JPH0150837B2 - - Google Patents

Info

Publication number
JPH0150837B2
JPH0150837B2 JP58018869A JP1886983A JPH0150837B2 JP H0150837 B2 JPH0150837 B2 JP H0150837B2 JP 58018869 A JP58018869 A JP 58018869A JP 1886983 A JP1886983 A JP 1886983A JP H0150837 B2 JPH0150837 B2 JP H0150837B2
Authority
JP
Japan
Prior art keywords
light
heated
light source
transfer material
heat transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58018869A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59146177A (ja
Inventor
Tetsuharu Arai
Yoshiki Mimura
Seishiro Sato
Ryozo Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Ushio Denki KK
Original Assignee
Tokyo Electron Sagami Ltd
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd, Ushio Denki KK filed Critical Tokyo Electron Sagami Ltd
Priority to JP1886983A priority Critical patent/JPS59146177A/ja
Publication of JPS59146177A publication Critical patent/JPS59146177A/ja
Publication of JPH0150837B2 publication Critical patent/JPH0150837B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Resistance Heating (AREA)
  • Resistance Heating (AREA)
  • Vertical, Hearth, Or Arc Furnaces (AREA)
  • Furnace Details (AREA)
JP1886983A 1983-02-09 1983-02-09 光照射加熱方法 Granted JPS59146177A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1886983A JPS59146177A (ja) 1983-02-09 1983-02-09 光照射加熱方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1886983A JPS59146177A (ja) 1983-02-09 1983-02-09 光照射加熱方法

Publications (2)

Publication Number Publication Date
JPS59146177A JPS59146177A (ja) 1984-08-21
JPH0150837B2 true JPH0150837B2 (enExample) 1989-10-31

Family

ID=11983542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1886983A Granted JPS59146177A (ja) 1983-02-09 1983-02-09 光照射加熱方法

Country Status (1)

Country Link
JP (1) JPS59146177A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5925142B2 (ja) * 1977-01-19 1984-06-14 株式会社日立製作所 熱処理装置

Also Published As

Publication number Publication date
JPS59146177A (ja) 1984-08-21

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