JPS59141056A - 半導体センサおよびその製造方法 - Google Patents
半導体センサおよびその製造方法Info
- Publication number
- JPS59141056A JPS59141056A JP58014449A JP1444983A JPS59141056A JP S59141056 A JPS59141056 A JP S59141056A JP 58014449 A JP58014449 A JP 58014449A JP 1444983 A JP1444983 A JP 1444983A JP S59141056 A JPS59141056 A JP S59141056A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- diffusion region
- item
- recess
- insulating base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 238000009792 diffusion process Methods 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 18
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 16
- 239000011521 glass Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 11
- 238000007740 vapor deposition Methods 0.000 claims description 8
- 239000008280 blood Substances 0.000 claims description 5
- 210000004369 blood Anatomy 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 3
- 238000001465 metallisation Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 2
- 238000005520 cutting process Methods 0.000 claims 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 12
- 150000002500 ions Chemical class 0.000 description 10
- 229910002092 carbon dioxide Inorganic materials 0.000 description 6
- 239000001569 carbon dioxide Substances 0.000 description 6
- 238000009413 insulation Methods 0.000 description 5
- 239000003792 electrolyte Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000008151 electrolyte solution Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58014449A JPS59141056A (ja) | 1983-01-31 | 1983-01-31 | 半導体センサおよびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58014449A JPS59141056A (ja) | 1983-01-31 | 1983-01-31 | 半導体センサおよびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59141056A true JPS59141056A (ja) | 1984-08-13 |
| JPH0339584B2 JPH0339584B2 (OSRAM) | 1991-06-14 |
Family
ID=11861339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58014449A Granted JPS59141056A (ja) | 1983-01-31 | 1983-01-31 | 半導体センサおよびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59141056A (OSRAM) |
-
1983
- 1983-01-31 JP JP58014449A patent/JPS59141056A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0339584B2 (OSRAM) | 1991-06-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4505799A (en) | ISFET sensor and method of manufacture | |
| JPS60501177A (ja) | 圧力センサ | |
| JPS6015549A (ja) | 抵抗測定フイ−ラ | |
| JPS59141056A (ja) | 半導体センサおよびその製造方法 | |
| JPS59176662A (ja) | 半導体センサ | |
| JPH0765985B2 (ja) | ＩＳＦＥＴ並びにこれを利用したＩＳＦＥＴプローブとＩＳＦＥＴ ｐＨセンサ | |
| JP3167022B2 (ja) | ガスセンサ | |
| JPH03131749A (ja) | 水素ガスセンサ | |
| JPS59142453A (ja) | イオンセンサ | |
| JPH0452409B2 (OSRAM) | ||
| JPS61120958A (ja) | ガラス応答膜を有するイオンセンサ | |
| JP3047138B2 (ja) | 湿度センサの製造方法 | |
| JPH0241581Y2 (OSRAM) | ||
| TW200900690A (en) | PH-ion selective field effect transistor (pH-ISFET) with a miniaturized silver chloride reference electrode | |
| JP2748523B2 (ja) | 水素イオン電極 | |
| JPS6014159A (ja) | イオンセンサ− | |
| JP3035368B2 (ja) | ガスセンサの製造方式 | |
| JP2527456B2 (ja) | 湿度センサ | |
| JPH0474666B2 (OSRAM) | ||
| JPS60158348A (ja) | Ｉｓｆｅｔセンサ | |
| JP2999522B2 (ja) | イオンセンサ | |
| JPH0429974B2 (OSRAM) | ||
| JPS59159404U (ja) | カテ−テル型ｐｈセンサ | |
| JPS6117945A (ja) | 湿度素子 | |
| JPH0320768Y2 (OSRAM) |