JPS59139626A - ウエ−ハの自動アライメント方法 - Google Patents

ウエ−ハの自動アライメント方法

Info

Publication number
JPS59139626A
JPS59139626A JP58229911A JP22991183A JPS59139626A JP S59139626 A JPS59139626 A JP S59139626A JP 58229911 A JP58229911 A JP 58229911A JP 22991183 A JP22991183 A JP 22991183A JP S59139626 A JPS59139626 A JP S59139626A
Authority
JP
Japan
Prior art keywords
wafer
stage
rollers
roller
orientation flat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58229911A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6240847B2 (enrdf_load_stackoverflow
Inventor
Atsushi Fujisawa
藤沢　厚
Kiyoshi Yoshida
清 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58229911A priority Critical patent/JPS59139626A/ja
Publication of JPS59139626A publication Critical patent/JPS59139626A/ja
Publication of JPS6240847B2 publication Critical patent/JPS6240847B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP58229911A 1983-12-07 1983-12-07 ウエ−ハの自動アライメント方法 Granted JPS59139626A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58229911A JPS59139626A (ja) 1983-12-07 1983-12-07 ウエ−ハの自動アライメント方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58229911A JPS59139626A (ja) 1983-12-07 1983-12-07 ウエ−ハの自動アライメント方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP3613977A Division JPS53122369A (en) 1977-04-01 1977-04-01 Automatic alignment unit for wafer

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP63098112A Division JPS63296237A (ja) 1988-04-22 1988-04-22 ウエーハの自動アライメント方法

Publications (2)

Publication Number Publication Date
JPS59139626A true JPS59139626A (ja) 1984-08-10
JPS6240847B2 JPS6240847B2 (enrdf_load_stackoverflow) 1987-08-31

Family

ID=16899665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58229911A Granted JPS59139626A (ja) 1983-12-07 1983-12-07 ウエ−ハの自動アライメント方法

Country Status (1)

Country Link
JP (1) JPS59139626A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6481517B1 (en) 1997-09-12 2002-11-19 Honda Giken Kogyo Kabushiki Kaisha Hybrid vehicle propulsion apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4912791A (enrdf_load_stackoverflow) * 1972-03-15 1974-02-04
JPS5081070A (enrdf_load_stackoverflow) * 1973-11-15 1975-07-01

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4912791A (enrdf_load_stackoverflow) * 1972-03-15 1974-02-04
JPS5081070A (enrdf_load_stackoverflow) * 1973-11-15 1975-07-01

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6481517B1 (en) 1997-09-12 2002-11-19 Honda Giken Kogyo Kabushiki Kaisha Hybrid vehicle propulsion apparatus
US6729423B2 (en) 1997-09-12 2004-05-04 Honda Giken Kogyo Kabushiki Kaisha Hybrid vehicle propulsion apparatus

Also Published As

Publication number Publication date
JPS6240847B2 (enrdf_load_stackoverflow) 1987-08-31

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