JPS59155734U - 位置合わせマ−ク - Google Patents

位置合わせマ−ク

Info

Publication number
JPS59155734U
JPS59155734U JP2124283U JP2124283U JPS59155734U JP S59155734 U JPS59155734 U JP S59155734U JP 2124283 U JP2124283 U JP 2124283U JP 2124283 U JP2124283 U JP 2124283U JP S59155734 U JPS59155734 U JP S59155734U
Authority
JP
Japan
Prior art keywords
alignment mark
alignment
abstract
semiconductor wafer
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2124283U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6334266Y2 (enrdf_load_html_response
Inventor
仁 星野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2124283U priority Critical patent/JPS59155734U/ja
Publication of JPS59155734U publication Critical patent/JPS59155734U/ja
Application granted granted Critical
Publication of JPS6334266Y2 publication Critical patent/JPS6334266Y2/ja
Granted legal-status Critical Current

Links

JP2124283U 1983-02-15 1983-02-15 位置合わせマ−ク Granted JPS59155734U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2124283U JPS59155734U (ja) 1983-02-15 1983-02-15 位置合わせマ−ク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2124283U JPS59155734U (ja) 1983-02-15 1983-02-15 位置合わせマ−ク

Publications (2)

Publication Number Publication Date
JPS59155734U true JPS59155734U (ja) 1984-10-19
JPS6334266Y2 JPS6334266Y2 (enrdf_load_html_response) 1988-09-12

Family

ID=30152369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2124283U Granted JPS59155734U (ja) 1983-02-15 1983-02-15 位置合わせマ−ク

Country Status (1)

Country Link
JP (1) JPS59155734U (enrdf_load_html_response)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7059188B2 (en) 1993-03-30 2006-06-13 Kazuhiro Okada Angular velocity sensor
US7360455B2 (en) 1990-10-12 2008-04-22 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US7533582B2 (en) 1990-10-12 2009-05-19 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7360455B2 (en) 1990-10-12 2008-04-22 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US7533582B2 (en) 1990-10-12 2009-05-19 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US7059188B2 (en) 1993-03-30 2006-06-13 Kazuhiro Okada Angular velocity sensor
US7363814B2 (en) 1993-03-30 2008-04-29 Kazuhiro Okada Multi-axial angular velocity sensor

Also Published As

Publication number Publication date
JPS6334266Y2 (enrdf_load_html_response) 1988-09-12

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