JPS59148251U - ウエハプロ−バの測定針研磨装置 - Google Patents

ウエハプロ−バの測定針研磨装置

Info

Publication number
JPS59148251U
JPS59148251U JP4119183U JP4119183U JPS59148251U JP S59148251 U JPS59148251 U JP S59148251U JP 4119183 U JP4119183 U JP 4119183U JP 4119183 U JP4119183 U JP 4119183U JP S59148251 U JPS59148251 U JP S59148251U
Authority
JP
Japan
Prior art keywords
polishing device
wafer prober
measurement needle
needle polishing
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4119183U
Other languages
English (en)
Japanese (ja)
Other versions
JPS64270Y2 (enExample
Inventor
谷本　勝美
英一 小林
Original Assignee
ロ−ム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ロ−ム株式会社 filed Critical ロ−ム株式会社
Priority to JP4119183U priority Critical patent/JPS59148251U/ja
Publication of JPS59148251U publication Critical patent/JPS59148251U/ja
Application granted granted Critical
Publication of JPS64270Y2 publication Critical patent/JPS64270Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
JP4119183U 1983-03-21 1983-03-21 ウエハプロ−バの測定針研磨装置 Granted JPS59148251U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4119183U JPS59148251U (ja) 1983-03-21 1983-03-21 ウエハプロ−バの測定針研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4119183U JPS59148251U (ja) 1983-03-21 1983-03-21 ウエハプロ−バの測定針研磨装置

Publications (2)

Publication Number Publication Date
JPS59148251U true JPS59148251U (ja) 1984-10-03
JPS64270Y2 JPS64270Y2 (enExample) 1989-01-06

Family

ID=30171785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4119183U Granted JPS59148251U (ja) 1983-03-21 1983-03-21 ウエハプロ−バの測定針研磨装置

Country Status (1)

Country Link
JP (1) JPS59148251U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH022939A (ja) * 1988-06-13 1990-01-08 Tokyo Electron Ltd プローブ装置および検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH022939A (ja) * 1988-06-13 1990-01-08 Tokyo Electron Ltd プローブ装置および検査方法

Also Published As

Publication number Publication date
JPS64270Y2 (enExample) 1989-01-06

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