JPS5913616A - SiCの超微粉とその製造方法ならびに製造装置 - Google Patents
SiCの超微粉とその製造方法ならびに製造装置Info
- Publication number
- JPS5913616A JPS5913616A JP57120107A JP12010782A JPS5913616A JP S5913616 A JPS5913616 A JP S5913616A JP 57120107 A JP57120107 A JP 57120107A JP 12010782 A JP12010782 A JP 12010782A JP S5913616 A JPS5913616 A JP S5913616A
- Authority
- JP
- Japan
- Prior art keywords
- powder
- sio
- sic
- ultrafine
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 title claims abstract description 113
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 title description 15
- 238000010438 heat treatment Methods 0.000 claims abstract description 42
- 239000002245 particle Substances 0.000 claims abstract description 33
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000001301 oxygen Substances 0.000 claims abstract description 10
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 10
- 238000005121 nitriding Methods 0.000 claims description 14
- 238000003763 carbonization Methods 0.000 claims description 13
- 230000009467 reduction Effects 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 36
- 239000000203 mixture Substances 0.000 abstract description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 12
- 239000007789 gas Substances 0.000 abstract description 11
- 238000010000 carbonizing Methods 0.000 abstract description 10
- 238000003860 storage Methods 0.000 abstract description 8
- 239000007858 starting material Substances 0.000 abstract description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 6
- 238000011282 treatment Methods 0.000 abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052799 carbon Inorganic materials 0.000 abstract description 3
- 238000009826 distribution Methods 0.000 abstract description 3
- 229910021529 ammonia Inorganic materials 0.000 abstract description 2
- 229910052681 coesite Inorganic materials 0.000 abstract description 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 2
- 229910052682 stishovite Inorganic materials 0.000 abstract description 2
- 229910052905 tridymite Inorganic materials 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229930195733 hydrocarbon Natural products 0.000 description 8
- 150000002430 hydrocarbons Chemical class 0.000 description 8
- 239000002994 raw material Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 230000002776 aggregation Effects 0.000 description 4
- 230000015271 coagulation Effects 0.000 description 4
- 238000005345 coagulation Methods 0.000 description 4
- 239000011362 coarse particle Substances 0.000 description 4
- 238000009833 condensation Methods 0.000 description 4
- 230000005494 condensation Effects 0.000 description 4
- 238000000635 electron micrograph Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000004215 Carbon black (E152) Substances 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010791 quenching Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000005054 agglomeration Methods 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000000171 quenching effect Effects 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000001112 coagulating effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000009461 vacuum packaging Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Carbon And Carbon Compounds (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57120107A JPS5913616A (ja) | 1982-07-09 | 1982-07-09 | SiCの超微粉とその製造方法ならびに製造装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57120107A JPS5913616A (ja) | 1982-07-09 | 1982-07-09 | SiCの超微粉とその製造方法ならびに製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5913616A true JPS5913616A (ja) | 1984-01-24 |
JPS615645B2 JPS615645B2 (enrdf_load_stackoverflow) | 1986-02-20 |
Family
ID=14778098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57120107A Granted JPS5913616A (ja) | 1982-07-09 | 1982-07-09 | SiCの超微粉とその製造方法ならびに製造装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5913616A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120289641A1 (en) * | 2008-12-29 | 2012-11-15 | Greene, Tweed Of Delaware, Inc. | Crosslinkable Fluorine-Containing Elastomer Composition and Molded Article Made of Said Composition |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0295639U (enrdf_load_stackoverflow) * | 1989-01-11 | 1990-07-30 | ||
WO1991001270A1 (en) * | 1989-07-14 | 1991-02-07 | Institut Strukturnoi Makrokinetiki Akademii Nauk Sssr | Method for obtaining silicon carbide powder |
-
1982
- 1982-07-09 JP JP57120107A patent/JPS5913616A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120289641A1 (en) * | 2008-12-29 | 2012-11-15 | Greene, Tweed Of Delaware, Inc. | Crosslinkable Fluorine-Containing Elastomer Composition and Molded Article Made of Said Composition |
US9914818B2 (en) * | 2008-12-29 | 2018-03-13 | Greene, Tweed Technologies, Inc. | Crosslinkable fluorine-containing elastomer composition and molded article made of said composition |
Also Published As
Publication number | Publication date |
---|---|
JPS615645B2 (enrdf_load_stackoverflow) | 1986-02-20 |
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