JPS59161079A - 光電変換素子の製造法 - Google Patents

光電変換素子の製造法

Info

Publication number
JPS59161079A
JPS59161079A JP58034407A JP3440783A JPS59161079A JP S59161079 A JPS59161079 A JP S59161079A JP 58034407 A JP58034407 A JP 58034407A JP 3440783 A JP3440783 A JP 3440783A JP S59161079 A JPS59161079 A JP S59161079A
Authority
JP
Japan
Prior art keywords
type
amorphous silicon
photoelectric conversion
conversion element
silicon layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58034407A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0563950B2 (enrdf_load_stackoverflow
Inventor
Nobuhiro Fukuda
福田　信弘
Kenji Miyaji
宮地　賢司
Yoji Kawahara
河原　洋二
Hidemi Takenouchi
竹之内　秀実
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP58034407A priority Critical patent/JPS59161079A/ja
Publication of JPS59161079A publication Critical patent/JPS59161079A/ja
Publication of JPH0563950B2 publication Critical patent/JPH0563950B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
    • H10F71/103—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Photovoltaic Devices (AREA)
JP58034407A 1983-03-04 1983-03-04 光電変換素子の製造法 Granted JPS59161079A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58034407A JPS59161079A (ja) 1983-03-04 1983-03-04 光電変換素子の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58034407A JPS59161079A (ja) 1983-03-04 1983-03-04 光電変換素子の製造法

Publications (2)

Publication Number Publication Date
JPS59161079A true JPS59161079A (ja) 1984-09-11
JPH0563950B2 JPH0563950B2 (enrdf_load_stackoverflow) 1993-09-13

Family

ID=12413331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58034407A Granted JPS59161079A (ja) 1983-03-04 1983-03-04 光電変換素子の製造法

Country Status (1)

Country Link
JP (1) JPS59161079A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6132581A (ja) * 1984-07-25 1986-02-15 Agency Of Ind Science & Technol 非晶質太陽電池の製法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6132581A (ja) * 1984-07-25 1986-02-15 Agency Of Ind Science & Technol 非晶質太陽電池の製法

Also Published As

Publication number Publication date
JPH0563950B2 (enrdf_load_stackoverflow) 1993-09-13

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