JPS59167059A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS59167059A
JPS59167059A JP58040900A JP4090083A JPS59167059A JP S59167059 A JPS59167059 A JP S59167059A JP 58040900 A JP58040900 A JP 58040900A JP 4090083 A JP4090083 A JP 4090083A JP S59167059 A JPS59167059 A JP S59167059A
Authority
JP
Japan
Prior art keywords
film
type
region
wiring layer
adhered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58040900A
Other languages
English (en)
Japanese (ja)
Other versions
JPH056342B2 (enrdf_load_stackoverflow
Inventor
Takahiro Tsuchitani
槌谷　孝裕
Kiyoshi Watabe
渡部　潔
Toshio Kurahashi
倉橋　敏男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58040900A priority Critical patent/JPS59167059A/ja
Publication of JPS59167059A publication Critical patent/JPS59167059A/ja
Publication of JPH056342B2 publication Critical patent/JPH056342B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/62—Electrodes ohmically coupled to a semiconductor

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP58040900A 1983-03-11 1983-03-11 半導体装置の製造方法 Granted JPS59167059A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58040900A JPS59167059A (ja) 1983-03-11 1983-03-11 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58040900A JPS59167059A (ja) 1983-03-11 1983-03-11 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59167059A true JPS59167059A (ja) 1984-09-20
JPH056342B2 JPH056342B2 (enrdf_load_stackoverflow) 1993-01-26

Family

ID=12593384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58040900A Granted JPS59167059A (ja) 1983-03-11 1983-03-11 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59167059A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61256654A (ja) * 1985-05-09 1986-11-14 Nec Corp 多層配線の形成方法
US4920071A (en) * 1985-03-15 1990-04-24 Fairchild Camera And Instrument Corporation High temperature interconnect system for an integrated circuit
US5535843A (en) * 1993-12-20 1996-07-16 Nippondenso Co., Ltd. Traveling carriage

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57133683A (en) * 1981-02-12 1982-08-18 Nec Corp Semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57133683A (en) * 1981-02-12 1982-08-18 Nec Corp Semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4920071A (en) * 1985-03-15 1990-04-24 Fairchild Camera And Instrument Corporation High temperature interconnect system for an integrated circuit
US5414301A (en) * 1985-03-15 1995-05-09 National Semiconductor Corporation High temperature interconnect system for an integrated circuit
JPS61256654A (ja) * 1985-05-09 1986-11-14 Nec Corp 多層配線の形成方法
US5535843A (en) * 1993-12-20 1996-07-16 Nippondenso Co., Ltd. Traveling carriage

Also Published As

Publication number Publication date
JPH056342B2 (enrdf_load_stackoverflow) 1993-01-26

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