JPS59132410A - Manufacture of magnetic head - Google Patents

Abstract

PURPOSE:To place a winding for recording/reproduction close to a vertical magnetization film by making a slot around a magnetic thin film on the surface of a base verticaly to the magnetic thin film except for the tip of the magnetic thin film and forming a spiral conductor thin film winding in the slot. CONSTITUTION:Silicon dioxide or the like is adhered as a protection film 3-2 on the surface of a base 3-1 by the sputtering method or the like and a magnetic thin film 3-3 made of permalloy, amorphous magnetic substance or the like for constituting a magnetic pole is formed on the film 3-2 in a required thickness and width. Further, silicon dioxide or the like is adhered as a protection film 3-5 by the sputtering method or the like and the other base 3-6 is bonded. Then, after a surface facing a recording medium is polished, the face is engraved by several microns by the sputter etching of the like. Further, the thin film winding 3-7 is formed so as to connect the start and the end points of an electrode lead 3-4 and the thin film winding 3-7 together.

Description

DETAILED DESCRIPTION OF THE INVENTION A perpendicular magnetic recording method using a perpendicular diluted film recording medium has been extensively studied as a method for recording at a higher intensity than the conventional magnetic recording method. Perpendicular magnetism (%Note required for a magnetic head used in a recording method is how strong a magnetic field can be generated in the direction perpendicular to the perpendicular magnetization film surface,
The other question is how efficiently cans recorded in the perpendicular magnetization film can be extracted.

As an S magnetic head that satisfies this attachment property, there is a magnetic head as shown in FIG. 1, which is composed of a main magnetic pole 1-1 made of a magnetic thin film and an auxiliary magnetic pole 1-2 wound upstream of a magnetic material. However, the magnetic heads are arranged on both sides of the recording medium consisting of the perpendicularly magnetized films 1-6, which is disadvantageous when considering the compactness of the hunting recording device. If it becomes thick, the main magnetic pole 1-
As the interval between the auxiliary small poles 1 and 2 becomes wider, the leakage of 8 bundles increases, resulting in poor recording and reproducing efficiency.

In terms of practical use, it is desirable that the magnetic head be placed only on one side of the recording medium, so a structure in which the winding for recording and writing is placed upstream of the main magnetic pole 2-1 is considered, as shown in Figure 2. belongs to. Since the main magnetic pole 21ki leaks into the space, in order to sufficiently saturate the main magnetic pole tip 2-2 during recording, the ``fc, a8 flux'' flowing from the recording medium during playback leaks into the space. In order to perform detection before recording, the winding a2-6 through which the recording/reproducing main current flows should be as close as possible to the surface of the vertical sensitive film 2-4, which is the recording medium.

SUMMARY OF THE INVENTION An object of the present invention is to provide a method for manufacturing an 8-magnitude head having a structure that can approach a fully perpendicular magnetized film for recording and reproducing windings.

FIG. 6 shows an example of a method for manufacturing an inventive magnetic head.

The figures indicated by capital letters such as (A), (B), (0), etc. are cross-sectional views of the magnetic head (a) and (b).

(C) . . . Figures indicated by lowercase letters are viewed from the side facing the recording medium.

First, as shown in (A) and (a), a protective film 3-2 such as silicon dioxide is applied to the surface of the substrate 3-1 by sputtering, and on top of that, permalloy, amorphous, etc., which will become the main magnetic pole, are applied. A magnetic thin film 3-5 made of a magnetic material or the like is formed with a required thickness and width. In addition, the lead wires 3-4 of the volumes #jt;o>, etc. are also formed of a conductive thin film.Furthermore, silicon dioxide or the like is applied as a protective film 3-5 by a sputtering method, and the other substrate 3
-6 is attached.

Next, Shun (B) polished the surface facing the recording medium.

As shown in (b), a trench 9 of several microns is made on the surface by sputter etching or the like.

Next, as shown in (0) and (c) VC, thin film windings 3-7 are formed so that the electrode lead wire 6-4 and the starting and ending points of the thin film winding 5-7 are connected.

Then, as shown in (D), a material such as tantalum pentoxide, which has good abrasion resistance and insulating properties, is applied by sputtering method, and is temporarily polished to form an IE recording medium. The surface facing the perpendicularly magnetized film 5-9 is smoothed. In the third example above, the method for manufacturing one head was shown, but in order to remove a large number of heads in one process, Since the head is manufactured, this will be explained with reference to FIG.

FIG. 4(1) corresponds to FIGS. 3(A) and (a), in which both the front and back sides are mirror-polished. 4? ]l″Multiple set Iy:
,do. At this time, a space 4-1 is left on the board for later attaching the lead wire 4-4 to the extraction electrode 6-4'.

Subsequently, as shown in FIG. 4(2), a large number of substrates 6-1 are layered. The surface of the can facing the recording medium is polished.

In this case, as shown in Figures 3(B) to 3(D), a moat 9 is formed on the surface of the magnetic head, a conductive thin film winding 6-7 is formed, and a wear-resistant film 3-8 is attached. This is because the distance from the surface of the magnetic head to the thin film winding 6-71 is short, so that the surface of the magnetic head can be polished as lightly as possible. This polished surface becomes the substrate surface for subsequent processes.

Next, in FIG. 4(3), corresponding to the steps shown in FIGS. 5(B) to (D), the substrate surface around the sensitive thin film 6-3 is formed by sputter etching or the like to form a moat 9, in which a spiral conductor is formed. A thin film 3-7 is formed, and a wear-resistant film 3-8? iI - This is the process of attaching it to the entire surface of the substrate.

Then, as shown in Fig. 4 (4), each magnetic head is cut into individual magnetic heads, and a groove 4-3 is formed as shown in Fig. 4 (5) to form a slider. Thereafter, final polishing is performed on the surface facing the recording medium, and a lead wire is connected to the lead electrode 6-4 from the thin film winding 3-7 as shown in FIG. 4(6).

By using the manufacturing method described above, it has become possible to manufacture a magnetic head with good reproducibility in which the distance between the recording medium and the thin film winding of an 8-layer head is about 1 μm or less.

[Brief explanation of drawings]

Figures 1 and 2 show M for perpendicular magnetic recording, which was considered by the United States.
1 (The arrangement of the head, FIGS. 6 and 4, illustrate the manufacturing method of the uninvented magnetic head. 1-1...Main M1 pole 1-2...Auxiliary small pole 1 -3... Perpendicularly magnetized film 2-1... Main magnetic pole 2-2... Main magnetic pole tip 2-5 ・Winding 2-4... Perpendicularly magnetized film 3-1... Substrate 6-2 ...Protective film 6-6...Main magnetic pole 6-4...Electrode lead wire 3=5...Protective film 6-6...Substrate 5-7...Thin film winding 3-8... ... Wear-resistant film 5-9 ... Perpendicular magnetization film 6-10 ... Main pole tip 4-1 ... Chamfering 4-2 ... Hollowing 4-3 ... Structure 4-4 ...Lead line or above Applicant Suwa Seikosha Co., Ltd. Agent Mogami Patent Attorney Figure 1 Cause 2 (C') (C) Figure 3 = 51 ~ Figure 3 (1) Figure 4

Claims (1)

[Claims] In a magnetic head used for perpendicular magnetic recording, another similar substrate is attached to a substrate on which a thin film is formed in the desired shape.
, on the surface of the substrate perpendicular to the magnetic thin film,
A method for manufacturing a magnetic head, characterized in that a groove 9 is formed in the same curve of the magnetic thin film, leaving the tip of the magnetic thin film, and a spiral conductive thin film winding is formed in this groove.