JPS6346789B2 - - Google Patents
Info
- Publication number
- JPS6346789B2 JPS6346789B2 JP12806182A JP12806182A JPS6346789B2 JP S6346789 B2 JPS6346789 B2 JP S6346789B2 JP 12806182 A JP12806182 A JP 12806182A JP 12806182 A JP12806182 A JP 12806182A JP S6346789 B2 JPS6346789 B2 JP S6346789B2
- Authority
- JP
- Japan
- Prior art keywords
- organic
- paste
- coordinated
- film
- properties
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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- 239000003960 organic solvent Substances 0.000 claims description 14
- 239000011230 binding agent Substances 0.000 claims description 10
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 claims description 9
- 239000000020 Nitrocellulose Substances 0.000 claims description 7
- 229920001220 nitrocellulos Polymers 0.000 claims description 7
- 229910052738 indium Inorganic materials 0.000 claims description 5
- 239000003513 alkali Substances 0.000 claims description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000000975 dye Substances 0.000 description 19
- 238000000034 method Methods 0.000 description 9
- 239000012860 organic pigment Substances 0.000 description 7
- 238000007650 screen-printing Methods 0.000 description 7
- NIQCNGHVCWTJSM-UHFFFAOYSA-N Dimethyl phthalate Chemical compound COC(=O)C1=CC=CC=C1C(=O)OC NIQCNGHVCWTJSM-UHFFFAOYSA-N 0.000 description 6
- CUJRVFIICFDLGR-UHFFFAOYSA-N acetylacetonate Chemical compound CC(=O)[CH-]C(C)=O CUJRVFIICFDLGR-UHFFFAOYSA-N 0.000 description 6
- QUKGYYKBILRGFE-UHFFFAOYSA-N benzyl acetate Chemical compound CC(=O)OCC1=CC=CC=C1 QUKGYYKBILRGFE-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 238000002485 combustion reaction Methods 0.000 description 5
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000010304 firing Methods 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 3
- 229940007550 benzyl acetate Drugs 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- FBSAITBEAPNWJG-UHFFFAOYSA-N dimethyl phthalate Natural products CC(=O)OC1=CC=CC=C1OC(C)=O FBSAITBEAPNWJG-UHFFFAOYSA-N 0.000 description 3
- 229960001826 dimethylphthalate Drugs 0.000 description 3
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 150000002902 organometallic compounds Chemical class 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 150000003606 tin compounds Chemical class 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- NMRPBPVERJPACX-UHFFFAOYSA-N (3S)-octan-3-ol Natural products CCCCCC(O)CC NMRPBPVERJPACX-UHFFFAOYSA-N 0.000 description 1
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
- YIWUKEYIRIRTPP-UHFFFAOYSA-N 2-ethylhexan-1-ol Chemical compound CCCCC(CC)CO YIWUKEYIRIRTPP-UHFFFAOYSA-N 0.000 description 1
- -1 alcohol ethers Chemical class 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- PWEVMPIIOJUPRI-UHFFFAOYSA-N dimethyltin Chemical compound C[Sn]C PWEVMPIIOJUPRI-UHFFFAOYSA-N 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 150000002472 indium compounds Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- NYGZLYXAPMMJTE-UHFFFAOYSA-M metanil yellow Chemical class [Na+].[O-]S(=O)(=O)C1=CC=CC(N=NC=2C=CC(NC=3C=CC=CC=3)=CC=2)=C1 NYGZLYXAPMMJTE-UHFFFAOYSA-M 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000344 soap Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Paints Or Removers (AREA)
- Conductive Materials (AREA)
Description
本発明は、スクリーン印刷と焼成により、ガラ
スやセラミツクス等の絶縁基板上に密着性に優れ
た金属酸化物よりなる透明導電性被膜を所望の形
状に形成するための透明導電性被膜形成用ペース
トに関するものである。
ガラス、セラミツクス等の絶縁基板上に形成し
たIn,Sn,Sb,Cd等の酸化物被膜は、透過率が
高く良好な導電性を示すことはよく知られてお
り、半導体素子、液晶表示装置、エレクトロクロ
ミツク表示装置等に使用したり、或は、窓ガラス
等の氷結防止用導電膜として利用されたりして、
近年益々その応用範囲が拡大してきている。この
様な金属酸化物透明導電性被膜の形成方法として
は、化学スプレー法、真空蒸着法、浸漬法、スク
リーン印刷法等がある。
化学スプレー法は、比較的面積の大きな被膜を
得るには、有利であるが、微細で複雑な形状の被
膜を得るには、エツチング処理等の余分な工程を
必要とし経済的でない。真空蒸着法は、最近マス
ク蒸着法が発達し、エツチング処理の必要性はな
くなつたが、処理がバツチ式であるために量産性
の点で難がある。浸漬法は量産向きの方法と言え
るが、形成される被膜の特性は前者と較べて著し
く劣り、又、エツチング処理も必要で実用的でな
い。一方、スクリーン印刷法は、係る問題がな
く、目的形状のものを印刷、焼成により得ること
ができ、エツチング処理に伴う廃液処理の必要も
ないという利点がある。しかし、従来は透明導電
性被膜形成用ペースト自体の安定性も良くなく、
スクリーン印刷時の作業性も悪かつたために特に
微細なパターンを安定に印刷できないという難点
を有していた。
すなわち、従来この種のペーストとしてオクチ
ル酸インジウム〔(C7H15CO2)3In〕等のイオン結
合性の強い有機酸インジウム石ケン等の有機金属
化合物を用いていた。ところが、これ等は加水分
解し易く、又、ペーストにした場合ゲル化が早
く、比較的容易に化学変化し、ペースト自体に安
定性がなく、スクリーン印刷時の作業性を悪くす
る原因となつていた。又、前記有機金属化合物を
用いたペーストのバインダーは、エチルセルロー
ズを用いていたが、例えば、500℃で焼成した場
合バインダーが完全燃焼せず、そのために形成さ
れる膜の比低抗が高く、被膜強度の弱い膜しか得
られなかつた。
本発明者等は、これ等の欠点を解消すべく種々
研究を重ねた結果、焼成によつて金属酸化物膜を
与える化合物として、例えば、アセチルアセトン
(Hacac)の配位したトリスアセチルアセトナー
トインジウム()〔In(acac)3〕等の配位有機イ
ンジウム錯体を使用したり、抵抗値調整用スズ化
合物として、例えば、ジメチルスズアセトープ
〔(CH3)2Sn(acac)2〕等の配位有機スズ錯体を用
いてペーストの安定性を高め好結果が得られるこ
とを見出した。又、バインダーとして使用するセ
ルローズ化合物に、ニトロセルローズを用いるこ
とで、密着強度大で、低抵抗な被膜が得られるこ
とをつきとめた。
しかし、ニトロセルローズを用いた場合、エチ
ルセルローズの場合と比較してペースト寿命が短
く、スクリーン印刷時の作業性の問題は依然とし
て残つていた。そこで、本発明者等は、更に脱酸
処理したニトロセルローズや、有機溶媒としてブ
チルカルビトール、ブチルセロソルブ、ベンジル
アセテート、及びジメチルフタレートの混合溶媒
を用いることで特性改善がなされることを見出し
印刷性の向上を計つたが、まだ十分とは言えず、
特に、0.1mm程度の微細パターンをスクリーン印
刷する時の印刷性に問題が残つていた。係る問題
を解決するために本発明者等は、有機金属化合物
と有機溶媒とバインダーとを含むペーストに、前
記有機溶媒に難溶性でかつ400℃程度の高温でほ
ぼ完全燃焼し、アルカリイオンや金属成分を含ま
ないメチル基置換のモノアゾ系有機顔料ゆ添加す
ることで大巾に特性改善されることを見出した。
こうした有機顔料に要求される特性としては、次
の様な諸条件を具備していることが望ましい。す
なわち、
ペースト作成用に使用する有機溶媒に難溶性
で、その溶解度が約0.2wt%以下のもの。
300℃以前に重量変化が始まり、300℃で有機
物としての残分が極めて少なく、500℃では残
分ゼロのもの。
ペースト組成物と反応性に乏しいもの。
アルカリイオン、金属成分を含まぬもの。
である。前記有機顔料において、,,の条
件を満足させることは容易で、前述の様な特性改
善されることが判明したが、の条件が完全に満
足されたものではないため、有機顔料未添加のペ
ーストから形成された被膜の特性と較べて、若干
劣るものであつた。
本発明は、叙上の欠点を解消し、良好な被膜特
性、すなわち、低抵抗で透明度及び密着性の良好
な被膜が得られ、かつ従来通りのペーストの安定
性、微細パターンの印刷性及び印刷作業性が良好
な透明導電性被膜形成用ペーストを提供ならしめ
る目的でなされた。
この目的を達成させるため、本発明は、アセチ
ルアセトンの配位した配位有機インジラム錯体
と、アセチルアセトンの配位した配位有機スズ錯
体と、前記配位有機インジウム錯体と配位有機ス
ズ錯体とを溶解する有機溶媒と、ニトロセルロー
ズからなるバインダーとを含むペーストに、前記
有機溶媒に難溶性で、300℃以下の温度でその大
半が昇華によつて消失され、少なくとも500℃で
は残渣がゼロであり、かつアルカリイオンや金属
成分を含まない昇華性有機染料を添加したことを
特徴としている。
即ち、温度によつて消失されるプロセスが燃焼
によるタイプの有機顔料の場合、最終的に残分ゼ
ロの状態を実現することは困難で、これが被膜特
性に悪影響を及ぼしていると考えられる。本発明
は、このことに着目し、容易に残分ゼロの状態の
実現可能な昇華性有機染料を適量添加することに
より、被膜特性を著しく改善したものである。
前記昇華性有機染料を添加したペーストは次の
様にして作成される。即ち、焼成により金属酸化
物とななる有機溶媒に可溶なIn(acac)3等の有機
インジウム化合物と、抵抗値調整用の(CH3)2Sn
(acac)2等の有機スズ化合物と、有機溶媒と、バ
インダーとを夫々混合する。その後前記昇華性有
機染料が添加される。尚、有機染料は、バインダ
ーの添加以前に添加してもよい。
有機溶媒には、例えば、ターピネオール、2―
エチルヘキサノール、ベンジルアルコール等の高
沸点アルコール類、ベンジルアセテート、カルビ
トールアセテート、ジメチルフタレート等の高沸
点エステル類、ブチルセロソルブ、カルビトー
ル、ブチルカルビトール等の高沸点アルコールエ
ーテル類、等が用いられる。又、バインダーとし
ては、脱酸処理したニトロセルローズが好適であ
る。
以下、実施例に基づいて更に詳しく説明する。
実施例 1
ペーストに添加する昇華性有機染料の種類と印
刷性及び被膜特性の関係をみるために、各昇華性
有機染料の混合有機溶媒(ブチルカルビトール:
ブチルセロソルブ:ベンジルアセテート:ジメチ
ルフタレート=4:2:2:2)に対する溶解性
を検討した。次に、印刷性及び被膜特性検討用の
ペーストを作成するために、In(acac)32.69wt%、
(CH3)2Sn(acac)20.31wt%、有機溶媒に前記混合
有機溶媒、そしてバインダーに脱酸処理したニト
ロセルローズ80秒の13.8wt%を用い、これに前記
昇華性有機染料の溶解度(wt%)+1wt%量添加
してペーストを作成する。一方、ステンレスネツ
トからなる250メツシユのスクリーン版に0.1mmパ
ターンを作成する。作成したペーストを前記スク
リーン版を用いてスクリーン印刷し、印刷性を調
べ、更に150℃で20分間、予備乾燥し、500℃で30
分間焼成して形成される被膜の特性を調べた。こ
れ等溶解性、印刷性及び被膜特性をまとめて次の
第1表に示した。尚、図中の溶解度試験は室温で
行ない、透明度で可視部98%以上のものは◎印、
95〜98%のものには〇印、90〜95%のものは△
印、90%以下のものは、×印を付した。尚、比較
の意味で、熱的条件の満足されてない昇華性有機
染料と、燃焼タイプの例を夫々前者は比較例1、
後者は比較例2,3に示した。更に有機染料等未
添加の例を比較例4に示してある。
The present invention relates to a transparent conductive film forming paste for forming a transparent conductive film made of a metal oxide with excellent adhesion into a desired shape on an insulating substrate such as glass or ceramics by screen printing and baking. It is something. It is well known that oxide films such as In, Sn, Sb, and Cd formed on insulating substrates such as glass and ceramics have high transmittance and good conductivity, and are used in semiconductor devices, liquid crystal display devices, It is used in electrochromic display devices, etc., or as a conductive film to prevent freezing on window glass, etc.
In recent years, the scope of its application has been expanding more and more. Methods for forming such a metal oxide transparent conductive film include a chemical spray method, a vacuum evaporation method, a dipping method, and a screen printing method. The chemical spray method is advantageous for obtaining a film with a relatively large area, but is not economical because it requires extra steps such as etching treatment for obtaining a film with a fine and complicated shape. In the vacuum evaporation method, the mask evaporation method has recently been developed and the need for etching has been eliminated, but since the process is performed in batches, it is difficult to mass-produce. Although the dipping method can be said to be suitable for mass production, the properties of the film formed are significantly inferior to those of the former method, and etching treatment is also required, making it impractical. On the other hand, the screen printing method has the advantage that it does not have such problems, can obtain the desired shape by printing and firing, and does not require waste liquid treatment accompanying etching treatment. However, in the past, the stability of the paste itself for forming transparent conductive films was not good;
The workability during screen printing was also poor, resulting in the disadvantage that particularly fine patterns could not be stably printed. That is, conventionally, as this type of paste, an organic metal compound such as an organic acid indium soap having strong ionic bonding properties such as indium octylate [(C 7 H 15 CO 2 ) 3 In] has been used. However, these materials are easily hydrolyzed, and when made into a paste, they gel quickly and chemically change relatively easily, and the paste itself is not stable, causing poor workability during screen printing. Ta. Furthermore, although ethyl cellulose was used as the binder for the paste using the organometallic compound, for example, the binder did not burn completely when fired at 500°C, and as a result, the film formed had a high specific resistance. Only a film with weak film strength was obtained. As a result of various studies to overcome these drawbacks, the present inventors have discovered, for example, trisacetylacetonatoindium (Hacac)-coordinated compound that forms a metal oxide film upon firing. ) [In(acac) 3 ], or as a tin compound for adjusting the resistance value, such as dimethyltin acetope [(CH 3 ) 2 Sn(acac) 2 ]. We have found that the stability of the paste can be increased using organotin complexes and good results can be obtained. We also found that by using nitrocellulose as the cellulose compound used as a binder, a film with high adhesion strength and low resistance can be obtained. However, when nitrocellulose was used, the paste life was shorter than when ethylcellulose was used, and problems with workability during screen printing still remained. Therefore, the present inventors discovered that the properties could be improved by using nitrocellulose that had been further deoxidized and a mixed solvent of butyl carbitol, butyl cellosolve, benzyl acetate, and dimethyl phthalate as an organic solvent. I tried to improve, but it still wasn't enough.
In particular, problems remained with printability when screen printing fine patterns of about 0.1 mm. In order to solve this problem, the present inventors created a paste containing an organometallic compound, an organic solvent, and a binder that is sparingly soluble in the organic solvent and burns almost completely at a high temperature of about 400°C, so that it can contain alkali ions and metals. We have found that the properties can be greatly improved by adding a methyl group-substituted monoazo organic pigment that does not contain any components.
As for the characteristics required of such organic pigments, it is desirable that the following conditions be satisfied. In other words, it is poorly soluble in the organic solvent used to make the paste, and its solubility is approximately 0.2wt% or less. The weight starts to change before 300℃, and there is very little organic residue at 300℃, and there is no residue at 500℃. Those that have poor reactivity with paste compositions. Contains no alkali ions or metal components. It is. It has been found that it is easy to satisfy the conditions , , and the above-mentioned characteristics are improved with the organic pigment, but since the conditions are not completely satisfied, a paste without organic pigment is used. The properties were slightly inferior to those of the film formed from the above. The present invention eliminates the above-mentioned drawbacks, provides a film with good film properties, that is, low resistance, good transparency and adhesion, and has the same stability of paste, printability of fine patterns, and printability as before. This was done for the purpose of providing a paste for forming a transparent conductive film with good workability. In order to achieve this object, the present invention provides a method for dissolving a coordinated organoindilam complex in which acetylacetone is coordinated, a coordinated organotin complex in which acetylacetone is coordinated, and the coordinated organoindium complex and the coordinated organotin complex. A paste containing an organic solvent and a binder made of nitrocellulose, which is sparingly soluble in the organic solvent, most of which disappears by sublimation at a temperature of 300°C or lower, and leaves no residue at least at 500°C, It is also characterized by the addition of a sublimable organic dye that does not contain alkali ions or metal components. That is, in the case of organic pigments whose process of disappearance due to temperature is combustion, it is difficult to achieve a final state of zero residue, which is thought to have a negative effect on the film properties. The present invention focuses on this and significantly improves the coating properties by adding an appropriate amount of a sublimable organic dye that can be easily produced in a state of zero residue. The paste containing the sublimable organic dye is prepared as follows. That is, an organic indium compound such as In(acac) 3 which is soluble in an organic solvent and becomes a metal oxide upon firing, and (CH 3 ) 2 Sn for resistance adjustment.
(acac) An organic tin compound such as 2 , an organic solvent, and a binder are mixed respectively. The sublimable organic dye is then added. Note that the organic dye may be added before adding the binder. Examples of organic solvents include terpineol, 2-
High boiling point alcohols such as ethylhexanol and benzyl alcohol, high boiling point esters such as benzyl acetate, carbitol acetate and dimethyl phthalate, high boiling point alcohol ethers such as butyl cellosolve, carbitol and butyl carbitol, etc. are used. Further, as the binder, deoxidized nitrocellulose is suitable. A more detailed explanation will be given below based on examples. Example 1 In order to examine the relationship between the type of sublimable organic dye added to the paste and printability and film properties, a mixed organic solvent (butyl carbitol:
The solubility in butyl cellosolve: benzyl acetate: dimethyl phthalate = 4:2:2:2) was investigated. Next, in order to create a paste for examining printability and film characteristics, In(acac) 3 2.69wt%,
(CH 3 ) 2 Sn(acac) 2 0.31 wt%, the above mixed organic solvent as the organic solvent, and 13.8 wt% of deoxidized nitrocellulose 80 seconds as the binder, and the solubility of the sublimable organic dye ( wt%) + 1wt% to create a paste. Meanwhile, a 0.1 mm pattern is created on a 250-mesh screen plate made of stainless steel net. The prepared paste was screen printed using the screen plate described above, printability was examined, and further pre-dried at 150°C for 20 minutes, and then dried at 500°C for 30 minutes.
The properties of the film formed by firing for a minute were investigated. The solubility, printability and coating properties are summarized in Table 1 below. The solubility test in the figure was conducted at room temperature, and those with transparency of 98% or more of the visible area are marked with ◎.
95-98% is marked with ○, 90-95% is △
Those with a score of 90% or less are marked with an x. For comparison, examples of a sublimable organic dye whose thermal conditions are not satisfied and a combustion type are shown in Comparative Example 1 for the former;
The latter was shown in Comparative Examples 2 and 3. Furthermore, Comparative Example 4 shows an example in which no organic dye or the like was added.
【表】
この表より明らかな通り、実施例1の昇華性有
機染料を使用した時の諸特性が優れていることが
わかる。その理由として、印刷性については、該
有機染料の有機溶媒に対する溶解性が比較的低い
こと、又、形成された被膜の特性については、該
有機染料が、300℃までにほぼ飛散し、500℃まで
に完全に残渣ゼロになることから説明がつけられ
る。後者について更にわかり易く説明するために
有機染料・顔料の熱挙動を調べ、その結果を図に
示した。なお、この燃焼試験は、昇華速度5℃/
分、で行なつた。この図より明らかな通り、比較
例3の有機顔料は、500℃でかなりの残渣があり、
膜特性を著しく悪くしていることが理解できる。
一方、他の3つの場合、500℃での残渣はゼロで
あるが、300℃での残渣を比較すると、実施例1
<比較例2<比較例1の順となつている。この差
は、形成される被膜特性を左右すると考えられ
る。何故なら、膜形成は、300℃前後から開始さ
れるからである。従つて、表1の結果は、図の結
果より支持される。即ち、実施例1の様な溶解
性、熱的性質を有する昇華性有機染料を添加する
ことで、ペースト特性が大巾に改善されることが
判明した。
実施例 2
前記実施例において透明導電性被膜形成用ペー
ストに適用可能な条件を満足する昇華性有機染料
を選択したが、その適正な添加量を決定するため
に前記実施例とほぼ同様な組成で、実施例1の有
機染料の添加量を変化させたペーストを作成し、
前記実施例と同様に各項目の検討を行なつた。そ
の結果を表2に示す。[Table] As is clear from this table, it can be seen that various properties are excellent when the sublimable organic dye of Example 1 is used. The reason for this is that the solubility of the organic dye in organic solvents is relatively low in terms of printability, and that the organic dye is almost scattered by 300℃, and the solubility of the organic dye is relatively low at 500℃. This can be explained by the fact that the residue is completely reduced to zero. To explain the latter more clearly, we investigated the thermal behavior of organic dyes and pigments, and the results are shown in the figure. In addition, this combustion test was carried out at a sublimation rate of 5℃/
I did it in minutes. As is clear from this figure, the organic pigment of Comparative Example 3 had a considerable amount of residue at 500°C.
It can be seen that the film properties are significantly deteriorated.
On the other hand, in the other three cases, the residue at 500℃ is zero, but when comparing the residue at 300℃, Example 1
The order is <Comparative Example 2<Comparative Example 1. This difference is considered to influence the properties of the formed film. This is because film formation starts at around 300°C. Therefore, the results in Table 1 are supported by the results in the figure. That is, it was found that by adding a sublimable organic dye having solubility and thermal properties as in Example 1, the paste properties were greatly improved. Example 2 In the above example, a sublimable organic dye that satisfies the conditions applicable to the paste for forming a transparent conductive film was selected, but in order to determine the appropriate amount of addition, a dye with almost the same composition as in the above example was selected. , pastes were prepared in which the amount of organic dye added in Example 1 was varied,
Each item was examined in the same manner as in the previous example. The results are shown in Table 2.
【表】【table】
【表】
この表より明らかな通り、添加量1.0〜10wt%
で優れた印刷性、膜特性を示すことがわかる。
本発明は、前述の様な構成になつており、ペー
ストの安定性が良く、微細なパターンの印刷が可
能で、作業性の良好な、しかも被膜特性の良好な
透明導電性被膜形成用ペーストを提供することが
できる。[Table] As is clear from this table, the amount added is 1.0 to 10wt%
It can be seen that the film exhibits excellent printability and film properties. The present invention has the above-mentioned configuration, and provides a paste for forming a transparent conductive film that has good paste stability, allows printing of fine patterns, has good workability, and has good film properties. can be provided.
図は本発明の実施例に係る昇華性有機染料と従
来の燃焼性有機顔料との燃焼特性を比較した燃焼
特性図である。
The figure is a combustion characteristic diagram comparing the combustion characteristics of a sublimable organic dye according to an example of the present invention and a conventional combustible organic pigment.
Claims (1)
ウム錯体と、アセチルアセトンの配位した配位有
機スズ錯体と、前記配位有機インジウム錯体と配
位有機スズ錯体とを溶解する有機溶媒と、ニトロ
セルローズからなるバインダーとを含むペースト
に、前記有機溶媒に難溶性で、300℃以下の温度
でその大半が昇華によつて消失され、少なくとも
500℃では残渣がゼロであり、かつアルカリイオ
ンや金属成分を含まない昇華性有機染料を添加し
たことを特徴とする透明導電性被膜形成用ペース
ト。1. A coordinated organic indium complex in which acetylacetone is coordinated, a coordinated organotin complex in which acetylacetone is coordinated, an organic solvent that dissolves the coordinated organic indium complex and the coordinated organotin complex, and a binder made of nitrocellulose. A paste containing
A transparent conductive film-forming paste characterized by having no residue at 500°C and containing a sublimable organic dye that does not contain alkali ions or metal components.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12806182A JPS5918769A (en) | 1982-07-22 | 1982-07-22 | Paste for transparent conductive film formation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12806182A JPS5918769A (en) | 1982-07-22 | 1982-07-22 | Paste for transparent conductive film formation |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5918769A JPS5918769A (en) | 1984-01-31 |
JPS6346789B2 true JPS6346789B2 (en) | 1988-09-19 |
Family
ID=14975505
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12806182A Granted JPS5918769A (en) | 1982-07-22 | 1982-07-22 | Paste for transparent conductive film formation |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5918769A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3724592B2 (en) * | 1993-07-26 | 2005-12-07 | ハイニックス セミコンダクター アメリカ インコーポレイテッド | Method for planarizing a semiconductor substrate |
-
1982
- 1982-07-22 JP JP12806182A patent/JPS5918769A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5918769A (en) | 1984-01-31 |
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