JPS59137346A - ガラス導波路の作製法 - Google Patents
ガラス導波路の作製法Info
- Publication number
- JPS59137346A JPS59137346A JP58010563A JP1056383A JPS59137346A JP S59137346 A JPS59137346 A JP S59137346A JP 58010563 A JP58010563 A JP 58010563A JP 1056383 A JP1056383 A JP 1056383A JP S59137346 A JPS59137346 A JP S59137346A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- substrate
- quartz glass
- waveguide
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 title claims abstract description 38
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 33
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 23
- 238000009792 diffusion process Methods 0.000 claims abstract description 20
- 239000002245 particle Substances 0.000 claims abstract description 10
- 239000000126 substance Substances 0.000 claims abstract description 9
- 238000000151 deposition Methods 0.000 claims abstract description 5
- 238000010438 heat treatment Methods 0.000 claims abstract description 5
- 238000000059 patterning Methods 0.000 claims abstract 2
- 230000003287 optical effect Effects 0.000 claims description 5
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims 2
- 229910052787 antimony Inorganic materials 0.000 claims 1
- 229910052758 niobium Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000010419 fine particle Substances 0.000 abstract description 5
- 150000002500 ions Chemical class 0.000 abstract description 5
- 229910052681 coesite Inorganic materials 0.000 abstract description 4
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 4
- 230000001590 oxidative effect Effects 0.000 abstract description 4
- 229910052682 stishovite Inorganic materials 0.000 abstract description 4
- 229910052905 tridymite Inorganic materials 0.000 abstract description 4
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 abstract description 2
- 238000000137 annealing Methods 0.000 abstract description 2
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 abstract description 2
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 abstract description 2
- 230000000630 rising effect Effects 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract 3
- 229910003910 SiCl4 Inorganic materials 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 230000007062 hydrolysis Effects 0.000 abstract 1
- 238000006460 hydrolysis reaction Methods 0.000 abstract 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000012266 salt solution Substances 0.000 description 2
- 244000025254 Cannabis sativa Species 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 229910008253 Zr2O3 Inorganic materials 0.000 description 1
- 235000014121 butter Nutrition 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Optical Integrated Circuits (AREA)
- Surface Treatment Of Glass (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58010563A JPS59137346A (ja) | 1983-01-27 | 1983-01-27 | ガラス導波路の作製法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58010563A JPS59137346A (ja) | 1983-01-27 | 1983-01-27 | ガラス導波路の作製法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59137346A true JPS59137346A (ja) | 1984-08-07 |
| JPS6365619B2 JPS6365619B2 (enrdf_load_stackoverflow) | 1988-12-16 |
Family
ID=11753707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58010563A Granted JPS59137346A (ja) | 1983-01-27 | 1983-01-27 | ガラス導波路の作製法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59137346A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61134730A (ja) * | 1984-12-06 | 1986-06-21 | Nec Corp | 光制御素子の製造方法 |
| JPS62217206A (ja) * | 1986-03-19 | 1987-09-24 | Sumitomo Electric Ind Ltd | 光導波路の製造方法 |
| WO2000046618A1 (en) * | 1999-02-05 | 2000-08-10 | The University Court Of The University Of Glasgow | Waveguide for an optical circuit and method of fabrication thereof |
| WO2012027987A1 (zh) * | 2010-09-01 | 2012-03-08 | 北京大学 | 锗基器件表面处理方法 |
-
1983
- 1983-01-27 JP JP58010563A patent/JPS59137346A/ja active Granted
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61134730A (ja) * | 1984-12-06 | 1986-06-21 | Nec Corp | 光制御素子の製造方法 |
| JPS62217206A (ja) * | 1986-03-19 | 1987-09-24 | Sumitomo Electric Ind Ltd | 光導波路の製造方法 |
| WO2000046618A1 (en) * | 1999-02-05 | 2000-08-10 | The University Court Of The University Of Glasgow | Waveguide for an optical circuit and method of fabrication thereof |
| GB2362963A (en) * | 1999-02-05 | 2001-12-05 | Univ Glasgow | Waveguide for an optical circuit and method of fabrication thereof |
| GB2362963B (en) * | 1999-02-05 | 2003-03-12 | Univ Glasgow | Waveguide for an optical circuit and method of fabrication thereof |
| US6735370B1 (en) | 1999-02-05 | 2004-05-11 | The University Court Of The University Of Glasgow | Waveguide for an optical circuit and method of fabrication thereof |
| WO2012027987A1 (zh) * | 2010-09-01 | 2012-03-08 | 北京大学 | 锗基器件表面处理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6365619B2 (enrdf_load_stackoverflow) | 1988-12-16 |
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