  %量添
加してペースト全作成する。一方、ステンレスネットか
らなる250メツシユのスクリーン版に0.1龍パター
ンを作成する。作成したペースil−前記スクリーン版
を用いてスクリーン印刷し、印刷性を調べ、更に150
℃で20分間、予備乾燥し、500℃で30分間焼成し
てlし成される被膜の特性音調べた。これ等溶解性、印
A1i++性及び被膜特性音まとめて次の第1表に示し
た。尚、図中の溶解度試験は室温で行ない、透明曳でa
f祝郡部98%以上ものは◎印、95〜98%のものに
は○印、90〜95%のものはΔ印、90%以下のもの
は、X印を付した。尚、比較の意味で、熱的条件の満足
されてない昇華性有機染料と、燃焼タイプのレリを夫々
前者は比較例1、後者は比較例2,3に示した。更に有
機染料等未添加の例を比較例4に示しである。
Example 1 In order to examine the relationship between the type of sublimable organic dye added to the paste and printability and film properties, a mixed organic solvent of each sublimable organic dye (butyl carbitol: butyl cellosolve: benzyl acetate: dimethyl phthalate = 4 :2:2:
2) was investigated. Next, in order to create a paste for examining printability and film characteristics, In(aca
c) 32.69wt, (CH,,)2Sn(acac
), o, 31 wt %, the above-mentioned mixed organic solvent in the bath medium, and 13.8 wt % kumquat in the deacidified cellulose 80 seconds as the binder, and the solubility of the sublimable Miso dye ( (wt) Add 11 wt % to make a complete paste. On the other hand, a 0.1 dragon pattern is created on a 250-mesh screen plate made of stainless steel net. The prepared paste il-screen printing was performed using the screen plate, the printability was examined, and further 150
The film was pre-dried at 500° C. for 20 minutes and fired at 500° C. for 30 minutes, and the characteristic sound of the resulting film was examined. The solubility, A1i++ properties, and film characteristics are summarized in Table 1 below. The solubility test in the figure was conducted at room temperature, and a
Those with 98% or more are marked with ◎, those with 95 to 98% are marked with ○, those with 90 to 95% are marked with Δ, and those with less than 90% are marked with X. For comparison purposes, a sublimable organic dye whose thermal conditions are not satisfied and a combustion type Reli are shown in Comparative Example 1 for the former, and Comparative Examples 2 and 3 for the latter. Furthermore, Comparative Example 4 shows an example in which no organic dye or the like was added.

y人下余白 この表より明らかな通り、実施例1の昇華性有機染料全
使用した時の諸物件が優れていることがわかる。その理
由として、印刷性については、該有機染料の有機溶媒に
対する溶解性が比較的低いこと、又、形成きれた破曝の
特性については、該M4伐染料が、300℃壕でにほぼ
飛散し、500℃1でに完全に残はゼロになることから
説明がつけられる。後者について更にわかり易く説明す
るために各有機染料・顔料の熱挙動を調べ、その結果を
図に示した。なお、この燃焼試験は、昇温速1!lt5
℃/分、で行なった。この図より明らかな通り、比較例
3の有機顔料ば、500℃でかなりの残渣があり、膜特
性全署しく悲くしていることが理解できる。一方、他の
3つの場合、500℃での残l互はゼロであるが、30
0℃での残渣全比較すると、実施例1く比較例2〈比較
例1の順となっている。この差は、形成される被膜特性
を左右すると考えられる。何故なら、膜形成は、300
CAiJ (+から開始されるからである。従って、表
1の結果は、図の結果より支持される。即ち、実施抄り
1の様な溶解性、熱的性′夙を41する昇華性有機染料
を添カロすることで、ペースト特性が大巾に改善される
ことが判明した。
y Bottom margin As is clear from this table, it can be seen that the properties obtained when all of the sublimable organic dye of Example 1 was used were excellent. The reason for this is that the solubility of the organic dye in organic solvents is relatively low in terms of printability, and the fact that the M4 cutting dye almost scatters in a trench at 300 degrees Celsius. This can be explained by the fact that the residue becomes completely zero at 500°C. To explain the latter more clearly, we investigated the thermal behavior of each organic dye and pigment, and the results are shown in the figure. In addition, this combustion test was conducted at a heating rate of 1! lt5
It was carried out at ℃/min. As is clear from this figure, the organic pigment of Comparative Example 3 had a considerable amount of residue at 500° C., and it can be seen that the film properties were all quite poor. On the other hand, in the other three cases, the residual l ratio at 500°C is zero, but 30
Comparing all the residues at 0°C, the order is Example 1 followed by Comparative Example 2 (Comparative Example 1). This difference is considered to influence the properties of the formed film. This is because film formation is 300
This is because CAiJ (starts from +). Therefore, the results in Table 1 are supported by the results in the figure. It was found that the paste properties were significantly improved by adding dye.

実施例2 前記実施例において去明導′屯性波膜形成用ペーストに
通用口f能な条件を満足する昇華性有機染料を選択した
が、その適正な徐加箪會決定するために前記実施例とほ
ぼ同様な組成で、実施例1の有機染料の添加量全変化さ
せたペースト7作成し、前記実施例と同様に各項目の検
討を行なった。その結果を表2に示す。
Example 2 In the above example, a sublimable organic dye was selected that satisfies the conditions for universal use in the pasting wave film forming paste. Paste 7 was prepared with almost the same composition as in Example 1, but the amount of organic dye added in Example 1 was completely changed, and each item was examined in the same manner as in the previous example. The results are shown in Table 2.

表2 この表より明らかなmv、添加@ 1.0〜10wlチ
で1愛れた印刷性、膜特性を示すことがわかる。
Table 2 From this table, it is clear that mv, addition @ 1.0 to 10 wl gives excellent printability and film properties.

本発明は、前述の抹な構成になっており、ペーストの安
定性が良く、倣細なパターンの印刷が可能で、作菓性の
良好な、しかも被膜特性の良好な透明、1Plj性破暎
形成用ペーストを提供することができる。
The present invention has the above-mentioned simple structure, has good paste stability, can print fine patterns, has good confectionery properties, is transparent with good coating properties, and is resistant to 1Plj breakage. A forming paste can be provided.

【図面の簡単な説明】[Brief explanation of the drawing]

図は本発明の実施例に係る昇華性有機染料と従来の燃焼
性有機顔料との燃焼特性を比較した燃焼特性図である。 ゲ ?で (′: 着痩(°C)
The figure is a combustion characteristic diagram comparing the combustion characteristics of a sublimable organic dye according to an example of the present invention and a conventional combustible organic pigment. Ge? (': Losing weight (°C)

Claims (1)

【特許請求の範囲】[Claims] (1)焼成によって透明導電性金属酸化物となる有機金
属化合物と有機浴媒とバインダーとを含むペーストに、
前記M機溶媒に難溶性で、かつ高温で昇華する有機染料
全添加したことを%徴とする透明4直性被膜形成用ペー
スト。 (2、特許請求の範囲第1項記載において、前記高温で
昇華する有機染料が、300℃以下で大半が飛散し、3
00℃より高い温度にあっては、残渣が略々ゼロに近く
、少なくとも、500℃では残渣がゼロであることを特
徴とする透明24眠性被膜形成用ペースト。
(1) A paste containing an organometallic compound, an organic bath medium, and a binder that becomes a transparent conductive metal oxide by firing,
A paste for forming a transparent tetragonal film, which is characterized by the total addition of an organic dye that is sparingly soluble in the M solvent and sublimes at high temperatures. (2. In claim 1, most of the organic dye that sublimes at high temperatures is scattered at temperatures below 300°C;
A paste for forming a transparent 24-diameter film, characterized in that the residue is almost zero at temperatures higher than 00°C, and the residue is zero at least at 500°C.
JP12806182A 1982-07-22 1982-07-22 Paste for transparent conductive film formation Granted JPS5918769A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12806182A JPS5918769A (en) 1982-07-22 1982-07-22 Paste for transparent conductive film formation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12806182A JPS5918769A (en) 1982-07-22 1982-07-22 Paste for transparent conductive film formation

Publications (2)

Publication Number Publication Date
JPS5918769A true JPS5918769A (en) 1984-01-31
JPS6346789B2 JPS6346789B2 (en) 1988-09-19

Family

ID=14975505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12806182A Granted JPS5918769A (en) 1982-07-22 1982-07-22 Paste for transparent conductive film formation

Country Status (1)

Country Link
JP (1) JPS5918769A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0637072A2 (en) * 1993-07-26 1995-02-01 AT&amp;T GLOBAL INFORMATION SOLUTIONS INTERNATIONAL INC. Spin-on conductor process for integrated circuits

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0637072A2 (en) * 1993-07-26 1995-02-01 AT&amp;T GLOBAL INFORMATION SOLUTIONS INTERNATIONAL INC. Spin-on conductor process for integrated circuits
EP0637072A3 (en) * 1993-07-26 1995-05-03 At & T Global Inf Solution Spin-on conductor process for integrated circuits.
US5728626A (en) * 1993-07-26 1998-03-17 At&T Global Information Solutions Company Spin-on conductor process for integrated circuits

Also Published As

Publication number Publication date
JPS6346789B2 (en) 1988-09-19

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