JPS59146177A - 光照射加熱方法 - Google Patents
光照射加熱方法Info
- Publication number
- JPS59146177A JPS59146177A JP1886983A JP1886983A JPS59146177A JP S59146177 A JPS59146177 A JP S59146177A JP 1886983 A JP1886983 A JP 1886983A JP 1886983 A JP1886983 A JP 1886983A JP S59146177 A JPS59146177 A JP S59146177A
- Authority
- JP
- Japan
- Prior art keywords
- heated
- light source
- heat transfer
- light
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title claims description 44
- 238000000034 method Methods 0.000 title claims description 21
- 239000000463 material Substances 0.000 claims description 30
- 238000012546 transfer Methods 0.000 claims description 30
- 239000000758 substrate Substances 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 7
- 238000009826 distribution Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 239000010409 thin film Substances 0.000 description 6
- 230000001678 irradiating effect Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000011888 foil Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000002745 absorbent Effects 0.000 description 3
- 239000002250 absorbent Substances 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 235000013339 cereals Nutrition 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Control Of Resistance Heating (AREA)
- Resistance Heating (AREA)
- Vertical, Hearth, Or Arc Furnaces (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1886983A JPS59146177A (ja) | 1983-02-09 | 1983-02-09 | 光照射加熱方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1886983A JPS59146177A (ja) | 1983-02-09 | 1983-02-09 | 光照射加熱方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59146177A true JPS59146177A (ja) | 1984-08-21 |
| JPH0150837B2 JPH0150837B2 (enExample) | 1989-10-31 |
Family
ID=11983542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1886983A Granted JPS59146177A (ja) | 1983-02-09 | 1983-02-09 | 光照射加熱方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59146177A (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5390033A (en) * | 1977-01-19 | 1978-08-08 | Hitachi Ltd | Heat treatment equipment |
-
1983
- 1983-02-09 JP JP1886983A patent/JPS59146177A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5390033A (en) * | 1977-01-19 | 1978-08-08 | Hitachi Ltd | Heat treatment equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0150837B2 (enExample) | 1989-10-31 |
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