JPS626420A - Thin film magnetic head - Google Patents

Thin film magnetic head

Info

Publication number
JPS626420A
JPS626420A JP14253785A JP14253785A JPS626420A JP S626420 A JPS626420 A JP S626420A JP 14253785 A JP14253785 A JP 14253785A JP 14253785 A JP14253785 A JP 14253785A JP S626420 A JPS626420 A JP S626420A
Authority
JP
Japan
Prior art keywords
magnetic
magnetic yoke
yoke
nonmagnetic
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14253785A
Other languages
Japanese (ja)
Inventor
Hiroaki Yoda
博明 與田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP14253785A priority Critical patent/JPS626420A/en
Publication of JPS626420A publication Critical patent/JPS626420A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3916Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide
    • G11B5/3919Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path
    • G11B5/3922Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure
    • G11B5/3925Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure the two parts being thin films

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To prevent a decrease in yield due to bad insulation by forming a nonmagnetic material between the front part and the rear part of the lower magnetic yoke consisting of Ni-Zn ferrite and further providing a magneto- resistance effect element which is bonded respectively to the lower front magnetic yoke and the lower rear magnetic yoke. CONSTITUTION:The lower front magnetic yoke 12 and the lower rear magnetic yoke 13 both of which are formed with Ni-Zn ferrite are formed integrally with a nonmagnetic substrate 11 on both sides of a nonmagnetic groove 11a on the nonmagnetic substrate 11 through a bonding part 14. A nonmagnetic material 15 is embedded between the lower magnetic yokes 12 and 13 so that the surfaces on the opposite side of the nonmagnetic substrate 11 are allowed to lie in the same plane and a magneto-resistance effect (MR) element 4 consisting, for example, of Ni-Fe or Co-Ni is formed so that the parts of the lower magnetic yokes 12 and 13 are directly bonded on the surface. Accordingly, the lower magnetic yokes 12 and 13 and the MR element 4 are directly bonded without a magnetic gap in between. Consequently, a decrease in yield due to bad insulation can be prevented.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は薄膜磁気ヘッドに係り、特にヨークタイプの磁
気抵抗効果型薄膜磁気ヘッド(以下単にMRヘッドと称
する)に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a thin film magnetic head, and particularly to a yoke type magnetoresistive thin film magnetic head (hereinafter simply referred to as an MR head).

〔発明の技術的背景〕[Technical background of the invention]

近年磁気記録が高密度化されるに伴い、薄膜技術を用い
て製造されるMRヘッドが注目されている。このヨーク
タイプMRIヘッドは従来は第3図、第4図または第5
図、第6図にそれぞれ斜視図、断面図として示すように
、磁気テープなどの記録媒体から発生する磁束を下部磁
性ヨーク1または2→上部後部磁性ミーク3→凪素子4
→上部前部磁性ヨーク5へと導き、MR1i子4の磁化
回転による抵抗変化を出力端子6により取り出すように
構成されている。そして、このような機能を持たせるた
めにはMR素子4に十分な磁束を導いて、このMR素子
4の抵抗変化を精度よく取り出す必要がある。このため
にはMR,素子4と上部前部磁性ヨーク5及び上部後部
磁性目−り3とが磁気的に短絡し、電気的には絶縁され
ていなければならない。
2. Description of the Related Art As magnetic recording density has increased in recent years, MR heads manufactured using thin film technology have attracted attention. This yoke type MRI head was conventionally shown in Figures 3, 4, or 5.
As shown as a perspective view and a cross-sectional view in FIG. 6 and FIG.
→The structure is such that the resistance change due to the magnetization rotation of the MR1i element 4 is taken out through the output terminal 6. In order to provide such a function, it is necessary to guide sufficient magnetic flux to the MR element 4 and accurately extract the resistance change of the MR element 4. For this purpose, the MR element 4, the upper front magnetic yoke 5, and the upper rear magnetic eye 3 must be magnetically short-circuited and electrically insulated.

しかし現状においては上記の各種磁性薄膜形成はスパッ
タ1蒸着またはメツヤなどの手段によるため)パーマロ
イ、センダストまたはアモルファスなどの合金磁性膜し
か開発されておらず、このためMR,素子4と上部磁性
ヨーク3,5との間にSiO2などの絶縁膜7(第4図
、第6図参照)を設ける必要があった。なお第3図〜第
6図において、8は磁気ギヤノブ、9はバイアス用導体
、10は非磁性溝である。
However, at present, the various types of magnetic thin films described above are formed by means such as sputtering 1 evaporation or coating), and only alloy magnetic films such as permalloy, sendust, or amorphous have been developed. , 5, it was necessary to provide an insulating film 7 such as SiO2 (see FIGS. 4 and 6). In FIGS. 3 to 6, 8 is a magnetic gear knob, 9 is a bias conductor, and 10 is a non-magnetic groove.

〔背景技術の問題点〕[Problems with background technology]

上述したような従来の薄膜磁気ヘッドにおいては、MR
素子4と上部磁性ヨーク3,5との間に形成された絶縁
膜7は、磁気的に短絡し電気的に絶縁させるためにその
厚さdを100OA〜2000λ程度に薄くしなければ
ならない。しかしながらこの程度の厚さで十分に信頼性
のある絶縁膜はまだ開発されていない。従って、絶縁不
良による製造歩留まりが悪くなるという問題があった。
In the conventional thin film magnetic head as described above, MR
The thickness d of the insulating film 7 formed between the element 4 and the upper magnetic yokes 3 and 5 must be reduced to about 100 OA to 2000 λ in order to provide magnetic short-circuiting and electrical insulation. However, a sufficiently reliable insulating film with such a thickness has not yet been developed. Therefore, there is a problem in that the manufacturing yield deteriorates due to poor insulation.

また、この絶縁膜7の存在によりMR素子4と上部磁性
ヨーク3,5とは磁気的にもギャップが生じ、磁気ヘッ
ド全体としての実効的な透磁率が低下し)感度が悪くな
るという欠点もあった。
Furthermore, due to the presence of this insulating film 7, a magnetic gap is created between the MR element 4 and the upper magnetic yokes 3 and 5, which reduces the effective magnetic permeability of the entire magnetic head, resulting in poor sensitivity. there were.

〔発明の目的〕 本発明は上述した点に鑑みてなされたものであり、高感
度のヨークタイプMR,ヘッドを提供することを目的と
する。
[Object of the Invention] The present invention has been made in view of the above-mentioned points, and an object of the present invention is to provide a highly sensitive yoke type MR head.

〔発明の概要〕[Summary of the invention]

本発明は磁気ヘッド内に設けられた磁気抵抗効果素子に
磁束を導き、磁界の変化をその抵抗値の変化として取り
出すヨークタイプ磁気抵抗効果型の薄膜磁気ヘッドにお
いて、Ni −’Znフェライトよりなる下部磁性ヨー
クを前部、後部に分離し、その間に非磁性体を形成し、
さらにこれらの下部前部磁性ヨークと下部後部磁性ヨー
クのそれぞれに接合する磁気抵抗効果素子を設けること
により、所期の目的を達成するようにしたものである0
〔発明の実施例〕 以下、本発明に係る薄膜磁気ヘッドの一実施例を図面を
参照して説明する。
The present invention relates to a yoke type magnetoresistive thin film magnetic head that guides magnetic flux to a magnetoresistive element provided in the magnetic head and extracts changes in the magnetic field as changes in its resistance value. The magnetic yoke is separated into the front and rear parts, and a non-magnetic material is formed between them.
Furthermore, by providing magnetoresistive elements connected to each of the lower front magnetic yoke and the lower rear magnetic yoke, the intended purpose is achieved.
[Embodiment of the Invention] Hereinafter, an embodiment of a thin film magnetic head according to the present invention will be described with reference to the drawings.

第1図及び第2図は本発明の一実施例を示すそれぞれ斜
視図及び断面図である。これらの図において第3図〜第
6図に示す従来例と同一または同等部分には同一符号を
付して示す0ガラスなどで形成された非磁性基板11上
には図示せぬ磁気テープが摺動する磁気ヘッド摺動面と
ほぼ平行に非磁性溝11aが形成されており、この非磁
性基板11上の非磁性溝11aの両側には、それぞれN
i −Znフェライトにより形成された下部前部磁性ヨ
ーク12及び下部後部磁性ヨーク13が、ガラス溶融接
合などによる接合部14を介して前記非磁性基板11と
一体に設けられている。これらの下部磁性ヨーク12゜
13の間には非磁性基板11と反対側の面が同一面にな
るようにガラスなどの非磁性体15が埋め込まれており
、これらの面上に下部磁性ヨーク12.13の一部が直
接接合されるようにNi−FeまたはCo −Niなど
よりなるMR素子4が公知のN膜技術により形成されて
いる。このMR素子4の両端部にはMR素子4の抵抗変
化を取り出すための、 Cu、 Au。
1 and 2 are a perspective view and a sectional view, respectively, showing an embodiment of the present invention. In these figures, the same or equivalent parts as those of the conventional example shown in FIGS. 3 to 6 are denoted by the same reference numerals.A magnetic tape (not shown) is slid on a non-magnetic substrate 11 made of glass or the like. A non-magnetic groove 11a is formed approximately parallel to the sliding surface of the moving magnetic head, and N grooves 11a are formed on both sides of the non-magnetic groove 11a on the non-magnetic substrate 11, respectively.
A lower front magnetic yoke 12 and a lower rear magnetic yoke 13 made of i-Zn ferrite are integrally provided with the nonmagnetic substrate 11 via a bonding portion 14 formed by glass melt bonding or the like. A non-magnetic material 15 such as glass is embedded between these lower magnetic yokes 12 and 13 so that the surface opposite to the non-magnetic substrate 11 is the same surface, and the lower magnetic yokes 12 and 15 are embedded on these surfaces. An MR element 4 made of Ni--Fe or Co--Ni is formed by a known N film technique so that a part of the .13 is directly bonded. Both ends of this MR element 4 are coated with Cu and Au in order to extract the resistance change of the MR element 4.

Mなどよりなるぢ]き出し線6が接続形成されている。A lead wire 6 made of M or the like is connected and formed.

このMR素子4の上には磁気ギャップ8を介してNi 
−Fe 、センダストまたはCo−Zn−N)などより
なる上部磁性ヨーク16が積層されており、この上部磁
性ヨーク16の一端は直接前記下部後部磁性ヨーク13
に接続されている。またこの上部磁性ヨーク16とMR
素子4との間には、このM R素子4にバイアス磁界を
与えるためのCu、 Au、 Mなどよりなる導体9が
設けられている。そして前述したように下部面部磁性ヨ
ーク12→MR素子3→下部後部磁性ヨーク13→上部
磁性ヨーク15と磁気ギャップ8を介して磁気回路を形
成しており、バイアス用導体9に電流を流すことにより
バイアス磁界が印加できるように構成されている。
Ni is placed on top of this MR element 4 via a magnetic gap 8.
An upper magnetic yoke 16 made of a material such as -Fe, Sendust or Co-Zn-N is laminated, and one end of this upper magnetic yoke 16 is directly connected to the lower rear magnetic yoke 13.
It is connected to the. In addition, this upper magnetic yoke 16 and MR
A conductor 9 made of Cu, Au, M, etc. is provided between the MR element 4 and the MR element 4 to apply a bias magnetic field. As mentioned above, a magnetic circuit is formed through the magnetic gap 8 with the lower surface magnetic yoke 12 → MR element 3 → lower rear magnetic yoke 13 → upper magnetic yoke 15, and by passing a current through the bias conductor 9. It is configured so that a bias magnetic field can be applied.

上述したように構成された本実施例につき、以下にその
作用を説明する。下部磁性ヨーク12.13に比抵抗1
ONIOΩcmのNi −’Inフェライトを用いてい
るため、下部磁性ヨーク12.13とMR素子4とはそ
の間に磁気的ギャップを介さずに直接接合できる。よっ
て従来の薄膜磁気ヘッドにおいて必要とした上部前部磁
性ヨーク5及び上b!後部磁性ヨーク3とMR素子4と
の間の絶縁膜7が不要となり、絶縁不良による歩留り低
下がない。また記録媒体からの磁界が微小な場合でも、
上部磁性ヨーク15%下部磁性ヨーク12.13を通し
て磁束をMR素子4に収束させることができる。
The operation of this embodiment configured as described above will be explained below. Specific resistance 1 in lower magnetic yoke 12.13
Since Ni-'In ferrite with ONIO Ωcm is used, the lower magnetic yoke 12, 13 and the MR element 4 can be directly bonded to each other without a magnetic gap therebetween. Therefore, the upper front magnetic yoke 5 and the upper b! The insulating film 7 between the rear magnetic yoke 3 and the MR element 4 is not required, and there is no reduction in yield due to poor insulation. Furthermore, even when the magnetic field from the recording medium is minute,
The magnetic flux can be focused on the MR element 4 through the upper magnetic yoke 15% and the lower magnetic yoke 12.13.

〔発明の効果〕〔Effect of the invention〕

上述したように本発明によれば、下部磁性ヨークをI’
fi−4tフエライトにより形成するとともに、前部後
部に分離してその一部をM1%素子に直接接続したもの
であるので、絶縁不良による歩留りの低下を防止でき、
磁束収束効率や実効的透磁率が向上して波長特性のすぐ
れたヨークタイプMRヘッドを得ることができる。
As described above, according to the present invention, the lower magnetic yoke is
It is made of fi-4t ferrite, and is separated into the front and rear parts and a part of it is directly connected to the M1% element, so it is possible to prevent a decrease in yield due to poor insulation.
A yoke type MR head with improved magnetic flux convergence efficiency and effective magnetic permeability and excellent wavelength characteristics can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る薄膜磁気ヘッドの一実施例を示す
斜視図、第2図は第1図のヘッドのA−Ag断面図 第
3図及び第5図は従来の薄膜磁気ヘッドを示す斜視図、
第4図及び第6図はそれぞれ第3図のヘッドのB−BM
断面図及び第5図のヘッドのC−C線断面図である。 4・・・MR素子 12・・・下部前部磁性ヨーク13
・・・下部後部磁性ヨーク 15・・・非磁性体代理人
 弁理士  則  近  憲  佑(ほか1名)
FIG. 1 is a perspective view showing an embodiment of the thin film magnetic head according to the present invention, and FIG. 2 is a sectional view taken along line A-Ag of the head shown in FIG. 1. FIGS. 3 and 5 show conventional thin film magnetic heads. Perspective view,
Figures 4 and 6 are B-BM of the head in Figure 3, respectively.
FIG. 6 is a sectional view and a sectional view taken along the line CC of the head in FIG. 5; 4...MR element 12...Lower front magnetic yoke 13
... Lower rear magnetic yoke 15 ... Non-magnetic agent Patent attorney Noriyuki Chika (and one other person)

Claims (1)

【特許請求の範囲】[Claims] 磁気ヘッド内に設けられた磁気抵抗効果素子に磁束を導
き、磁界の変化をその抵抗値の変化として取り出すヨー
クタイプ磁気抵抗効果型の薄膜磁気ヘッドにおいて、N
i−Znフェライトよりなり前部、後部に分離された下
部磁性ヨークと、これらの分離された下部磁性ヨークの
間に形成された非磁性体と、前記下部前部磁性ヨーク及
び下部後部磁性ヨークのそれぞれに接合する磁気抵抗効
果素子とを具備したことを特徴とする薄膜磁気ヘッド。
N
A lower magnetic yoke made of i-Zn ferrite and separated into a front part and a rear part, a non-magnetic material formed between these separated lower magnetic yokes, and a lower front magnetic yoke and a lower rear magnetic yoke. A thin-film magnetic head characterized by comprising a magnetoresistive element bonded to each.
JP14253785A 1985-07-01 1985-07-01 Thin film magnetic head Pending JPS626420A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14253785A JPS626420A (en) 1985-07-01 1985-07-01 Thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14253785A JPS626420A (en) 1985-07-01 1985-07-01 Thin film magnetic head

Publications (1)

Publication Number Publication Date
JPS626420A true JPS626420A (en) 1987-01-13

Family

ID=15317659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14253785A Pending JPS626420A (en) 1985-07-01 1985-07-01 Thin film magnetic head

Country Status (1)

Country Link
JP (1) JPS626420A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04117504U (en) * 1991-01-21 1992-10-21 ヤンマー農機株式会社 Variable width rotary cover
EP0889460A1 (en) * 1997-07-04 1999-01-07 STMicroelectronics S.r.l. An electromagnetic head with magnetoresistive means connected to a magnetic core

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56159831A (en) * 1980-05-09 1981-12-09 Mitsubishi Electric Corp Reluctance effect type head
JPS5977618A (en) * 1982-10-27 1984-05-04 Sony Corp Magneto-resistance effect type magnetic head

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56159831A (en) * 1980-05-09 1981-12-09 Mitsubishi Electric Corp Reluctance effect type head
JPS5977618A (en) * 1982-10-27 1984-05-04 Sony Corp Magneto-resistance effect type magnetic head

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04117504U (en) * 1991-01-21 1992-10-21 ヤンマー農機株式会社 Variable width rotary cover
EP0889460A1 (en) * 1997-07-04 1999-01-07 STMicroelectronics S.r.l. An electromagnetic head with magnetoresistive means connected to a magnetic core
US6134088A (en) * 1997-07-04 2000-10-17 Stmicroelectronics S.R.L. Electromagnetic head with magnetoresistive means connected to a magnetic core

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