JPS59154309A - 面形状測定用干渉計 - Google Patents

面形状測定用干渉計

Info

Publication number
JPS59154309A
JPS59154309A JP2859783A JP2859783A JPS59154309A JP S59154309 A JPS59154309 A JP S59154309A JP 2859783 A JP2859783 A JP 2859783A JP 2859783 A JP2859783 A JP 2859783A JP S59154309 A JPS59154309 A JP S59154309A
Authority
JP
Japan
Prior art keywords
light
interferometer
optical
reflected
polarized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2859783A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0549922B2 (enrdf_load_stackoverflow
Inventor
Hiroyuki Kurita
裕之 栗田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Olympus Optical Co Ltd filed Critical Olympus Corp
Priority to JP2859783A priority Critical patent/JPS59154309A/ja
Publication of JPS59154309A publication Critical patent/JPS59154309A/ja
Publication of JPH0549922B2 publication Critical patent/JPH0549922B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2859783A 1983-02-24 1983-02-24 面形状測定用干渉計 Granted JPS59154309A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2859783A JPS59154309A (ja) 1983-02-24 1983-02-24 面形状測定用干渉計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2859783A JPS59154309A (ja) 1983-02-24 1983-02-24 面形状測定用干渉計

Publications (2)

Publication Number Publication Date
JPS59154309A true JPS59154309A (ja) 1984-09-03
JPH0549922B2 JPH0549922B2 (enrdf_load_stackoverflow) 1993-07-27

Family

ID=12252994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2859783A Granted JPS59154309A (ja) 1983-02-24 1983-02-24 面形状測定用干渉計

Country Status (1)

Country Link
JP (1) JPS59154309A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02259506A (ja) * 1989-03-31 1990-10-22 Canon Inc 縞走査型干渉測定装置
JPH0711664A (ja) * 1993-06-25 1995-01-13 Komatsu Zenoah Co 超小旋回パワショベル
JP2002006243A (ja) * 2000-06-21 2002-01-09 Nippon Telegr & Teleph Corp <Ntt> ３次元位置検出センサ及び位置決め方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5575603A (en) * 1978-11-30 1980-06-07 Ibm Method of measuring interference
JPS5862507A (ja) * 1981-09-17 1983-04-14 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン 表面の形状を光の干渉により決定する方法
JPS58176511A (ja) * 1982-04-09 1983-10-17 Hitachi Ltd 干渉方法及びその装置
JPS58208610A (ja) * 1982-05-17 1983-12-05 ブリティッシュ・テクノロジー・グループ・リミテッド 物体の表面検査装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5575603A (en) * 1978-11-30 1980-06-07 Ibm Method of measuring interference
JPS5862507A (ja) * 1981-09-17 1983-04-14 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン 表面の形状を光の干渉により決定する方法
JPS58176511A (ja) * 1982-04-09 1983-10-17 Hitachi Ltd 干渉方法及びその装置
JPS58208610A (ja) * 1982-05-17 1983-12-05 ブリティッシュ・テクノロジー・グループ・リミテッド 物体の表面検査装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02259506A (ja) * 1989-03-31 1990-10-22 Canon Inc 縞走査型干渉測定装置
JPH0711664A (ja) * 1993-06-25 1995-01-13 Komatsu Zenoah Co 超小旋回パワショベル
JP2002006243A (ja) * 2000-06-21 2002-01-09 Nippon Telegr & Teleph Corp <Ntt> ３次元位置検出センサ及び位置決め方法

Also Published As

Publication number Publication date
JPH0549922B2 (enrdf_load_stackoverflow) 1993-07-27

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