JPS59163517A - 光学式スケ−ル読取装置 - Google Patents

光学式スケ−ル読取装置

Info

Publication number
JPS59163517A
JPS59163517A JP3863983A JP3863983A JPS59163517A JP S59163517 A JPS59163517 A JP S59163517A JP 3863983 A JP3863983 A JP 3863983A JP 3863983 A JP3863983 A JP 3863983A JP S59163517 A JPS59163517 A JP S59163517A
Authority
JP
Japan
Prior art keywords
light
scale
half mirror
angle
incident
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3863983A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0358043B2 (en, 2012
Inventor
Koji Akiyama
浩二 秋山
Hideto Iwaoka
秀人 岩岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP3863983A priority Critical patent/JPS59163517A/ja
Publication of JPS59163517A publication Critical patent/JPS59163517A/ja
Publication of JPH0358043B2 publication Critical patent/JPH0358043B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP3863983A 1983-03-09 1983-03-09 光学式スケ−ル読取装置 Granted JPS59163517A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3863983A JPS59163517A (ja) 1983-03-09 1983-03-09 光学式スケ−ル読取装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3863983A JPS59163517A (ja) 1983-03-09 1983-03-09 光学式スケ−ル読取装置

Publications (2)

Publication Number Publication Date
JPS59163517A true JPS59163517A (ja) 1984-09-14
JPH0358043B2 JPH0358043B2 (en, 2012) 1991-09-04

Family

ID=12530807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3863983A Granted JPS59163517A (ja) 1983-03-09 1983-03-09 光学式スケ−ル読取装置

Country Status (1)

Country Link
JP (1) JPS59163517A (en, 2012)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63309817A (ja) * 1987-06-12 1988-12-16 Tokyo Seimitsu Co Ltd リニアエンコ−ダ
JPS63309815A (ja) * 1987-06-12 1988-12-16 Tokyo Seimitsu Co Ltd 光学干渉装置
JPH01295116A (ja) * 1987-12-24 1989-11-28 Tokyo Seimitsu Co Ltd リニアエンコーダにおける反射光量変動の補正方法
JPH02147816A (ja) * 1988-11-29 1990-06-06 Tokyo Seimitsu Co Ltd スケール読取装置
JPH07167679A (ja) * 1994-07-08 1995-07-04 Canon Inc エンコーダー
JP2007292735A (ja) * 2006-03-21 2007-11-08 Asml Netherlands Bv 変位測定システム、リソグラフィ装置およびデバイス製造方法
JP2013145863A (ja) * 2011-11-29 2013-07-25 Gigaphoton Inc ２光束干渉装置および２光束干渉露光システム

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101137666B1 (ko) * 2010-12-28 2012-04-20 주식회사 동양기술개발 액상 혼합물에 있는 고형분 농도 검출장치.

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63309817A (ja) * 1987-06-12 1988-12-16 Tokyo Seimitsu Co Ltd リニアエンコ−ダ
JPS63309815A (ja) * 1987-06-12 1988-12-16 Tokyo Seimitsu Co Ltd 光学干渉装置
JPH01295116A (ja) * 1987-12-24 1989-11-28 Tokyo Seimitsu Co Ltd リニアエンコーダにおける反射光量変動の補正方法
JPH02147816A (ja) * 1988-11-29 1990-06-06 Tokyo Seimitsu Co Ltd スケール読取装置
JPH07167679A (ja) * 1994-07-08 1995-07-04 Canon Inc エンコーダー
JP2007292735A (ja) * 2006-03-21 2007-11-08 Asml Netherlands Bv 変位測定システム、リソグラフィ装置およびデバイス製造方法
US8390820B2 (en) 2006-03-21 2013-03-05 Asml Netherlands B.V. Displacement measurement system having a prism, for displacement measurement between two or more gratings
JP2013145863A (ja) * 2011-11-29 2013-07-25 Gigaphoton Inc ２光束干渉装置および２光束干渉露光システム

Also Published As

Publication number Publication date
JPH0358043B2 (en, 2012) 1991-09-04

Similar Documents

Publication Publication Date Title
BE1007876A4 (nl) Stralingsbron-eenheid voor het opwekken van een bundel met twee polarisatierichtingen en twee frequenties.
US4970388A (en) Encoder with diffraction grating and multiply diffracted light
JP2603305B2 (ja) 変位測定装置
JPH073344B2 (ja) エンコ−ダ−
JP2629948B2 (ja) エンコーダー
JPH052932B2 (en, 2012)
US5122660A (en) Distance measuring system utilizing an object with at least one inclined surface
JP4365927B2 (ja) 干渉計測装置及び格子干渉式エンコーダ
JPH01284715A (ja) エンコーダー
US5194744A (en) Compact reticle/wafer alignment system
JPS59163517A (ja) 光学式スケ−ル読取装置
JPS63277926A (ja) 測長装置
JPH046884B2 (en, 2012)
JP2001336952A (ja) 測定装置
JPH02206745A (ja) 屈折率測定用高安定性干渉計
JP3038860B2 (ja) エンコーダ
JPH0416177Y2 (en, 2012)
JPS63277924A (ja) 変位測定装置
JPS5938521B2 (ja) 微小変位測定および位置合わせ装置
JPS6213603B2 (en, 2012)
JPH05126603A (ja) 格子干渉測定装置
JPH0799325B2 (ja) 微小変位測定方法および微小変位測定装置
JPH0620969Y2 (ja) 格子干渉型変位検出装置
JPH0428014Y2 (en, 2012)
JP3392898B2 (ja) 格子干渉型変位測定装置