JPS59138757U - 半導体イオンセンサ - Google Patents

半導体イオンセンサ

Info

Publication number
JPS59138757U
JPS59138757U JP3365383U JP3365383U JPS59138757U JP S59138757 U JPS59138757 U JP S59138757U JP 3365383 U JP3365383 U JP 3365383U JP 3365383 U JP3365383 U JP 3365383U JP S59138757 U JPS59138757 U JP S59138757U
Authority
JP
Japan
Prior art keywords
ion sensor
semiconductor ion
groove
main surface
insulating substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3365383U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0241581Y2 (enrdf_load_stackoverflow
Inventor
敏秀 栗山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP3365383U priority Critical patent/JPS59138757U/ja
Publication of JPS59138757U publication Critical patent/JPS59138757U/ja
Application granted granted Critical
Publication of JPH0241581Y2 publication Critical patent/JPH0241581Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP3365383U 1983-03-09 1983-03-09 半導体イオンセンサ Granted JPS59138757U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3365383U JPS59138757U (ja) 1983-03-09 1983-03-09 半導体イオンセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3365383U JPS59138757U (ja) 1983-03-09 1983-03-09 半導体イオンセンサ

Publications (2)

Publication Number Publication Date
JPS59138757U true JPS59138757U (ja) 1984-09-17
JPH0241581Y2 JPH0241581Y2 (enrdf_load_stackoverflow) 1990-11-06

Family

ID=30164430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3365383U Granted JPS59138757U (ja) 1983-03-09 1983-03-09 半導体イオンセンサ

Country Status (1)

Country Link
JP (1) JPS59138757U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0241581Y2 (enrdf_load_stackoverflow) 1990-11-06

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