JPS59163810A - 垂直磁気記録体並びにその製造法 - Google Patents
垂直磁気記録体並びにその製造法Info
- Publication number
- JPS59163810A JPS59163810A JP3665283A JP3665283A JPS59163810A JP S59163810 A JPS59163810 A JP S59163810A JP 3665283 A JP3665283 A JP 3665283A JP 3665283 A JP3665283 A JP 3665283A JP S59163810 A JPS59163810 A JP S59163810A
- Authority
- JP
- Japan
- Prior art keywords
- film
- composition
- magnetic recording
- substrate
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 239000010408 film Substances 0.000 claims abstract description 48
- 239000000203 mixture Substances 0.000 claims abstract description 22
- 239000010409 thin film Substances 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims description 22
- 230000005415 magnetization Effects 0.000 claims description 20
- 238000001816 cooling Methods 0.000 abstract description 6
- 229910000889 permalloy Inorganic materials 0.000 abstract description 2
- 229910018553 Ni—O Inorganic materials 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000005566 electron beam evaporation Methods 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 description 9
- 230000008020 evaporation Effects 0.000 description 9
- 239000007789 gas Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/85—Coating a support with a magnetic layer by vapour deposition
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3665283A JPS59163810A (ja) | 1983-03-08 | 1983-03-08 | 垂直磁気記録体並びにその製造法 |
| DE8484301530T DE3465647D1 (en) | 1983-03-08 | 1984-03-08 | A magnetic recording member and a manufacturing method for such a member |
| EP84301530A EP0122030B1 (en) | 1983-03-08 | 1984-03-08 | A magnetic recording member and a manufacturing method for such a member |
| US07/412,535 US5024854A (en) | 1983-03-08 | 1989-09-22 | Method of manufacturing perpendicular type magnetic recording member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3665283A JPS59163810A (ja) | 1983-03-08 | 1983-03-08 | 垂直磁気記録体並びにその製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59163810A true JPS59163810A (ja) | 1984-09-14 |
| JPH0311531B2 JPH0311531B2 (enrdf_load_stackoverflow) | 1991-02-18 |
Family
ID=12475782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3665283A Granted JPS59163810A (ja) | 1983-03-08 | 1983-03-08 | 垂直磁気記録体並びにその製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59163810A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59198707A (ja) * | 1983-04-26 | 1984-11-10 | Ulvac Corp | 垂直磁気記録体 |
| JPS6180521A (ja) * | 1984-09-27 | 1986-04-24 | Ulvac Corp | 垂直磁気記録体 |
| JPS6199924A (ja) * | 1984-10-19 | 1986-05-19 | Matsushita Electric Ind Co Ltd | 磁気記録媒体 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5615014A (en) * | 1979-07-18 | 1981-02-13 | Matsushita Electric Ind Co Ltd | Metallic thin film type magnetic recording medium |
-
1983
- 1983-03-08 JP JP3665283A patent/JPS59163810A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5615014A (en) * | 1979-07-18 | 1981-02-13 | Matsushita Electric Ind Co Ltd | Metallic thin film type magnetic recording medium |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59198707A (ja) * | 1983-04-26 | 1984-11-10 | Ulvac Corp | 垂直磁気記録体 |
| JPS6180521A (ja) * | 1984-09-27 | 1986-04-24 | Ulvac Corp | 垂直磁気記録体 |
| JPS6199924A (ja) * | 1984-10-19 | 1986-05-19 | Matsushita Electric Ind Co Ltd | 磁気記録媒体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0311531B2 (enrdf_load_stackoverflow) | 1991-02-18 |
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