JPS5918673Y2 - 半導体装置用熱処理炉 - Google Patents

半導体装置用熱処理炉

Info

Publication number
JPS5918673Y2
JPS5918673Y2 JP1977083000U JP8300077U JPS5918673Y2 JP S5918673 Y2 JPS5918673 Y2 JP S5918673Y2 JP 1977083000 U JP1977083000 U JP 1977083000U JP 8300077 U JP8300077 U JP 8300077U JP S5918673 Y2 JPS5918673 Y2 JP S5918673Y2
Authority
JP
Japan
Prior art keywords
core tube
heat treatment
semiconductor devices
furnace
treatment furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977083000U
Other languages
English (en)
Japanese (ja)
Other versions
JPS549666U (enrdf_load_stackoverflow
Inventor
五郎 池上
Original Assignee
日本電気ホームエレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気ホームエレクトロニクス株式会社 filed Critical 日本電気ホームエレクトロニクス株式会社
Priority to JP1977083000U priority Critical patent/JPS5918673Y2/ja
Publication of JPS549666U publication Critical patent/JPS549666U/ja
Application granted granted Critical
Publication of JPS5918673Y2 publication Critical patent/JPS5918673Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP1977083000U 1977-06-23 1977-06-23 半導体装置用熱処理炉 Expired JPS5918673Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977083000U JPS5918673Y2 (ja) 1977-06-23 1977-06-23 半導体装置用熱処理炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977083000U JPS5918673Y2 (ja) 1977-06-23 1977-06-23 半導体装置用熱処理炉

Publications (2)

Publication Number Publication Date
JPS549666U JPS549666U (enrdf_load_stackoverflow) 1979-01-22
JPS5918673Y2 true JPS5918673Y2 (ja) 1984-05-30

Family

ID=29004377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977083000U Expired JPS5918673Y2 (ja) 1977-06-23 1977-06-23 半導体装置用熱処理炉

Country Status (1)

Country Link
JP (1) JPS5918673Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5824436Y2 (ja) * 1978-08-24 1983-05-25 九州日本電気株式会社 半導体基板熱処理用ボ−ト

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50159252A (enrdf_load_stackoverflow) * 1974-06-12 1975-12-23

Also Published As

Publication number Publication date
JPS549666U (enrdf_load_stackoverflow) 1979-01-22

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