JPS5918627A - Semiconductor porcelain condenser - Google Patents

Semiconductor porcelain condenser

Info

Publication number
JPS5918627A
JPS5918627A JP12878282A JP12878282A JPS5918627A JP S5918627 A JPS5918627 A JP S5918627A JP 12878282 A JP12878282 A JP 12878282A JP 12878282 A JP12878282 A JP 12878282A JP S5918627 A JPS5918627 A JP S5918627A
Authority
JP
Japan
Prior art keywords
electrode
semiconductor
dielectric layer
nickel
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12878282A
Other languages
Japanese (ja)
Inventor
六丸 治親
藤村 正紀
多木 宏光
佐藤 紀哉
嘉浩 松尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12878282A priority Critical patent/JPS5918627A/en
Publication of JPS5918627A publication Critical patent/JPS5918627A/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 本発明は半導体磁器コンデンサにかかり、磁器利料を用
いて電解コンデンサに匹敵し得る静電容量のコンデンサ
を提供することを目的とする。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a semiconductor porcelain capacitor, and an object of the present invention is to provide a capacitor using a porcelain material and having a capacitance comparable to that of an electrolytic capacitor.

磁器コンデンサには大別して一般磁器コンデンサと半導
体磁器コンデンサとがあり、形状で分類すると円板形、
角板形および円筒形がある。容量においては円板形半導
体コンデンサがもつとも大きく0.2〜0.3μF程度
である。
Ceramic capacitors can be roughly divided into general ceramic capacitors and semiconductor ceramic capacitors, and when classified by shape, they are disc-shaped,
Available in square plate shape and cylindrical shape. In terms of capacitance, disk-shaped semiconductor capacitors have a large capacitance of about 0.2 to 0.3 μF.

周知のように表面再酸化形半導体磁器コンデンサにおい
ては、素子内部が半導体で表面が誘電体層であシ、この
誘電体層の厚みを薄くするほど容量が大きくなる。通常
の厚みは1〜30μm程度である。
As is well known, in a surface reoxidation type semiconductor ceramic capacitor, the inside of the element is a semiconductor and the surface is a dielectric layer, and the thinner the dielectric layer, the greater the capacitance. The normal thickness is about 1 to 30 μm.

本発明はこの表面再酸化形構造を有効に利用し、かつコ
ンデンサとしてはまったく新しいハニカム形とすること
により、大容量の磁器コンデンサを実現したものである
。このハニカム形磁器素子はその表面の大半が誘電体層
で覆われている半導体磁器材料で構成されておシ、誘電
体層部分にニッケルメッキ電極または銀電極が、また一
方の対向電極としては半導体部分にニッケルメッキ電極
を設けている。
The present invention realizes a large-capacity ceramic capacitor by effectively utilizing this surface reoxidation type structure and creating a completely new honeycomb shape capacitor. This honeycomb-shaped porcelain element is composed of a semiconductor porcelain material whose surface is mostly covered with a dielectric layer, and a nickel-plated electrode or a silver electrode is placed on the dielectric layer, and one counter electrode is made of semiconductor material. A nickel-plated electrode is provided on the part.

容量に寄与する部分は誘電体層の電極下部分であシ、ハ
ニカム素子の半導体部分の役割は誘電体層」二の電極の
対向電極と補強材である。
The part that contributes to the capacitance is the part of the dielectric layer below the electrode, and the semiconductor part of the honeycomb element serves as a counter electrode and reinforcing material for the second electrode of the dielectric layer.

それゆえ、本発明のコンデンサにおいては、ハニカム構
造であるだめ電極面積が非常に大であり、表面再酸化形
半導体利料を用いるため誘電率がきわめて大きく、かつ
誘電体層の厚みが非常に薄いことなどにより、超大容量
が得られるのである。
Therefore, in the capacitor of the present invention, the area of the honeycomb-structured reservoir electrode is extremely large, the dielectric constant is extremely large because the surface reoxidized semiconductor material is used, and the thickness of the dielectric layer is extremely thin. This makes it possible to obtain an extremely large capacity.

このハニカムコンデンサで重要なポイントとなる電極に
ついて以下に述べる。
The electrodes, which are important points in this honeycomb capacitor, will be described below.

半導体部分の電極はN形半導体に適したオーミック性電
極でなければならず、オーミック性銀電極、二ソケ/I
/電極、その他の電極を検討したが、ニッケ)V電極が
特性的にも実用的にも最適であった。一方、誘電体層上
の電極については通常の銀電極あるいはニッケル電極な
どでもよいことがわかった。
The electrodes of the semiconductor part must be ohmic electrodes suitable for N-type semiconductors, ohmic silver electrodes, two sockets/I
/ electrode, and other electrodes were considered, but the nickel (nickel) V electrode was the most suitable in terms of characteristics and practicality. On the other hand, it has been found that the electrodes on the dielectric layer may be ordinary silver electrodes or nickel electrodes.

次に実施例をあげて説明する。Next, an example will be given and explained.

実施例1 出発材料を0.91 Ba Tl 03 + 0.09
 Nd匈Ti Os + O,oo3Mn 02 (モ
/L/)  の組成比で配合し、通常の窯業的な製法に
従って仮焼成し、粉砕して得られた粉体をハニカム成形
し、それを空気中において1300℃で2時間−次焼成
してから、N2−5%雰囲気中において1000℃で2
時間二次焼成し、さらに空気中において1000℃で1
時間三次焼成した。得られた素子の構造は外形10助×
10wL×10勤の角柱で、番孔は1.6顛×1.6助
の正方形をなし、孔と孔との肉厚は0.4節である。こ
の素子のいずれか一方の孔のある面を研摩して半導体部
分を露出させ、ここにニッケルメッキ電(jを形成した
。一方、比較のために、オーミック銀電極を施した試料
も作製した。そして、誘電体層上には前述した二連シの
どちらの素子にも銀電極を形成した。
Example 1 Starting material: 0.91 Ba Tl 03 + 0.09
Nd匈TiOs+O,oo3Mn02 (Mo/L/) was mixed in the composition ratio, pre-fired according to the usual ceramic manufacturing method, and the powder obtained by pulverization was formed into a honeycomb. After calcination at 1300°C for 2 hours at
Secondary firing for 1 hour and then 1 hour at 1000℃ in air.
Tertiary firing for an hour. The structure of the obtained device has an external size of 10 ×
It is a square column of 10wL x 10mm, and the hole is a square of 1.6mm x 1.6mm, and the wall thickness between the holes is 0.4 knots. One side of this device with holes was polished to expose the semiconductor portion, and a nickel plated electrode (j) was formed there.For comparison, a sample with an ohmic silver electrode was also prepared. Then, silver electrodes were formed on the dielectric layer in both of the above-mentioned two series elements.

第1図は上述のようにして作製されたコンデンサの斜視
図であシ、第2図はその要部破断斜視図である。図にお
いて、1はハニカム形磁器素子の半導体部分であシ、そ
の表面のほとんどには再酸化による誘電体層2が形成さ
れている。3はニッケルメッキ電極で、ハニカム形磁器
素子の一方の開[1而側を研摩して、その表面に形成し
たものである。4は銀電極で、誘電体層2上に形成され
ている。なお、比較用の素子では、上記ニッケルメッキ
電極3に代えて銀電極とした。
FIG. 1 is a perspective view of the capacitor manufactured as described above, and FIG. 2 is a cutaway perspective view of the main parts thereof. In the figure, 1 is a semiconductor portion of a honeycomb-shaped ceramic element, and a dielectric layer 2 is formed on most of its surface by reoxidation. 3 is a nickel-plated electrode, which is formed on the surface of a honeycomb-shaped ceramic element by polishing one open side thereof. A silver electrode 4 is formed on the dielectric layer 2. In addition, in the comparative element, the nickel plated electrode 3 was replaced with a silver electrode.

この両者の素子の特性および寿命試験結果を第1表に対
比して示す。寿命試験は温度60℃、相対温度96チ、
印加電圧60v(直流)連続印加する耐湿負荷試験で行
なった。
The characteristics and life test results of these two elements are shown in Table 1 in comparison. The life test was carried out at a temperature of 60℃, a relative temperature of 96℃,
A humidity resistance load test was conducted in which an applied voltage of 60 V (DC) was continuously applied.

第1表 実施例2 実施例1と同じ手順で得られたハニカム形素子の半導体
部分にニッケルメッキを施した試料と、さらにこのニッ
ケルメッキした」二に非オ〜ミック銀電極を施しだ試料
を二種類作製し、すれそれの特性を測定した。その結果
を第2表に示す。
Table 1 Example 2 A sample in which the semiconductor portion of a honeycomb element obtained by the same procedure as in Example 1 was nickel-plated, and a sample in which a non-ohmic silver electrode was further applied to the nickel-plated layer. Two types were made and their characteristics were measured. The results are shown in Table 2.

第1表かられかるようにニッケルメッキ電極を半導体部
分上に有する素子は、銀電極素子に比べて容量が大きい
。これはニッケルメッキ電極が良好なオーミック性電極
であるのに対して、銀が完全なオーミック性電極に非常
になりにくいことを示している。そして、寿命試験では
ニッケルメッキ電極素子はほとんど特性が変化しないの
に対して、銀電極素子はその劣化が著しい。これは素体
と銀電極との界面が酸化されていくだめではないかと考
えられる。
As can be seen from Table 1, the element having the nickel plated electrode on the semiconductor portion has a larger capacity than the silver electrode element. This shows that the nickel plated electrode is a good ohmic electrode, whereas silver is very difficult to become a completely ohmic electrode. In a life test, the properties of the nickel-plated electrode element hardly change, whereas the properties of the silver electrode element deteriorate significantly. This is thought to be due to oxidation of the interface between the element body and the silver electrode.

そして、第2表かられかるように、ニッケルメッキ電極
の上に銀電極を伺与しても総合的に特性を判断すると大
差ない。
As can be seen from Table 2, even if a silver electrode is placed on top of a nickel plated electrode, there is no significant difference in overall characteristics.

以上のように本発明のコンデンサは、大容量でかつ特性
的に安定しているものであり、また量産性が高く、同容
量の現用素子に比べて安価であるという特長を有してい
る。なお、ハニカム素子の外形状あるいは孔の形状など
については、用途などに応じて任意に決めることができ
るものである。
As described above, the capacitor of the present invention has a large capacity and stable characteristics, is highly mass-producible, and is less expensive than currently used elements of the same capacity. Note that the outer shape of the honeycomb element, the shape of the holes, etc. can be arbitrarily determined depending on the application and the like.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の半導体磁器コンデンサの斜
視図、第2図はその要部破断斜視図である。 1・・・・・・半導体部分、2・・・・・・誘電体層、
3,4・・・・・・電極。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
図 第2図
FIG. 1 is a perspective view of a semiconductor ceramic capacitor according to an embodiment of the present invention, and FIG. 2 is a cutaway perspective view of the main parts thereof. 1... Semiconductor portion, 2... Dielectric layer,
3, 4... Electrode. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2

Claims (1)

【特許請求の範囲】[Claims] 表面に誘電体層を有する表面再酸化形半導体磁器ハニカ
ム素子の半導体部分に一方の電極が、まだ、前記誘電体
層上に他方の電極がそれぞれ設けられており、かつ、前
記一方の電極がニッケル電極であることを特徴とする半
導体磁器コンデンサ。
One electrode is provided on the semiconductor portion of the surface reoxidized semiconductor ceramic honeycomb element having a dielectric layer on the surface, and the other electrode is provided on the dielectric layer, and the one electrode is made of nickel. A semiconductor ceramic capacitor characterized by being an electrode.
JP12878282A 1982-07-22 1982-07-22 Semiconductor porcelain condenser Pending JPS5918627A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12878282A JPS5918627A (en) 1982-07-22 1982-07-22 Semiconductor porcelain condenser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12878282A JPS5918627A (en) 1982-07-22 1982-07-22 Semiconductor porcelain condenser

Publications (1)

Publication Number Publication Date
JPS5918627A true JPS5918627A (en) 1984-01-31

Family

ID=14993321

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12878282A Pending JPS5918627A (en) 1982-07-22 1982-07-22 Semiconductor porcelain condenser

Country Status (1)

Country Link
JP (1) JPS5918627A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008166715A (en) * 2006-12-04 2008-07-17 Ngk Insulators Ltd Honeycomb type piezoelectric/electrostrictive element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008166715A (en) * 2006-12-04 2008-07-17 Ngk Insulators Ltd Honeycomb type piezoelectric/electrostrictive element

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