JPS59143908A - 表面粗さ検出装置 - Google Patents

表面粗さ検出装置

Info

Publication number
JPS59143908A
JPS59143908A JP1867983A JP1867983A JPS59143908A JP S59143908 A JPS59143908 A JP S59143908A JP 1867983 A JP1867983 A JP 1867983A JP 1867983 A JP1867983 A JP 1867983A JP S59143908 A JPS59143908 A JP S59143908A
Authority
JP
Japan
Prior art keywords
optical system
light
optical
light receiving
divider
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1867983A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0151124B2 (enrdf_load_stackoverflow
Inventor
Narikata Oota
成賢 太田
Hiroya Fukatsu
拡也 深津
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP1867983A priority Critical patent/JPS59143908A/ja
Publication of JPS59143908A publication Critical patent/JPS59143908A/ja
Publication of JPH0151124B2 publication Critical patent/JPH0151124B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1867983A 1983-02-07 1983-02-07 表面粗さ検出装置 Granted JPS59143908A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1867983A JPS59143908A (ja) 1983-02-07 1983-02-07 表面粗さ検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1867983A JPS59143908A (ja) 1983-02-07 1983-02-07 表面粗さ検出装置

Publications (2)

Publication Number Publication Date
JPS59143908A true JPS59143908A (ja) 1984-08-17
JPH0151124B2 JPH0151124B2 (enrdf_load_stackoverflow) 1989-11-01

Family

ID=11978291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1867983A Granted JPS59143908A (ja) 1983-02-07 1983-02-07 表面粗さ検出装置

Country Status (1)

Country Link
JP (1) JPS59143908A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02196912A (ja) * 1988-01-11 1990-08-03 United Technol Corp <Utc> 光学測定方法及びその装置
JPH03211406A (ja) * 1990-01-16 1991-09-17 Masanori Kurita 表面粗さ測定装置および表面粗さ測定方法
JP2016517019A (ja) * 2013-04-26 2016-06-09 ゼネラル・エレクトリック・カンパニイ 表面粗さ測定装置
CN117420149A (zh) * 2023-10-11 2024-01-19 保利长大工程有限公司 一种用于钢板喷砂除锈检测的检测组件及其检测方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57163851A (en) * 1981-04-01 1982-10-08 Mitsutoyo Mfg Co Ltd Optical fiber

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57163851A (en) * 1981-04-01 1982-10-08 Mitsutoyo Mfg Co Ltd Optical fiber

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02196912A (ja) * 1988-01-11 1990-08-03 United Technol Corp <Utc> 光学測定方法及びその装置
JPH03211406A (ja) * 1990-01-16 1991-09-17 Masanori Kurita 表面粗さ測定装置および表面粗さ測定方法
JP2016517019A (ja) * 2013-04-26 2016-06-09 ゼネラル・エレクトリック・カンパニイ 表面粗さ測定装置
CN117420149A (zh) * 2023-10-11 2024-01-19 保利长大工程有限公司 一种用于钢板喷砂除锈检测的检测组件及其检测方法

Also Published As

Publication number Publication date
JPH0151124B2 (enrdf_load_stackoverflow) 1989-11-01

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